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The Study of Characteristics Evaluation for Bimorph PZT Cantilever and its Application

바이몰프 PZT 캔틸레버 특성평가 및 응용연구

  • 김석삼 (경북대학교 기계공학부) ;
  • 채영훈 (경북대학교 트라이볼로지연구소) ;
  • 권현규 (금오공과대학교 기계공학부)
  • Published : 2003.06.01

Abstract

The characteristics for bimorph PZT cantilever of laboratory-fabricated have been evaluated experimentally. The deflections of cantilever with PZT are result from a capillary force between a water drop and a tip of cantilever. The output voltage due to deflect cantilever are depend on the tip shape and thickness of cantilever. We applied a bimorph PZT cantilever to oil thickness measurement. This reasonable concept is that the output voltage be caused by different defected characteristics between oil and surface. Experimental results demonstrated that the high measurement accuracy of the oil film thickness is obtained from the probe.

Keywords

References

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