Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1996.07c
- /
- Pages.1728-1731
- /
- 1996
The Characteristics of Polyimide Humidity Sensor Fabricated by Electrophoretic Deposition
전기영동법에 의해 제작된 폴리이미드 박막의 습도특성II
- Cho, D.H. (ChungNam National Univ.) ;
-
Han, S.O.
(ChungNam National Univ.)
;
- Park, K.S. (ChungNam Junior College.) ;
- Jeong, S.Y. (TaeJon National Univ. of Tech.) ;
- Park, C.H. (TaeJon National Univ. of Tech.) ;
- Park, G.M. (TaeJon National Univ. of Tech.) ;
- Kim, J.S. (TaeJon National Univ. of Tech.)
- 조동헌 (충남대학교) ;
-
한상옥
(충남대학교)
;
- 박강식 (충남전문대학) ;
- 정승용 (대전산업대학교) ;
- 박찬흠 (대전산업대학교) ;
- 박귀만 (대전산업대학교) ;
- 김종석 (대전산업대학교)
- Published : 1996.07.22
Abstract
To develop more sensitive humidity sensor on high temperature region, in this paper, we prepared polyimide humidity sensor by electrophoretic method. Sensing properties of be sensor in high temprature region were studied and compared with that prepared by solution casting method. From the result, the thiner film thickness, the more sensitive. however, It is difficult to make he thickness optimal because of short between electrodes, and the thickness of upper electrode is one of most important parameters affecting pefomance of the sensor.
Keywords