• Journal of Sensor Science and Technology
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• v.18 no.2
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• pp.116-121
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• 2009

Pressure-controlled sodium heat pipe furnace was designed and fabricated, and its characteristics was investigated. Pressure control system was controlled within ${\pm}0.5\;Pa$ at 150 kPa and the stability of pressure was decreased to ${\pm}2.5\;Pa$, when the pressure-controlled system connected with the heat pipe. The melting curve of Ag fixed-point realized well by the adiabatic method using the pressure-controlled sodium heat pipe furnace and its accuracy showed ${\pm}2.27\;mK$ from the calculation of 20% to 80% at the plateau. The freezing curve of Ag fixed-point also realized and its plateau value was 2.23 mK lower than that of the melting curve.

• Journal of Sensor Science and Technology
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• v.16 no.4
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• pp.259-262
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• 2007

This paper describes the electrical characteristics of polycrystalline (poly) 3C-SiC thin film diodes, in which poly 3C-SiC thin films on n-type and p-type Si wafers, respectively, were deposited by APCVD using HMDS, $H_{2}$, and Ar gas at $1150^{\circ}C$ for 3 hr. The schottky diode with Au/poly 3C-SiC/Si (n-type) structure was fabricated. Its threshold voltage ($V_{bi}$), breakdown voltage, thickness of depletion layer, and doping concentration ($N_{D}$) value were measured as 0.84 V, over 140 V, 61 nm, and $2.7{\times}10^{19}cm^{-3}$, respectively. Moreover, for the good ohmic contact, Al/poly 3C-SiC/Si (n-type) structure was annealed at 300, 400, and $500^{\circ}C$, respectively for 30 min under the vacuum condition of $5.0{\times}10^{-6}$ Torr. Finally, the p-n junction diodes fabricated on the poly 3C-Si/Si (p-type) were obtained like characteristics of single 3CSiC p-n junction diode. Therefore, poly 3C-SiC thin film diodes will be suitable for microsensors in conjunction with Si fabrication technology.

• International Journal of Automotive Technology
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• v.2 no.2
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• pp.39-45
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• 2001

Hydrogen is seen as one of the important energy vectors of the next century. Hydrogen as a renewable energy source, provides the potential for a sustainable development particularly in the transportation sector. Hydrogen driven vehicles reduce both local as well as global emissions. The laboratory of transporttechnology (University of Gent) converted a GM/Crusader V-8 engine for hydrogen use. Once the engine is optimised, it will be built in a low-floor midsize hydrogen city bus for public demonstration. For a complete control of the combustion process and to increase the resistance to backfire (explosion of the air-fuel mixture in the inlet manifold), a sequential timed multipoint injection of hydrogen and an electronic management system is chosen. The results as a function of the engine parameters (ignition timing. injection timing and duration, injection pressure) we given. Special focus is given to topics related to the use of hydrogen as a fuel: ignition characteristics (importance of electrode distance), quality of the lubricating oil (crankcase gases with high contents of hydrogen), oxygen sensors (very lean operating conditions), noise reduction (configuration and length of inlet pipes). The advantages and disadvantages of a power regulation only by the air to fuel ratio (as for diesel engines) against a throttle regulation (normal gasoline or gas regulation) are examined. Finally the goals of the development of the engine are reached: power output of 90 kW, torque of 300 Nm, extremely low emission levels and backfire-safe operation.

• Journal of Sensor Science and Technology
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• v.11 no.3
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• pp.138-144
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• 2002

The silicon piezoresistive pressure sensor is made by semiconductor process to obtain stainless steel isolated type pressure sensor. The sensor is loaded on a stainless steel housing with glass molding, $50\;{\mu}m$ stainless steel thin film is welded, and the stainless steel housing encapsulated by silicone oil. The performance of fabricated the pressure sensor has 10 bar pressure range. The XTR105 of exclusive transmitter chip is used the pressure transmitter that output current is 4 - 20 mA. The accuracy is ${\pm}5%$ FS, however, the accuracy is ${\pm}1%$ FS when the sensor is compensated temperature.

• Journal of Sensor Science and Technology
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• v.7 no.2
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• pp.140-146
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• 1998

Methods and systems to remove static electricity are requested necessarily because the static electricity causes a flammable gas explosion, a fire, reduction of production rate in manufacturing VLSI semiconductor device and so on. In this paper, abrasion and dust contaminant of needle electrode are studied experimentally. And, frequencies and pulse durations of a high frequency pulse source were controlled effectively to minimize the abrasion of needle electrode and control generated numbers of ions. As a result, it is verified experimentally that the ion generation of charge neutralizer increases by using a high frequency pulse source.

• Journal of Sensor Science and Technology
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• v.13 no.3
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• pp.195-198
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• 2004

For a diffusion barrier against copper, tantalum nitride films have been deposited on $SiO_{2}$ by atomic layer deposition (ALD), using PEMAT(Pentakis(ethylmethylamino)tantalum) and $NH_{3}$ as precursors, Ar as purging gas. The deposition rate of TaN at substrate temperature $250^{\circ}C$ was about $0.67{\AA}$ per one cycle. The stability of TaN films as a Cu diffsion barrier was tested by thermal annealing for 30 minutes in $N_{2}$ ambient and characterized through XRD, sheet resistance, and C-V measurement(Cu($1000{\AA}$)/TaN($50{\AA}$)/$SiO_{2}$($2000{\AA}$)/Si capacitor fabricated), which prove the TaN film maintains the barrier properties Cu below $400^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12S
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• pp.1232-1236
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• 2003

In this work, we fabricated a gas-sensing device based on porous silicon(PS), and its C-V properties were investigated for sensing alcohol vapor. The structure of the sensor consists of thin Au/oxidized PS/PS/P-Si/Al, where the p-Si is etched anisotropically to be prepared into a membrane-shape. We used alcohol gases vaporized from different alcohol (or ethanol) solutions mixed with pure water at 36$^{\circ}C$, similarly with an alcohol breath measurement to check drunk driving. As the result, I-V curves showed typical tunneling property, and C-V curves were shaped like those of a MIS (metal-insulator-semiconductor) capacitor, where the capacitance in accumulation was increased with alcohol vapor concentration.

• Applied Science and Convergence Technology
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• v.25 no.6
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• pp.124-127
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• 2016

Humidity calibration for a temperature-stable quartz oscillator (TSQO) was investigated to exclude the influences of relative humidity on the TSQO output in order to use the corresponding devices outdoors. The TSQO output is a voltage that is inversely proportional to the electric impedance of the quartz oscillator, which depends on the viscosity and density of the measured gas. The TSQO output was humidity calibrated using its humidity dependence, which was obtained by varying the relative humidity (RH) from 0 to 100 RH% while other conditions were kept constant. The humidity dependencies of the TSQO output were fit by a linear function. Subtracting the change in the TSQO output induced by the change in humidity, calculated with the function from the experimentally measured TSQO output for a range of 0-100RH%, eliminated the influence of humidity on the TSQO output. The humidity calibration succeeded in reducing the fluctuations of the TSQO output from 0.4-3% to 0.1-0.3% of the average values for a range of 0-100RH%, at constant temperatures. The necessary stability of the TSQO output for application in hydrogen sensors was below one-third of the change observed for a hydrogen leakage of 1 vol.% hydrogen concentration, corresponding to 0.33% of the change in each background. Therefore, the results in this study indicate that the present humidity calibration effectively suppresses the influence of humidity, for the TSQO output for use as an outdoor hydrogen sensor.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2015.10a
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• pp.545-548
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• 2015

As society is evolving into a highly smart era, a demand on convenient and safe living environment is increasing and many studies are being progressed in the directions of seeking convenience, safety and comfort in living. Therefore in this paper, a method for controlling the devices within the living space using a smart device and transmitting the information measured from a variety of sensors such as temperature, humidity and gas, etc using the Bluetooth was proposed in order to provide the convenience and safety of living environment.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.419-422
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• 1998

There are lots of researches which are using quratz crystal in order to apply it to sensors, for example, mass detect sensor, humidity sensor, gas sensor, etc. We tried to apply quartz crystal to the sensor using the resonant frequency and the resistance properties. Four kinds of fatty acid which are having the same head group are coated at the surface of quartz crystal, the shift of the resonant frequency and the resistance are observed according to length of the tail group. Myristic acid$(C_{14})$, palmitic acid$(C_16)$, stearic acid$(C_{18})$, and arachidic acid$(C_{20})$ were coated by Langmuir-Blodgett(LB) technique. As results, the resonant frequency shift was observed linearly. However, there are some difference compared with Sauerbrey's equation. It can be explained by the effect of the temperature property and/or humidity. On the other hand, the shift of the resistance was observed nonlinearly.