• Title/Summary/Keyword: Ion beam method

Search Result 411, Processing Time 0.031 seconds

Optical Properties of $TiO_2$ Thin Films Prepared by Ion-beam Assisted Deposition (이온빔 보조 증착법에 의해 제작된 $TiO_2$ 박막의 광학적 특성)

  • 조현주;이홍순;황보창권;이민희;박대윤
    • Korean Journal of Optics and Photonics
    • /
    • v.5 no.1
    • /
    • pp.9-17
    • /
    • 1994
  • Optical properties of $TiO_2$ thin films prepared by ion-beam assisted deposition(1BAD) were investigated. The result shows that the refractive index of IBAD TiOL thin films measured by an envelope method is closer to that of the corresponding bulk than that of conventionally deposited $TiO_2$ thin films and the packing density of IBAD $TiO_2$ thin films measured by a vacuum-to-air spectral shift of films increases drastically. The vacuum-to-air spectral shift of an IBAD $(TiO_2/SiO_2)$ multilayer interference filter was negligible as compared to that of a conventional interference filter and so the IBAD filter is denser and more stable optically than the conventional filter. Also it is observed that the IBAD and conventional $TiO_2$ thin films are stoichiometric and amorphous.

  • PDF

Comparison of Soft Magnetic Properties of Permalloy and Conetic Thin Films (퍼멀로이와 코네틱 박막의 연자성 특성 비교)

  • Choi, Jong-Gu;Hwang, Do-Guwn;Lee, Sang-Suk;Rhee, Jang-Roh
    • Journal of the Korean Magnetics Society
    • /
    • v.19 no.4
    • /
    • pp.142-146
    • /
    • 2009
  • The soft magnetic property for the Corning glass/Ta(5 nm)/[Conetic, Permalloy)/Ta(3 nm) prepared by the ion beam deposition sputtering was investigated. The coercivity and saturation magnetic field of conetic (NiFeCuMo) and permalloy (NiFe) layer with easy and hard direction along to the applying magnetic field during deposition was compared with each other. The surface resistance of conetic film with a thickness of 10 nm was 2 times lower than one of permalloy film. The coercivity and the magnetic susceptibility of conetic film decreased and increased 3 times to one of permalloy film, respectively. These results suggest that a highly sensitive GMR-SV or MTJ using conetic film can be possible to develop the bio-device.

Design of an Air-Core HTS quadruple triplet for a heavy ion accelerator

  • Zhang, Zhan;Wei, Shaoqing;Lee, Sangjin
    • Progress in Superconductivity and Cryogenics
    • /
    • v.18 no.4
    • /
    • pp.35-39
    • /
    • 2016
  • In recent years, high-temperature superconductor (HTS) Quadruple Triplets are being developed for heavy ion accelerators, because the HTS magnets are suitable to withstand radiation and high heat loads in the hot cell of accelerators. Generally, an iron yoke, which costs a mass of material, was employed to enhance the magnetic field when a quadrupole magnet was designed. The type of the magnet is called iron-dominated magnet, because the total magnetic field was mainly induced by the iron. However, in the HTS superconductor iron-dominated magnets, the coil-induced field also can have a certain proportion. Therefore, the air-core HTS quadrupole magnets can be considered instead of the iron-core HTS quadrupole magnet to be employed to save the iron material. This study presents the design of an air-core HTS quadruple triplet which consists three by air-core HTS quadruple magnet and compare the design result with that of an iron-core HTS quadruple triplet. First, the characteristics of an air-core HTS quadrupole magnet were analyzed to select the magnet system for the magnetic field uniformity impairment. Then, the field uniformity was improved(< 0.1%) exactly using evolution strategy (ES) method for each iron-core HTS quadrupole magnet and the air-core HTS quadruple triplet was established. Finally, the designed air-core triplet was compared with the iron-core HTS quadruple triplet, and the results of beam trajectories were presented with both the HTS quadruple triplet systems to show that the air-core triplet can be employed instead of the iron-core HTS triplet. The design of the air-core quadruple triplet was suggested for a heavy ion accelerator.

Fabrication of multi-mode interference $1\times4$ optical power splitter using glass integrated optics (유리집적광학을 이용한 다중모드간섭 $1\times4$ 광파워 분리기 제작)

  • 강동성;전금수;장명호;반재경
    • Korean Journal of Optics and Photonics
    • /
    • v.11 no.6
    • /
    • pp.418-422
    • /
    • 2000
  • In this paper, we have modeled and fabricated a mutimode interference (MMI) $1\times4$ optical power splitter using finite-difference beam propagation method and $Ag^+-Na^+$ ion-exchanged method in BK7 glass. The power splitting ratio of the fabricated MMI $1\times4$ optical power splitter shows 0.46 dB..46 dB.

  • PDF

Full-Bridge DC/DC Converter for NBI Filament Power Supply (NBI용 필라멘트 전원공급 장치를 위한 풀-브리지 DC/DC 컨버터)

  • Jun, Bum-Su;Lee, Se-Hyung;Lee, Hee-Jun;Sin, Soo-Cheol;Lee, Seung-Kyo;Won, Chung-Yuen
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
    • /
    • v.25 no.7
    • /
    • pp.32-39
    • /
    • 2011
  • FPS(Filament Power Supply), one of the KSTAR NBI(Neutral Beam Injections) is implemented by full-bridge DC/DC converter. NBI heating device for KSTAR(1.5MW) is developed for heating an ion source of plasma in KSTAR tokmak. The full-bridge DC/DC converter is applied to FPS for isolation with input and output. And FPS is operated with PWM control method which is the most usual method. In this paper, NBI FPS of 4.8kW is simulated by using the PSIM 6.0. And the full-bridge DC/DC converter using IGBTs is fabricated to demonstrate it. The processor DSP 28335 is implemented for digital control.

Fabrication of Bi-superconducting Thin Films by Layer-by-layer Sputtering Method (순차 스퍼터법에 의한 Bi-초전도 박막의 제작)

  • 심상흥;양승호;박용필
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2001.07a
    • /
    • pp.613-616
    • /
    • 2001
  • Bi$_2$Sr$_2$CuO$_{x}$ thin films have been fabricated by atomic layer-by-layer deposition using ion beam sputtering(IBS) method. During the deposition, 10 and 90 wt%-ozone/oxygen mixture gas of typical pressure of 1~9$\times$10$^{-5}$ Torr are supplied with ultraviolet light irradiation for oxidation. XRD and RHEED investigations reveal out that a buffer layer with some different compositions is formed at the early deposition stage of less than 10 units cell and then Bi-2201 oriented along the c-axis is grown.n.

  • PDF

Characteristics of $Bi_2Sr_2Ca_{n-1}Cu_nO_x$ Thin Films Fabricated for apply to Biomedical Sensors (의용센서에 응용하기 위해 제작한 $Bi_2Sr_2Ca_{n-1}Cu_nO_x$ 박막의 특성)

  • Yang, Seung-Ho;Park, Yong-Pil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2006.11a
    • /
    • pp.259-260
    • /
    • 2006
  • $Bi_2Sr_2Ca_{n-1}Cu_nO_x$ superconducting thin films have been fabricated by atomic layer-by-layer deposition using IBS(Ion Beam Sputtering) method During the deposition, 90 mol% ozone gas of typical pressure of $1{\sim}9{\times}10^{-5}$ T orr are supplied with ultraviolet light irradiation for oxidation. XRD and RHEED investigations reveal out that a buffer layer with some different compositions is formed at the early deposition stage of less than 10 units cell and then Bi-2201 oriented along the c-axis is grown.

  • PDF

Effect of deposition method of source/drain electrode on a top gate ZnO TFT Performance

  • Kopark, Sang-Hee;Hwang, Chi-Sun;Yang, Shin-Hyuk;Yun, Young-Sun;Park, Byung-Chang
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 2008.10a
    • /
    • pp.254-257
    • /
    • 2008
  • We have investigated the effect of source/drain electrode deposition method on a performance of top gate structured ZnO TFT performance. TFT using S/D of ITO film, consisted of bi-layer which deposited by ion beam assisted sputtering at the initial stage then deposited by DC magnetron sputtering, showed better performance compared to that using S/D of ITO deposited by just DC magnetron sputtering. Two ITO films exhibited different grain shapes and these resulted in different etching properties. We also suspect that charge trapping on the glass substrate (back channel) during the ITO film deposition may influence the characteristics of top gate structured ZnO TFT.

  • PDF

Evaluation of Ozone for Oxide Superconductor Thin Film Fabrication (산화물 초전도 박막 제작을 위한 오존의 평가)

  • Lim, Jung-Kwan;Park, Yong-Pil;Lee, Hee-Kab
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2004.07b
    • /
    • pp.1230-1233
    • /
    • 2004
  • Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

  • PDF

Si Induced Polymer Based Alignment Layer for Liquid Crystal Orientations with High Electro-Optic Properties at Low Temperature (저온 공정의 Si을 이용한 PI 배향 막의 전기광학 특성 향상에 대한 연구)

  • Kim, Dai-Hyun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.26 no.9
    • /
    • pp.677-681
    • /
    • 2013
  • Apart from the deposition of alignment layer, alignment process needs to be involved for alignment of liquid crystal (LC) molecules. To simplify manufacturing process, several method were used such as rubbing, ion-beam irradiation, UV irradiation, and lithography. But, eventually it needs another treatment for LC alignment. Here, we suggested Si induced polyimide (PI) alignment layer at low temperature. Using this method, we are able to eliminate the alignment process and found that the alignment and electro-optic performance are much better than that of the rubbed PI LC cells. Compared to the rubbed PI cells, the response time was decreased by 70% and C-V characteristics have hysteresis-free.