An XPS analysis on the interfacial reaction for $SiO_2$ /TiW system after in-situ heat treatment
(XPS chamber 내 in-situ 열처리에 의한 $SiO_2$ /TiW system의 계면반응 연구)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1994.05a
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- pp.123-123
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- 1994