• Journal of Energy Engineering
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• v.15 no.1 s.45
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• pp.52-59
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• 2006

This paper examined the conversion of methane to hydrogen and other higher hydrocarbons using dielectric barrier discharge with AC pulse power. Two metal electrodes of a coaxial-type plasma reactor were separated by gas gap and an alumina tube. The inner electrode was located inside the alumina tube. The alumina tube was located inside the stainless steel tube, which was used as the outer electrode. Effect of feed gas composition (methane, oxygen, argon, water and helium), flow rate, applied frequency, input volt-age on methane conversion and product distribution were studied. The major products of plasma chemical reactions were ethylene, ethane, propane, buthane, hydrogen, carbon monoxide and carbon dioxide. The increment of applied voltage and the usage of inert gas as the background (helium and argon) enhanced the selectivity of hydrocarbons and methane conversion. The addition of water in the feed stream enhanced the conversion of methane and yield of hydrogen. Higher voltage leads to higher yield of $C_2H_6,\;C_3H_8,\;C_4H_{10}$ and yield or $C_2H_2\;and\;C_2H_4$ appeared highly in lower voltage.

• Korean Journal of Food Science and Technology
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• v.48 no.5
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• pp.486-491
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• 2016

Efficacy of dielectric barrier discharge-cold plasma treatment (DBD-CPT) for microbial decontamination of onion powder was evaluated. Onion powder, inoculated with Escherichia coli O157:H7, Salmonella Enteritidis, or Listeria monocytogenes, was treated with helium DBD-CPT. DBD-CPT (9 kV, 20 min) inhibited E. coli O157:H7, S. Enteritidis, and L. monocytogenes by $1.4{\pm}0.5$, $2.3{\pm}0.3$, and $1.2{\pm}0.0log\;CFU/cm^2$, respectively. The inactivation levels of E. coli O157:H7, S. Enteritidis and L. monocytogenes increased by $2.2{\pm}0.1$, $2.5{\pm}0.1$ and $1.9{\pm}0.3log\;CFU/cm^2$, respectively, as water activity increased from 0.4 to 0.8, and increased by $2.3{\pm}0.4$, $2.1{\pm}0.1$ and $1.6{\pm}0.1log\;CFU/cm^2$, respectively, as the particle size increased from 0.3 to $1.0cm^2$. Neither the ascorbic acid and quercetin concentrations nor the color of onion powder was changed by DBD-CPT (p>0.05). These results demonstrate the potential for application of DBD-CPT in improving microbiological safety of onion powder while preserving the physicochemical properties.

• Nuclear Engineering and Technology
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• v.52 no.12
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• pp.2860-2866
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• 2020

Oxide dispersion-strengthened materials W-1wt%Pr₂O₃ and W-1wt%La₂O₃ were synthesized by wet chemical method and spark plasma sintering. The field emission scanning electron microscopy (FE-SEM) analysis, XRD and Vickers microhardness measurements were conducted to characterize the samples. The irradiations were carried out with a 5 keV helium ion beam to fluences up to 5.0 × 10²¹ ions/m² under 600 ℃ using the low-energy ion irradiation system. Transmission electron microscopy (TEM) study was performed to investigate the microstructural evolution in W-1wt%Pr₂O₃ and W-1wt%La₂O₃. At 1.0 × 10²⁰ He⁺/m², the average loops size of the W-1wt%Pr₂O₃ was 4.3 nm, much lower than W-1wt% La₂O₃ of 8.5 nm. However, helium bubbles were not observed throughout in both doped W materials. The effects of pre-irradiation with 1.0 × 10²¹ He⁺/m² on trapping of injected deuterium in doped W was studied by thermal desorption spectrometry (TDS) technique using quadrupole mass spectrometer. Compared with the samples without He⁺ pre-irradiation, deuterium (D) retention of doped W materials increased after He⁺ irradiation, whose retention was unsaturated at the damage level of 1.0 × 10²²D₂⁺/m². The present results implied that irradiation effect of He⁺ ions must be taken into account to evaluate the deuterium retention in fusion material applications.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.270-270
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• 2012

Low temperature atmospheric pressure plasmas (APPs) have been known to be effective for living cell inactivation in the water [1]. Many earlier research found that pH level of the solution was changed from neutral to acidic after plasma treatment. The importance of the effect of acidity of the solution for cell treatments has already been reported by many experiments. In addition, several studies have demonstrated that the addition of a small amount of oxygen to pure helium results in higher sterilization efficiency of APPs [2]. However, it is not clear yet which species are key factors for the cell treatment. To find key factors, we used GMoo simulation. We elucidate the processes through which pH level in the solution is changed from neutral to acidic after plasma exposure and key components with pH and air variation with using GMoo simulation. First, pH level in a liquid solution is changed by He+ and He(21S) radicals. Second, O3 density decreases as pH level in the solution decreases and air concentration decreases. It can be a method of removing O3 that cause chest pain and damage lung tissue when the density is very high. H2O2, HO2 and NO radicals are found to be key factors for cell inactivation in the solution with pH and air variation.

• Transactions on Electrical and Electronic Materials
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• v.12 no.2
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• pp.60-63
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• 2011

We investigated the etching characteristics of zinc oxide (ZnO) and the effect of additive gases in a $Cl_2$-based inductively coupled plasma. The inert gases were argon, nitrogen, and helium. The maximum etch rates were 44.3, 39.9, and 37.9 nm/min for $Cl_2$(75%)/Ar(25%), $Cl_2$(50%)/$N_2$(50%), and $Cl_2$(75%)/He(25%) gas mixtures, 600 W radiofrequency power, 150 W bias power, and 2 Pa process pressure. We obtained the maximum etch rate by a combination of chemical reaction and physical bombardment. A volatile compound of Zn-Cl. achieved the chemical reaction on the surface of the ZnO thin films. The physical etching was performed by inert gas ion bombardment that broke the Zn-O bonds. The highly oriented (002) peak was determined on samples, and the (013) peak of $Zn_2SiO_4$ was observed in the ZnO thin film sample based on x-ray diffraction spectroscopy patterns. In addition, the sample of $Cl_2$/He chemistry showed a high full-width at half-maximum value. The root-mean-square roughness of ZnO thin films decreased to 1.33 nm from 5.88 nm at $Cl_2$(50%)/$N_2$(50%) plasma chemistry.

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.1127-1130
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• 2003

The characteristics of silicon nitride films deposited in a planar coil reactor using a simple high-density inductively coupled plasma chemical vapor deposition technique have been investigated. The process gases used during silicon nitride deposition cycle were pure nitrogen and a mixture of silane and helium. It has been pointed out that the strong H-atom released from the growing SiN film and Si-N bond healing are responsible for the improved electrical and passivation properties of SiN.

• Journal of Astronomy and Space Sciences
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• v.36 no.3
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• pp.121-131
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• 2019

The ionospheric mid-latitude trough (IMT) is the electron density depletion phenomenon in the F region during nighttime. It has been suggested that the IMT is the result of complex plasma processes coupled to the magnetosphere. In order to statistically investigate the characteristics of the IMT, we analyze topside sounding data from Alouette and ISIS satellites in 1960s and 1970s. The IMT position is almost constant for seasons and solar activities whereas the IMT depth ratio and the IMT feature are stronger and clearer in the winter hemisphere under solar minimum condition. We also calculated transition heights at which the densities of oxygen ions and hydrogen/helium ions are equal. Transition heights are generally higher in daytime and lower in nighttime, but the opposite aspects are seen in the IMT region. Utilizing the Incoherent Scatter Radar (ISR) electron temperature measurements, we find that the electron temperature in the IMT region is enhanced at night during winter. The increase of electron temperature may cause fast transport of the ionospheric plasma to the magnetosphere via ambipolar diffusion, resulting in the IMT depletion. This mechanism of the IMT may work in addition to the simply prolonged recombination of ions proposed by the traditional stagnation model.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.545-550
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• 2004

KSTAR cryostat is a 8.8 m diameter vacuum vessel that provides the necessary thermal barrier between the ambient temperature test cell and the supercritical helium cooled superconducting magnet providing the base pressure of 1 ${\times}$ $10^{-3}Pa$. The cryostat is a single walled vessel consisting of central cylindrical section and two end closures, a flat base structure with external reinforcements and a dome-shaped lid structure. The base structure has 8 equally spaced support legs anchored on the concrete base. The cryostat vessel design was executed to satisfy the performance and operation requirements. The major loads considered in the structural analysis were vacuum pressure, dead weight, electromagnetic load driven by plasma disruption, and seismic load. Based on the fabrication and inspection procedures for the vessel, cryostat vessel was fabricated and inspected. It was confirmed that the inspection results were acceptable.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.964-967
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• 2002

The effectiveness of silicon nitride SiNx surface passivation is investigated and quantified. This study adopted single-layer antireflection (SLAR) coating of SiNx for efficiency improvement of solar cell. The silicon nitride films were deposited by means of plasma enhanced chemical vapor deposition (PECVD) in planar coil reactor. The process gases used were pure ammonia and a mixture of silane and helium. The thickness and the refractive index on the films were measured by ellipsometry and chemical bonds were determined by using an FT-IR equipment. This films obtained were analyzed in term of hydrogen content, refractive index for gas flow ratio $(NH_3/SiH_4)$, and efficiency of solar cell. The polycrystalline silicon solar cells passivated by silicon nitride shows efficiency above 12.8%.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.517-517
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• 2012

높은 전력 효율과 간단한 매칭 네트워크의 구조 등 많은 장점을 갖고 있는 직경 560 mm 페라이트 챔버가 대면적 웨이퍼에 대응하기 위해 개발 되었다. 플라즈마 소스원이 챔버 외곽에 위치해 있는 구조적 특성으로 인하여 아르곤 가스 방전 시 플라즈마 밀도 분포는 챔버 중앙부가 낮게 나타나는 볼록한 모양으로 형성 되는데 헬륨 가스를 적절히 혼합할 시에 밀도 분포가 변화가 관찰된다. 헬륨 가스 혼합 비에 따라 플라즈마 밀도 분포는 균일도가 매우 높아 질 수 있으며 60% 이상의 혼합비에서는 중앙 부분의 밀도가 최대치로 역전되는 오목한 밀도 분포가 나타나기도 한다. 이는 헬륨 가스의 대표적인 특징인 가벼운 질량과 높은 이온화 에너지 등에 기인하는데 이러한 특징을 갖는 헬륨 가스를 주입하게 되면 전자의 energy relaxation length가 늘어나게 되며 ambipolar diffusion 계수가 증가하게 된다. 랑뮈어 프로브를 이용하여 측정된 플라즈마 밀도 분포 변화는 앞서 계산 된 energy relaxation length 및 ambipolar diffusion 계수들의 변화로 설명된다.