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Design Parameters and Experimental Performance Evaluation of 4-bit Digital Multi-heater Microinjector

4-bit 디지털 미소분사기의 설계변수와 토출성능간의 영향분석에 관한 실험적 연구

  • 강태구 (한국과학기술원, 디지털나노구동연구단) ;
  • 조영호 (한국과학기술원, 디지털나노구동연구단)
  • Published : 2005.03.01

Abstract

We present the design, fabrication and experimental results of 4-bit digital microinjectors, whose ejected droplet volumes are adjusted by the digital operation of a 4-bit microheater array. We design the reference microinjectors as well as its comparative test structures. In the fabrication process, we use a five-mask micromachining process and the total chip size of the fabricated microinjector is $7,640{\mu}m{\times}5,260{\mu}m.$ We measure the ejected droplet volumes and velocities, which are adjusted from $12.1{\pm}1.0~55.6{\pm}14.7pl\;and\;2.3{\pm}0.1~15.7{\pm}0.8m/s.$ respectively, depending on the 15 possible combinations of 4-bit microheater array. We also experimentally characterize the effect of geometric variation including the microheater size, inter-microheater gap, microchannel width and sequential operation of microheater array on the ejected droplet volume and velocity. Among these parameters, we find that the microheater size is the most dominant parameter affected to the ejected droplet volumes and velocities. Thus, the present microinjector has a potential for application to the high-resolution inkjet printers with multiple gray levels or high-precision fluid injectors with variable volume control.

Keywords

References

  1. Tseng, F., Kim, C. J. and Ho, C., 1998, 'A Novel Microinkjector with Virtual Chamber Neck,' Proceedings of IEEE, The $11^{th}$ Annual International Workshop on Micro Electro Mechanical Systems, pp. 57-62 https://doi.org/10.1109/MEMSYS.1998.659729
  2. Lee, S-. W., Kim, H-. C., Kuk, K. and Oh, Y. S., 2001, 'A Monolithic Inkjet Print Head: DomeJet,' Technical Digest of 14th IEEE International Conference on Micro Electro Mechanical Systems, pp. 515-518 https://doi.org/10.1109/MEMSYS.2001.906592
  3. Temple, S., 1999, 'Advances in Piezo Ink Jet Greyscale Technology,' Proc. 7th Annual European Ink Jet Printing Conference, Barcelona, Spain
  4. Kang, T. G. and Cho, Y.-H., 2003, 'Droplet Volume Adjustable Microinjectors Using a Microheater Array,' Proc. MicroElectroMechanical Systems Workshop (MEMS 2003), Kyoto, Japan, pp. 690-693 https://doi.org/10.1109/MEMSYS.2003.1189843
  5. Kang, T. G. and Cho, Y.-H., 2003, 'Droplet Volume Adjustable Digital Microinjectors Using a Microheater Array,' Proc. 5th Korean MEMS Conference (KMEMS 2003), Jeju, Korea, pp. 271-276
  6. Asai, A., Hara, T. and Endo, I., 1987, 'One-Dimensional Model of Bubble Growth and Liquid Flowin Bubble Jet Printers,' Japanese Journal of Applied Physics, Vol. 26, No. 10, pp. 1794-1801 https://doi.org/10.1143/JJAP.26.1794
  7. Beasley, J. D., 1977, 'Model for fluid ejection and refill in an impulse drive jet,' Photographic Science Engineering, Vol. 21 pp. 78-82