The Characteristics of Polyimide Humidity Sensor Fabricated by Electrophoretic Deposition

전기영동법에 의해 제작된 폴리이미드 박막의 습도특성II

  • Published : 1996.07.22

Abstract

To develop more sensitive humidity sensor on high temperature region, in this paper, we prepared polyimide humidity sensor by electrophoretic method. Sensing properties of be sensor in high temprature region were studied and compared with that prepared by solution casting method. From the result, the thiner film thickness, the more sensitive. however, It is difficult to make he thickness optimal because of short between electrodes, and the thickness of upper electrode is one of most important parameters affecting pefomance of the sensor.

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