• 전기학회논문지
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• 제58권10호
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• pp.1982-1988
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• 2009

$TiO_2$ films are fabricated using silk printing method. Heat treatment temperature of films is 600[$^{\circ}C$]. From the analysis of microstructure, grain size of $TiO_2$ films is about $0.2{\sim}0.3[{\mu}m]$. Thickness of films is 30.19[${\mu}m$] and surface uniformity of films is good. From the analysis of crystalline structure, $TiO_2$ films transform anatase phase to rutile phase. Capacitance of films increases according to increase relative humidity and decrease measuring frequency. Hysteresis characteristics of capacitance and impedance are best at 45[%RH] and 75[%RH] respectively. Impedance of films increases according to decrease measuring frequency.

• 센서학회지
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• 제15권3호
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• pp.205-210
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• 2006

Hydrophobic polymer [ex. Poly(vinylidenfluoride)] layer was coated on polyaniline (PANi) sensor to reduce the contamination humidity. The differences in sensitivity to methanol gas detection in various humidity condition between pure-PANi sensor and sensor coated with poly(vinylidenfluoride) polymer (PVDF) (coated-PANi sensor) were investigated. Considering the relation between the density of pore, which was coated on the layer of the PANi sensor, and sensitivity was investigated. To fabricate the porous PVDF layer on PANi sensor, poly(vinylalcohol) (PVA), which is water-soluble polymer, was used. Coated-PANi sensor was less affected by humidity compared with pure-PANi sensor. And higher density of pore on PVDF layer led to higher sensitivity.

• Transactions on Electrical and Electronic Materials
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• 제14권4호
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• pp.182-186
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• 2013

We studied the possibility that an air capacitor can be used as a humidity sensor by measuring capacitance change. In order to investigate the possibility, the change of capacitance of an air capacitor due to moisture in air was first considered theoretically, and was then experimentally verified. The capacitance was measured by an LCR impedance meter with a 100-kHz and 1-V ac. The results revealed that the changes in the experimentally measured capacitances were greater than those in the theoretically calculated values. Based on this fact, we knew that an air capacitor could be used as part of a humidity sensing device. We expect the humidity sensor with an air capacitor has characteristics of fast response time, high reliability, and high durability compared with other conventional methods.

• 센서학회지
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• 제1권2호
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• pp.125-130
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• 1992

습도감지물질로서 PMMA박막을 사용하여 저항형 습도감지소자를 제조하고 그 특성을 조사하였다. PMMA에 DVB를 첨가하여 가교결합을 일으키고 여기에 PVA를 섞어 제조된 습도센서는 상대습도의 증가에 따라 저항의 변화를 나타내었으며, 흡착에 비해 탈착 시 약 3% 미만의 히스테리시스 특성을 나타내었다. 또한 제조된 소자는 좋은 장기안정도를 보였으며, 응답시간은 흡착시에는 약 7분, 탈착시에는 약 5분이었다.

• 한국멀티미디어학회논문지
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• 제25권2호
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• pp.189-196
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• 2022

We have developed an embedded based environment sensing module with high-resolution temperature, humidity and gas sensors to detect gas leakage under the condition of LNG injection. The developed sensing module have linearity with gas concentration. We have confirmed the developed sensing module could detect LNG gas concentration of 5 cmol/mol and 15 cmol/mol, which are gas concentration at risk of explosion. The response time of the developed module was fast within 8 seconds. Therefore it can be used to detect LNG gas leakage.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.252-252
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• 2009

In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si structure was fabricated for humidity sensor applications based on surface acoustic wave (SAW). In this structure, the ZnO film was used as sensing material layer. These ZnO and AlN(0002) were deposited by so-gel process and a pulse reactive magnetron sputtering, respectively. These experimental results showed that the obtained SAW velocity on AlN film was about 5128 m/s at $h/\lambda$=0.0125 (h and $\lambda$ is thickness and wavelength, respectively). For ZnO sensing layers coated on AlN, films have hexagonal wurtzite structure and nanometer particle size. The crystalline size of ZnO films annealed at 400, 500, and 600 $^{\circ}C$ is 10.2, 29.1, and 38 nm, respectively. Surface of the film exhibits spongy which can adsorb steam in the air. The best quality of the ZnO film was obtained with annealing temperature at 500 $^{\circ}Cis$. The change in frequency response (127.9~127.85 MHz) of the SAW humidity sensor based on ZnO/AlN structure was measured along the change in humidity (41~69%). The structural properties of thin films wereinvestigated by XRD and SEM.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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• pp.117.1-117
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• 1998

• 센서학회지
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• 제15권4호
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• pp.269-276
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• 2006

This paper represents development of quartz crystal microbalance (QCM) and usage as a dew point sensor. The temperature of a quartz resonator was controlled precisely from $20^{\circ}C$ to $-30^{\circ}C$ with the ramping rate of $0.1^{\circ}C/s$ by using a custom-made crystal holder housing the quartz resonator associated with a thermoelectric cooler (Peltier cooler), which results in the working range from $15.2^{\circ}C$ to $-24.0^{\circ}C$ based on an accurate holder temperature compensation and temperature effect compensation process. The developed QCM dew point sensor and analysis techniques show very good sensing characteristics at measurement of moist air with the relative humidity from 10 %R.H. to 90 %R.H. generated by a divided-type humidity generator and the dew point temperatures were determined with an accuracy of less than ${\pm}0.18^{\circ}C$, which also showed good agreement with reference values in their error range.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1728-1731
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• 1996

To develop more sensitive humidity sensor on high temperature region, in this paper, we prepared polyimide humidity sensor by electrophoretic method. Sensing properties of be sensor in high temprature region were studied and compared with that prepared by solution casting method. From the result, the thiner film thickness, the more sensitive. however, It is difficult to make he thickness optimal because of short between electrodes, and the thickness of upper electrode is one of most important parameters affecting pefomance of the sensor.

• Macromolecular Research
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• 제16권2호
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• pp.149-154
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• 2008

UV-curable electrolytes inks were prepared by dissolving [2-[(methacryloyloxy)ethyl]dimethyl]propylaminium bromide (MEPAB), 1,5-[bis(2-methacryloxyethyl)dimethyl ammono]penthane dibromide (MDAPD), hexafunctional reactive oligomer (SP1013), trimethylolpropane triacrylate (TMPTA) and a photoinitiator in methanol/2-methoxyethanol. The compositions of the electrolyte inks were MEPAB/MDAPD/SP1013/TMPTA=6/24/17.2/12.8, 15/15/17.2/12.8 and 24/6/17.2/12.8. Humid-membranes were deposited on a gold electrode/alumina electrode using an ink-jet printer equipped with a UV lamp followed by immediate UV curing. The humidity-sensing characteristics including hysteresis, frequency and temperature dependence, response time and water durability were estimated.