• 한국전기전자재료학회논문지
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• 제18권11호
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• pp.990-995
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• 2005

This paper reports the fabrication and characterization of $5\;\times\;5$ thermal cantilever array for nano-scaled memory device application. The $5\;\times\;5$ thermal cantilever array with integrated tip heater has been fabricated with MEMS technology on SOI wafer using 7 photo masking steps. All single-level cantilevers have a diode in order to eliminate any electrical cross-talk between adjacent tips. Electrical measurements of fabricated thermal cantilever away show its own thermal heating mechanism. Thermal heating is demonstrated by the reflow of coated photoresist on the cantilever array surface.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1902-1907
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• 2008

The current work presents a design and fabrication technique for a microchannel system to measure the local temperature distribution inside microchannel. This micro channel system fabricated by MEMS technique is integrated with a heater and an array of temperature sensors so that detailed heat transfer phenomena inside micro-scale channel can be studied. Materials widely used in semiconductor process were selected to fabricate a heater and temperature sensors on a silicon wafer. On these heater and sensors a channel wall was fabricated with SU-8. The friction constant and the local Nusselt number distribution measured for the deionized water flow in the microchannel is presented.

• 한국전기전자재료학회논문지
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• 제19권10호
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• pp.894-900
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• 2006

This paper reports the fabrication and characterization of $32{\times}32$ thermal cantilever array for nano-scaled memory device applications. The $32{\times}32$ thermal cantilever array with integrated tip heater has been fabricated with micro-electro-mechanical systems(MEMS) technology on silicon on insulator(SOI) wafer using 9 photo masking steps. All of single-level cantilevers(1,024 bits) have a p-n junction diode in order to eliminate any electrical cross-talk between adjacent cantilevers. Nonlinear electrical characteristic of fabricated thermal cantilever shows its own thermal heating mechanism. In addition, n-channel high-voltage MOSFET device is integrated on a wafer for embedding driver circuitry.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 1999년도 춘계학술발표회요약집
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• pp.110-110
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• 1999

• 정보저장시스템학회논문집
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• 제1권1호
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• 한국정보통신학회논문지
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• 제6권2호
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• pp.315-322
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• 2002

반도체 제조공정과 미세가공 기술을 이용하여 30$0^{\circ}C$의 동작온도에서 약 60㎽의 전력소모를 갖는 산화물 반도체 박막 가스센서 어레이를 제조하였다. 멤브레인의 우수한 열적 절연은 0.1$\mu\textrm{m}$ 두께의 Si$_3$N$_4$와 1$\mu\textrm{m}$ 두께의 PSG의 이중 층에 의한 것으로, 각각 LPCVD(저압화학 기상증착)와 APCVD(대기압 화학 기상증착)에 의해 제조되었다. 센서 어레이의 4가지 산화물 반도체 박막 감지물질로는 1wt.%Pd가 도핑된 SnO$_2$, 6wt.% $Al_2$O$_3$가 도핑된 ZnO, WO$_3$, ZnO를 이용하였으며, 제조된 초소형 산화물 반도체 박막 가스센서 어레이는 여러 가지 가스의 노출시 유용한 저항 변화를 나타내었고 감도는 감지 물질에 강하게 의존함을 알 수 있었다. 센서 소자의 공정 수율을 증진시키기 위하여 히터 부위를 함몰하는 공정 방법을 취하였으며, 그 결과 월등한 수율 개선을 도모할 수 있었다.

• 대한기계학회논문집A
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• 제29권3호
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• pp.418-424
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• 2005

We present the design, fabrication and experimental results of 4-bit digital microinjectors, whose ejected droplet volumes are adjusted by the digital operation of a 4-bit microheater array. We design the reference microinjectors as well as its comparative test structures. In the fabrication process, we use a five-mask micromachining process and the total chip size of the fabricated microinjector is $7,640{\mu}m{\times}5,260{\mu}m.$ We measure the ejected droplet volumes and velocities, which are adjusted from $12.1{\pm}1.0~55.6{\pm}14.7pl\;and\;2.3{\pm}0.1~15.7{\pm}0.8m/s.$ respectively, depending on the 15 possible combinations of 4-bit microheater array. We also experimentally characterize the effect of geometric variation including the microheater size, inter-microheater gap, microchannel width and sequential operation of microheater array on the ejected droplet volume and velocity. Among these parameters, we find that the microheater size is the most dominant parameter affected to the ejected droplet volumes and velocities. Thus, the present microinjector has a potential for application to the high-resolution inkjet printers with multiple gray levels or high-precision fluid injectors with variable volume control.

• 마이크로전자및패키징학회지
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• 제12권3호
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• pp.243-251
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• 2005

페리퍼럴 어레이 플립칩의 온도 분포를 실측하여 열원의 기하학적 형상, 소자의 크기, 그리고 보호막 개구 크기 변화에 따른 소자의 열 성능을 측정하였다. 열원의 크기가 작고, 플립칩 솔더 범프에서 먼 중앙 열원의 경우가 전 면적 열원에 비해서 소자의 온도가 매우 높았다. 여기에 더해, 보호막 개구의 모양 변화에 의한 접촉 면적의 증가를 통해 소자의 최대 온도를 낮출 수가 있었다. 중앙 열원을 갖고 원형 개구에 2 (watts)의 전력이 가해지는 경우, $3(mm)\times3(mm)$크기 소자의 최대 온도는 약 $110(^{\circ}C)$이고, 이에 반해 $1.5(mm)\times1.8(mm)$ 크기 소자의 최대 온도는 약 $90(^{\circ}C)$ 이었다. 또한 보호막 개구의 모양을 원형 개구에서 잘린 사각형 개구로 변화시키면서 접촉 면적을 증가시킨 경우, $3(mm)\times3(mm)$ 크기의 소자와 중앙 열원을 갖는 경우에서 약 $10(^{\circ}C)$의 온도 감소를 나타내었다. 따라서 열원 소자의 위치와 크기, 소자의 크기, 그리고 개구 면적에 따른 솔더의 접촉 면적에 따라 플립칩의 열 성능이 현격한 차이를 나타내고 있음을 알 수 있다.

• 신재생에너지
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• 제9권1호
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• pp.17-24
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• 2013

Eddy Current is one of ways to make heat using rotational energy of wind turbine rotor. Four difference arrays of permanent magnets around rotor surface are used to generate heat using eddy current in this study. For the evaluation of heating performance, new test rig is prepared to measure water flow and temperatures in the inlet and outlet of the eddy current heat generator. In the test, torque and rotational speed are also measured in the motor driven system, and evaluated if the torque is matched with it of wind turbine rotor or not. It will be shown that the eddy current heat generator can be applied to real urban wind energy systems in this study.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 B
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• pp.1438-1440
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• 2005

A power control and distribution unit(PCDU) plays roles of protection of battery against overcharge by active control of solar array generated power, distribution of unregulated electrical power via controlled outlets to bus and instrument units, distribution of regulated electrical power to selected bus and instrument units, and provision of status monitoring and telecommand interface allowing the system and ground operate the power system, evaluate its performance and initiate appropriate countermeasures in case of abnormal conditions. In this work, we perform the preliminary design of a PCDU scheme for the small LEO Satellite applications. The main constitutes of the PCDU are the battery interface module, the auxiliary supply modules, solar array regulators with maximum power point tracking(MPPT) technology, heater power distribution modules, internal converter modules for regulated bus voltage generation. and instrument power distribution modules.