Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.08a
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- Pages.148-148
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- 2011
Development of Large-area Plasma Sources for Solar Cell and Display Panel Device Manufacturing
- Seo, Sang-Hun (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Lee, Yun-Seong (Department of Physics, Korea Advanced Institute of Science and Technology) ;
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Jang, Hong-Yeong
(Department of Physics, Korea Advanced Institute of Science and Technology)
- Published : 2011.08.17
Abstract
Recently, there have been many research activities to develop the large-area plasma source, which is able to generate the high-density plasma with relatively good uniformity, for the plasma processing in the thin-film solar cell and display panel industries. The large-area CCP sources have been applied to the PECVD process as well as the etching. Especially, the PECVD processes for the depositions of various films such as a-Si:H,