Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.11a
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- Pages.252-252
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- 2009
Characteristics of nanocrystalline ZnO films grown on polyctystalline AlN for wireless chemical sensors
무선 화학센서용으로 다결정 AlN 위에 성장된 나노결정질 ZnO 막의 특성
- Song, Le Thi (University of Ulsan) ;
- Chung, Gwiy-Sang (University of Ulsan)
- Published : 2009.11.12
Abstract
In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si structure was fabricated for humidity sensor applications based on surface acoustic wave (SAW). In this structure, the ZnO film was used as sensing material layer. These ZnO and AlN(0002) were deposited by so-gel process and a pulse reactive magnetron sputtering, respectively. These experimental results showed that the obtained SAW velocity on AlN film was about 5128 m/s at