Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication of Bi-superconducting Thin Films by Layer-by-layer Sputtering Method

순차 스퍼터법에 의한 Bi-초전도 박막의 제작

  • 심상흥 (삼척대학교 전기공학과) ;
  • 양승호 (동신대학교 전기전자공학부) ;
  • 박용필 (동신대학교 전기전자공학부)
  • Published : 2001.07.01
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Abstract

Bi$_2$Sr$_2$CuO$_{x}$ thin films have been fabricated by atomic layer-by-layer deposition using ion beam sputtering(IBS) method. During the deposition, 10 and 90 wt%-ozone/oxygen mixture gas of typical pressure of 1~9$\times$10$^{-5}$ Torr are supplied with ultraviolet light irradiation for oxidation. XRD and RHEED investigations reveal out that a buffer layer with some different compositions is formed at the early deposition stage of less than 10 units cell and then Bi-2201 oriented along the c-axis is grown.n.

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