• Title/Summary/Keyword: GAS5

Search Result 10,115, Processing Time 0.044 seconds

Development of Large-area Plasma Sources for Solar Cell and Display Panel Device Manufacturing

  • Seo, Sang-Hun;Lee, Yun-Seong;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2011.08a
    • /
    • pp.148-148
    • /
    • 2011
  • Recently, there have been many research activities to develop the large-area plasma source, which is able to generate the high-density plasma with relatively good uniformity, for the plasma processing in the thin-film solar cell and display panel industries. The large-area CCP sources have been applied to the PECVD process as well as the etching. Especially, the PECVD processes for the depositions of various films such as a-Si:H, ${\mu}c$-Si:H, Si3N4, and SiO2 take a significant portion of processes. In order to achieve higher deposition rate (DR), good uniformity in large-area reactor, and good film quality (low defect density, high film strength, etc.), the application of VHF (>40 MHz) CCP is indispensible. However, the electromagnetic wave effect in the VHF CCP becomes an issue to resolve for the achievement of good uniformity of plasma and film. Here, we propose a new electrode as part of a method to resolve the standing wave effect in the large-area VHF CCP. The electrode is split up a series of strip-type electrodes and the strip-type electrodes and the ground ones are arranged by turns. The standing wave effect in the longitudinal direction of the strip-type electrode is reduced by using the multi-feeding method of VHF power and the uniformity in the transverse direction of the electrodes is achieved by controlling the gas flow and the gap length between the powered electrodes and the substrate. Also, we provide the process results for the growths of the a-Si:H and the ${\mu}c$-Si:H films. The high DR (2.4 nm/s for a-Si:H film and 1.5 nm/s for the ${\mu}c$-Si:H film), the controllable crystallinity (~70%) for the ${\mu}c$-Si:H film, and the relatively good uniformity (1% for a-Si:H film and 7% for the ${\mu}c$-Si:H film) can be obtained at the high frequency of 40 MHz in the large-area discharge (280 mm${\times}$540 mm). Finally, we will discuss the issues in expanding the multi-electrode to the 8G class large-area plasma processing (2.2 m${\times}$2.4 m) and in improving the process efficiency.

  • PDF

Anti-inflammatory Activities of Taxifolin from Opuntia humifusa in Lipopolysaccharide Stimulated RAW 264.7 Murine Macrophages (천년초의 Taxifolin이 마우스대식세포(RAW 264.7 cell)에 미치는 항염증활성)

  • Kim, Jaeyoung;Lee, Yonghwa;An, Hyeon-jin;Lee, Jae-duk;Yi, Yongsub
    • Journal of Applied Biological Chemistry
    • /
    • v.58 no.3
    • /
    • pp.241-246
    • /
    • 2015
  • This study was performed to investigate the antiinflammatory activities of taxifolin from Opuntia humifusa. A potent anti-oxidant activity was shown from the leaf extract at $IC_{50}$ value of $38.33{\pm}1.07{\mu}g/mL$ and fruit extract at $IC_{50}$ value of $40.23{\pm}2.21{\mu}g/mL$ by 1,1-diphenyl-2-picrylhydrazyl assay. Fraction of taxifolin from leaf extract identified using high performance liquid chromatography and gas chromatography/mass spectrometry. The results of cell viability indicated that taxifolin did not show cytotoxicity on RAW 264.7 cells at $500{\mu}M$ of concentration. The result showed that taxifolin inhibited lipopolysaccharide (LPS)-induced production of Nitrite oxide. In addition, taxifolin inhibited LPS-induced tumor necrosis factor-${\alpha}$ and interleukin-6 production by cytokine assay and cyclooxygenase-2 expression by western blot analysis, meaning taxifolin has a significant anti-inflammatory effect. Our results suggested that taxifolin from Opuntia humifusa showed anti-inflammatory activities.

Comparison of isoButoxycarbonyl derivatives, tert.-butyldimethylsilyl derivatives, with US EPA Method in the sensitivity of Alkylphenols, Chlorophenols, and Bisphenol A Potential field-screening applications of GC/MS-SIM (기체 크로마토그래피/질량분석기를 이용한 field-screening 적용을 위한 알킬페놀류, 클로로페놀류 및 비스페놀 A의 isoBOC 유도체, TBDMS 유도체와 US EPA 방법의 비교)

  • Kim, Hyub;Hong, Jong-Ki;Kim, Yong-Hwa;Kim, Kyoung-Rae
    • Analytical Science and Technology
    • /
    • v.15 no.3
    • /
    • pp.196-213
    • /
    • 2002
  • The alkylphenols, chlorophenols and bisphenol A were determined by gas chromatography/mass spectrometry-selected ion monitoring mode followed by three work-up methods for comparison; EPA method, isoBOC derivatization method and TBDMS derivatization method. Eleven phenols in water samples were extracted with dichloromethane. Also, solid-phase extraction (SPE) with XAD-4 and subsequent conversion to isobutoxycarbonyl derivatives or tert.-butyldimethylsilyl derivatives for sensitive analysis with the selected ion-monitoring (SIM) mode. The recoveries were 85.1~109.9% (EPA method) and 90.3~126.6% (isoBOC derivatization and TBDMS derivatization), respectively. The method detection limit of bisphenol A for SIM were 0.732 ${\mu}g/{\ell}$ (EPA method), 0.002 ${\mu}g/{\ell}$ (isoBOC derivatization) and 0.021 ${\mu}g/{\ell}$ (TBDMS derivatization). The SIM responses were linear with the correlation coefficient varying 0.9755~0.9981 (isoBOC derivatization), and 0.9908~0.9996 (TBDMS derivatization). When these methods were applied to treated wastewater sample from a polyethylene plant, the concentrations of 11 phenols were below the method detection limit.

A study about sculpture characteristic of SKD61 tool steel fabricated by selective laser melting(SLM) process (SLM 공정으로 제작된 SKD61 공구강의 조형 특성에 관한 연구)

  • Yun, Jaecheol;Choe, Jungho;Kim, Ki-Bong;Yang, Sangsun;Yang, Dong-Yeol;Kim, Yong-Jin;Lee, Chang-Woo;Yu, Ji-Hun
    • Journal of Powder Materials
    • /
    • v.25 no.2
    • /
    • pp.137-143
    • /
    • 2018
  • In this study, two types of SKD61 tool-steel samples are built by a selective laser melting (SLM) process using the different laser scan speeds. The characteristics of two kinds of SKD61 tool-steel powders used in the SLM process are evaluated. Commercial SKD61 tool-steel power has a flowability of 16.68 sec/50 g and its Hausner ratio is calculated to be 1.25 by apparent and tapped density. Also, the fabricated SKD61 tool steel powder fabricated by a gas atomization process has a flowability of 21.3 sec/50 g and its Hausner ratio is calculated to be 1.18. Therefore, we confirmed that the two powders used in this study have excellent flowability. Samples are fabricated to measure mechanical properties. The highest densities of the SKD61 tool-steel samples, fabricated under the same conditions, are $7.734g/cm^3$ (using commercial SKD61 powder) and $7.652g/cm^3$ (using fabricated SKD61 powder), measured with Archimedes method. Hardness is measured by Rockwell hardness testing equipment 5 times and the highest hardnesses of the samples are 54.56 HRC (commercial powder) and 52.62 HRC (fabricated powder). Also, the measured tensile strengths are approximately 1,721 MPa (commercial SKD61 powder) and 1,552 MPa (fabricated SKD61 powder), respectively.

Estimation of the Shadow Price of Carbon Dioxide Emissions, the Potential Reduction, and Substitution Possibility for fuels in the Chinese Fossil-fueled Power Generation Sector (중국 화력발전산업의 CO2 암묵가격 및 잠재감축량, 연료에 대한 대체가능성 분석)

  • Jin, Yingmei;Lee, Myunghun
    • Environmental and Resource Economics Review
    • /
    • v.22 no.1
    • /
    • pp.77-98
    • /
    • 2013
  • China, the world's largest $CO_2$ producer, is likely to be obligated to reduce greenhouse gas emissions under the post-Kyoto protocol. This paper estimates a Shephard input distance function for the Chinese fossil-fueled power generation sector to measure the shadow price of $CO_2$ emissions, technical efficiency, and indirect Morishima elasticities of substitution between inputs. Empirical results show that, on average, it costs approximately 3.2 US dollars per year to reduce $CO_2$ emissions by one ton over the period 1981-2009. This finding indicates that Chinese power sector is expected to benefit from selling emission permits to other countries such as Korea and Japan, given that our estimate for China is lower than the ones previous literatures estimated for the power sector in these countries. The maximum attainable average $CO_2$ reduction potential amounts to approximately 25 million tons per year by improving technical efficiency. Capital is substitutable with both coal and oil and capital is relatively more readily substituted for these fuels.

Effect of Supplementary Heating on the Night Air Temperature and Growth of Strawberry Under Greenhouse Cultivation (딸기 반촉성재배(半促成栽培) 보조가온(補助加溫)이 야온(夜溫)과 생육(生育)에 미치는 영향(影響))

  • Suh, Hyo-Duk;Park, Sang-Keun;Kwon, Young-Sam
    • Korean Journal of Environmental Agriculture
    • /
    • v.2 no.2
    • /
    • pp.114-119
    • /
    • 1983
  • Several supplementary heating methods were investigated to find their effects on night air temperature, injury in plant, growth and yield with Hokowase strawberry(Fragaria grandiflora) under greenhouse, during early spring season in 1981 and 1982. Kerosene lamp as a supplementary heating was not suitable because of its severe injury on strawberry plants, danger of accidental fire and bad smell. Paraffine candle and electric wire heating did not injure on strawberry plant, raised the minimum air temperature in greenhouse at night, enhanced growth, flowering and harvesting time of strawberry. Paraffine candle was effective as a supplementary heating method for short period growing under greenhouse, whereas electric wire heating was suitable for long period cultivation.

  • PDF

Quantitative Determination of Phenol in Water Using GC-MS after Liquid-Liquid Extraction and Acetylation (액-액 추출과 아세틸화 후 GC-MS를 이용한 물 중 phenol의 분석)

  • Park, Sunyoung;Kim, Yunjeong;Jung, Sungjin;Kim, Hekap
    • Korean Journal of Environmental Agriculture
    • /
    • v.36 no.1
    • /
    • pp.63-66
    • /
    • 2017
  • BACKGROUND: The phenol concentrations in water samples were determined using gas chromatography after derivatization of the analyte to phenyl acetate followed by extraction using a large volume of solvent. However, this procedure requires an additional purification step and is not analytically efficient. METHODS AND RESULTS: In this study, phenol was first extracted from an acidified water sample using ethyl acetate and then acetylated using acetic anhydride in the presence of a small amount of water and $K_2CO_3$. The derivative was extracted using 1mL of n-butyl acetate. One microliter of the extract was analyzed by GC-MS without further purification. The calibration curve showed good linearity with the $r^2$ value of 0.9968. The method detection limit and the limit of quantitation were estimated to be $0.18{\mu}g/L$ and $0.56{\mu}g/L$, respectively. Repeatability (RSD, n=3) and recovery (n=3) were 9.1%-4.3% and 90.6%-110.5%, respectively. The concentrations of phenol in a few samples of stream water were distributed in the range of $2.51-7.51{\mu}g/L$. CONCLUSION: This method is simpler and faster to implement than those currently utilized and shows high analytical reliability. It can be applied to the quantitative determination of phenol concentrations in surface water and groundwater samples.

Residual Multi Pesticides Screening of Dead Birds by Orbitrap High Resolution Mass Spectrometry (오비트랩 고분해능 질량분석기를 이용한 폐사 조류 중 다성분 잔류 농약 스크리닝 기법)

  • Lee, Doo-Hee;Kim, Bo-Kyong;Wang, Seung-Jun;Son, Ki-Dong;Jung, Hyen-Mi;Choi, Jong-Woo
    • Korean Journal of Environmental Agriculture
    • /
    • v.36 no.4
    • /
    • pp.269-278
    • /
    • 2017
  • BACKGROUND: The objective of this study was to evaluate screening method of residual multi pesticides in dead birds by Orbitrap high resolution mass spectrometry (HRMS) to identify the cause of death for birds. METHODS AND RESULTS: Extraction and clean-up method of residual pesticides in liver of dead birds was used QuEChERS (Quick Easy Cheap Effective Rugged and Safe) and method validations was conducted using liquid chromatography and gas chroamtography with triple-quadrupole mass spectrometer (LC/MS/MS and GC/MS/MS) Also, we were evaluated screening method for the determination of residual pesticides in liver of dead birds by LC and GC Orbitrap Mass Spectrometry. Results of method validations, Correlation coefficients of the matrix matched calibration curves were >0.978, and the method detection limits (MDLs) and limits of quantitation (LOQ) were 2.8~72.1 ng/g (18.4 ng/g on average) and 9.0~230 ng/g (58.5 ng/g on average). The accuracy ranged from 69.1%to 130% (103% on average), and the precision values were less than 14.8%(3.8%on average). The screening of residual pesticides in liver of dead birds by LC and GC Orbitrap HRMS was detected monocrotophos, carbofuran, carbosulfan, deltametrin, benfuracarb, carbofuran, phosphamidon, prochloraz in investigated samples. CONCLUSION: This results showed that accurate mass were extraction of residual pesticides in dead birds by Orbitrap HRMS. It suggested that this screening method is applicable to the residual pesticide analysis for the cause of death as a main tool.

Volatile Compounds and Sensory Properties of Commercial Brown Rice Vinegars Fermented with and without Ethanol (시판 현미식초의 주정첨가 유무에 따른 휘발성 성분 및 관능적 특성 비교)

  • Yoon, Sung-Ran;Kim, Gui-Ran;Lee, Ji-Hyun;Lee, Su-Won;Jeong, Yong-Jin;Yeo, Soo-Hwan;Choi, Han-Seok;Kwon, Joong-Ho
    • Korean Journal of Food Science and Technology
    • /
    • v.42 no.5
    • /
    • pp.527-532
    • /
    • 2010
  • The properties of volatile flavor components were compared in commercial brown rice vinegars that were fermented with and without ethanol addition, for which solid phase microextraction-gas chromatography (SPME-GC), electronic nose, and sensory evaluations were performed. A total of 24 volatile compounds, mainly composed of acetic acid, ethyl acetate, benzaldehyde, iso-valeric acid, phenylethyl alcohol, 2-phenylethyl acetate, acetoin, and isobutyric acid, were identified in the brown rice vinegar fermented without ethanol, while major volatiles in the brown rice vinegar fermented with ethanol were acetic acid, ethyl acetate, 1-hexyl acetate, benzaldehyde, 2-phenylethyl acetate, and phenylethyl alcohol. The electronic nose patterns of samples indicated a significant difference in the brown rice vinegars fermented with and without ethanol. Pungent flavor and off-flavor intensity were high in the brown rice vinegar fermented without ethanol. According to the results, fermentation conditions affect the volatile properties of brown rice vinegars.

Effects of High Hydrostatic Pressure and pH on the Reduction of Garlic Off-flavor (초고압처리 시간과 pH 변화에 의한 마늘의 이취성분 저감화)

  • Lim, Chae-Lan;Hong, Eun-Jeung;Noh, Bong-Soo;Choi, Won-Seok
    • Korean Journal of Food Science and Technology
    • /
    • v.42 no.5
    • /
    • pp.533-540
    • /
    • 2010
  • Effects of pH (1.8-10.2) and time (56 sec-15 min 4 sec) at high hydrostatic pressure (500 MPa) on the reduction of volatile compounds in garlic were studied. Volatile components of garlic were obtained from the headspace, analyzed, and identified by gas chromatography (GC)-mass spectrometry and an electronic nose. Nineteen sulfur compounds were identified as major compounds in garlic, and furan, aldehydes, alcohols, and ketones were also detected. Off-flavor compounds were more effectively reduced under strong acidic conditions. As the residence time at 500 MPa increased from 56 sec to 15 min 4 sec, the total amount of volatile compounds decreased significantly. The total amount of sulfur compounds decreased about 70% compared to those of raw garlic when the garlic was soaked in buffer (pH 6.0) and treated at 500 MPa for 15 min 4 sec. A principal component analysis showed that the off-flavors of garlic were reduced by the operating time of high hydrostatic pressure as well as pH treatment. The correlation coefficient of the results between GC and the electronic nose analysis was 0.9620. Therefore, pH and high hydrostatic pressure treatment could be used as an efficient method for reducing of garlic off-flavor.