Journal of Sensor Science and Technology (센서학회지)
- Volume 1 Issue 2
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- Pages.125-130
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- 1992
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
A Resistive-Type Humidity Sensor Using PMMA Thin Film
PMMA를 이용한 저항형 습도감지소자
-
Lee, Sung-Pil
(Dept. of Electronics, Kyungnam Nat'l Univ.)
;
- Rim, Jae-Young (Dept. of Electronics, Kyungnam Nat'l Univ.) ;
- Yoon, Yeo-Kyoung (Dept. of Electronics, Kyungnam Nat'l Univ.)
- Published : 1992.11.30
Abstract
A resistive-type humidity sensors have been fabricated using cross-linked PMMA thin film as sensing material and their humidity characteristics have been investigated. The sensor coated of the cross-linked PMMA with PVA exhibited largely variation of resistance by increase of relative humidity and less than 3% of hysteresis. Furthermore, the fabricated sensor exhibited superior long-term stability. The response time of the PMMA humidity sensor was about 7 min. for adsorption and about 5 min. for desorption respectively.
습도감지물질로서 PMMA박막을 사용하여 저항형 습도감지소자를 제조하고 그 특성을 조사하였다. PMMA에 DVB를 첨가하여 가교결합을 일으키고 여기에 PVA를 섞어 제조된 습도센서는 상대습도의 증가에 따라 저항의 변화를 나타내었으며, 흡착에 비해 탈착 시 약 3% 미만의 히스테리시스 특성을 나타내었다. 또한 제조된 소자는 좋은 장기안정도를 보였으며, 응답시간은 흡착시에는 약 7분, 탈착시에는 약 5분이었다.
Keywords