• Title/Summary/Keyword: Hole density

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A study of planarization in polysilicon MEMS structure (폴리실리콘 MEMS 구조물의 평탄화에 관한 연구)

  • Jeong, Moon-Ki;Park, Sung-Min;Jung, Jae-Woo;Jeong, Hae-Do;Kim, Hyoung-Jae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.362-363
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    • 2005
  • The objectives of this paper are to achieve good planarization of the deposited film and to improve deposition efficiency of multi-layer structures by using surface-micromaching process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages and disadvantages of CMP for MEMS structures are observed respectively by using the test patterns with structures larger than 1 um line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of slurries: ILD1300 and Nalco2371. And then, the experiments were conducted based on the pretest.

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Emission Characteristics of Blue Fluorescence Tandem OLED with Materials of CGL (CGL의 재료에 따른 청색 형광 Tandem OLED의 발광 특성)

  • Kwak, Tea-Ho;Ju, Sung-Hoo
    • Journal of the Korean institute of surface engineering
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    • v.47 no.4
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    • pp.210-214
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    • 2014
  • We investigated emission characteristics of tandem organic light emitting devices (OLEDs) with p-type materials as charge generation layer. The tandem OLEDs were fabricated by using $MoO_x$, $WO_x$, C60 and HATCN as p-type material or not using p-type material for charge generation. When HATCN was used as p-type material, it showed high current density at low applied voltage, but increase of efficiency was small because of charge unbalance in emitting layer. In case of tandem OLED not using p-type material, applied voltage increased remarkably because of difficulty of hole injection. In case of $MoO_x$, $WO_x$ or C60 as p-type material, current emission efficiency increased greatly. In particular, current emission efficiency of tandem OLED using $MoO_x$ as p-type material increased up to 3 times than current emission efficiency of single OLED. The Commission Internationale de l'Eclairage (CIE) 1931 color coordinates were changed by overlapping of 504 nm emission wavelength. As a result, emission efficiency of tandem OLED improved compared with single OLED, but driving voltage also increased by increase of organic layer thickness.

Characteristics of Output Energy and Optical Parameters in Welding of Braun Tubes by Pulsed Nd:YAG Laser (펄스 Nd:YAG 레이저에 의한 브라운관 부품의 용접시 빔의 출력특성과 광학변수)

  • Kim Jong-Do;Ha Seung-Hyup
    • Laser Solutions
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    • v.8 no.1
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    • pp.27-37
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    • 2005
  • During laser spot welding of the braun tube electron gun, phenomena such as serious spattering and oxidative reaction, etc. were occurred. The spatter occurred from weld pool affects the braun tube, namely it blocks up a very small hole on the shadow mask and causes short circuit between two poles of the electron gun. We guessed that high power density and oxidative reaction are main sources of these problems. So, we studied to prevent and to reduce spatter occurring in spot welding of the braun tube electron gun using pulsed Nd:YAG laser. The characteristics of laser output power was estimated, and the loss of laser energy by optical parameter and spatter was measured by powermeter. The effects of welding parameters, laser defocused distance and incident angle, were investigated on the shape and penetration depth of the laser welded bead in flare and flange joints. From these results, the laser peak power was a major factor to control penetration depth and to occur spatter. It was found that the losses of laser energy by optic parameter and sticked spatter affect seriously laser weldability of thin sheets.

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Influence of a Stacked-CuPc Layer on the Performance of Organic Light-Emitting Diodes

  • Choe Youngson;Park Si Young;Park Dae Won;Kim Wonho
    • Macromolecular Research
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    • v.14 no.1
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    • pp.38-44
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    • 2006
  • Vacuum deposited copper phthalocyanine (CuPc) was placed as a thin interlayer between indium tin oxide (ITO) electrode and a hole transporting layer (HTL) in a multi-layered, organic, light-emitting diode (OLEOs). The well-stacked CuPc layer increased the stability and efficiency of the devices. Thermal annealing after CuPc deposition and magnetic field treatment during CuPc deposition were performed to obtain a stacked-CuPc layer; the former increased the stacking density of the CuPc molecules and the alignment of the CuPc film. Thermal annealing at about 100$^{circ}C$ increased the current flow through the CuPc layer by over 25$\%$. Surface roughness decreased from 4.12 to 3.65 nm and spikes were lowered at the film surface as well. However, magnetic field treatment during deposition was less effective than thermal treatment. Eventually, a higher luminescence at a given voltage was obtained when a thermally-annealed CuPc layer was placed in the present, multi-layered, ITO/CuPc/NPD/Alq3/LiF/AI devices. Thermal annealing at about 100$^{circ}C$ for 3 h produced the most efficient, multi-layered EL devices in the present study.

The Effect of Light on Amorphous Silicon Thin Film Transistors based on Photo-Sensor Applications

  • Ha, Tae-Jun;Park, Hyun-Sang;Kim, Sun-Jae;Lee, Soo-Yeon;Han, Min-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.953-956
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    • 2009
  • We have investigated the effect of light on amorphous silicon thin film transistors based photo-sensor applications. We have analyzed the instability caused by electrical gate bias stresses under the light illumination and the effect of photo-induced quasi-annealing on the instability. Threshold voltage ($V_{TH}$) under the negative gate bias stress with light illumination was more decreased than that under the negative gate bias stress without light illumination even though $V_{TH}$ caused by the light-induced stress without negative gate bias was shifted positively. These results are because the increase of carrier density in a channel region caused by the light illumination has the enhanced effect on the instability caused by negative gate bias stress. The prolonged light illumination led to the recovery of shifted VTH caused by negative gate bias stress under the light illumination due to the recombination of trapped hole charges.

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Characteristic of organic electroluminescent devices with 8-hydroxyquinoline Zinc($Znq_2$) as green-emitting material (녹색 발광 재료인 8-hydroxyquinoline Zinc($Znq_2$)를 이용한 유기 발광소자의 특성)

  • 박수길;정승준;정평진;정은실;류부형;박대희;이성구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.193-196
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    • 1999
  • Organic electroluminescent devices have attracted a great deal of attention due to thier potential application to full-color flat-panel displays. The 8-hydroxyquinollne Zinc(Znq$_2$) were synthesized successfully from zinc chloride(ZnCl$_2$) and zinc acetate(Zn(C$_2$H$_3$O$_3$)$_2$) as green omitting material. A double-layer ELD consist of an emitting layer of B-hydroxyquinoline Zinc(Znq$_2$) and a hole-transport layer of tai-phenylene diamine(TPD) derivatives sandwiched between an Aluminium(Al) and Indium-Tin-Oxide(ITO) electrodes omitted green light resulting from Znq$_2$. The electroluminescent devices (ELD) exhibited a maximum luminance of 1000cd/$\textrm{cm}^2$ at a driving voltage of 8V and a driving current density of 0.4mA/$\textrm{cm}^2$.

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Studies on The Optical and Electrical Properties of Europium Complex (Europium compound박막의 전기적 광학적 특성에 관한 연구)

  • 이명호;표상우;김영관;김정수;이한성
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.317-320
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    • 1998
  • Electroluminescent(EL) devices based on organic materials have been of great interest due to their possible applications for large-area flat-panel displays, where they are attractive because of their capability of multicolor emission, and low operation voltage. In this study, glass substrate/ITO/Eu(TTA)$_3$(Phen)/Al(A), glass substrate/ITO/TPD/Eu(TTA)$_3$(phen)/Al(B) aNd glass substrate/ITO/TPD/Eu(TTA)$_3$(Phen)/A1Q$_3$/Al (C) structures were fabricated by vacuum evaporation method, where aromatic diamine(TPD) was used as a hole transporting material, Eu(TTA)$_3$(phen) as an emitting material, and tris(8-hydroxyquinoline) Aluminum (AlQ$_3$) as an electron transporting layer. Etectroluminescent(EL) and I-V characteristics of Eu(TTA)$_3$(phen) with a various thickness were investigated. This structure shows the red EL spectrum, which is almost the same as the PL spectrum of Eu(TTA)$_3$(phen). I-V characteristics of this structure show that turn-on voltage was 9V and current density was 0.01A/㎤ at a dc operation voltage of 9V. Electrical transporting phenomena of these structures was explained using the trapped-charge-limited current model with I-V characteristics.

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A Study on Injector Durability Test with Diesel and BD20 Using Common Rail (커먼레일을 이용한 디젤과 BD20 연료가 인젝터에 미치는 영향에 관한 연구)

  • JEONG, YUNHO;LIM, OCKTAECK
    • Transactions of the Korean hydrogen and new energy society
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    • v.26 no.5
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    • pp.393-401
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    • 2015
  • The characteristics of diesel and biodiesel are similar like as cetane number and auto-ignition temperature. High cetane number of diesel and BD could make possible to compression ignition. but BD showed different atomization from diesel due to component like density, viscosity and iodine value etc. Because of this, the biodiesel requires validation. This study using diesel and BD20 investigated effect to durability injector. Durability test were used common rail and bosch solenoid type 5-hole injector. Total test was 672hr but actual running time was 200hr. Spray experiments for spray characteristics were carried out using constant volume combustion chamber. Spray characteristics of diesel and BD showed different result up to durability test time. After 100hr, diesel showed spray shapes were stable but BD was not. After 200hr, difference of diesel and BD spray shapes were grow serious.

Status, Protection, and Management of Bird Community in Mt. Nam Area (남산 지역 조류 군집의 서식 현황과 보호 및 관리방안)

  • 이우신;조기현;임신재
    • The Korean Journal of Ecology
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    • v.21 no.5_3
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    • pp.665-673
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    • 1998
  • This study was conducted to clarified the relationship between bird community and forest structure and present the counterplan for protection and management of bird community from February 1993 to July 1995 at deciduous and coniferous forest within Mt. Nam area, Seoul, Korea. DBH distribution has not significant differences in each study site. Deciduous forest had more foliage coverage in all layers than coniferous forest. Total 41 species of birds, which were 16 species of resident, 14 species of summer visitor, 4 species of winter visitor, and 7 species of passage migrant were recrded in two study sites. Leaf use rate of birds was increased the increase of coverage. The number of breeding species and pairs, breeding density, and diversity index were greater in deciduous forest than coniferous forest. The number of species and pairs on bush-nesting and foraging guild were greater than other guilds. And the nuber of species and pairs on hole nesting guild were the fewest in nesting guild. Use rate of artificial nests for improvement of habitat quality was greater in coniferous forest than deciduous forest. Maintenance of bush layer, increase of coverage and leaf layer diversity, supply of artificial nests, management of large trees, and control of natural enemy were necessary for protection and management of bird community in Mt. nam area.

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Consumable Approaches of Polysilicon MEMS CMP

  • Park, Sung-Min;Jeong, Suk-Hoon;Jeong, Moon-Ki;Park, Boum-Young;Jeong, Hae-Do;Kim, Hyoung-Jae
    • Transactions on Electrical and Electronic Materials
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    • v.7 no.4
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    • pp.157-162
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    • 2006
  • Chemical-mechanical polishing (CMP), one of the dominant technology for ULSI planarization, is used to flatten the micro electro-mechanical systems (MEMS) structures. The objective of this paper is to achieve good planarization of the deposited film and to improve deposition efficiency of subsequent layer structures by using surface-micromachining process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages of CMP process for MEMS structures are observed respectively by using the test patterns with structures larger than 1 urn line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of silica slurries: $ILD1300^{TM}\;and\;Nalco2371^{TM}$. And then, the experiments were conducted based on the pretest. A selectivity and pH adjustment of slurry affected largely step heights of MEMS structures. These results would be anticipated as an important bridge stone to manufacture MEMS CMP slurry.