• 설비공학논문집
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• 제15권9호
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• pp.751-761
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• 2003

We performed the numerical analysis on the airflow characteristics in the two type of cleanroom systems, which are the axial fan type (AFT) and the fan filter unit (FFU). A computational fluid dynamic model was applied to investigate and compare the nonuniformity, the deflection angle and the air ventilation effectiveness of the two designs of cleanrooms when dampers are adjusted and not adjusted. And the flow-resistance models of the various components were used in this simulation. We know that the airflow characteristics of the cleanrooms are largely affected by damper adjusting And we also find out that the FFU system is superior to the AFT system through the comparison of the cleanroom performance indices.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.231-235
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• 2005

Recently, some semiconductor and LCD manufacturers require equipment suppliers to serve the data of composite noise for clean room. In this study, we evaluate the composite noise of clean room by numerically and experimentally. The value of experimental result is more higher than calculated one as much as 1$\sim$2dB(A).

• 공기청정기술
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• 제27권1호
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• pp.46-55
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• 2014

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2003년도 하계학술대회 논문집
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• pp.3-3
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• 2003

• 한국산학기술학회논문지
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• 제10권1호
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• pp.6-11
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• 2009

본 논문에서는, 청정지역내에서 다수의 유리 기판을 적재하여 반송하는 롤러 컨베이어 시스템에서, 롤러와 카세트 사이의 기계적 마찰로 인해 발생하는 오염입자에 의한 유리 기판의 오염여부를 판단하기 위해, 시스템 내부의 유동장을 전산유체역학 기법을 통해 해석하였다. 수치해석 결과 일정 속도로 이동하는 카세트 하부에 큰 와류가 생성되는 것을 확인하였다. 그러나 이 와류는 후면에서 유입되는 강한 기류와, 상부 FFU에서 공급되어 하부로 배기되는 기류로 인해, 카세트의 하부 영역에만 갇히게 되는 것으로 나타났다. 따라서 카세트와 롤러 사이의 기계적 마찰로 인해 오염입자가 발생하여도 상부로 이동할 수 없어 유리 기판의 오염 가능성은 낮았다. 또한 이동속도가 빨라짐에 따라 유리 평판 사이의 공기 유동의 방향이 평판의 점성 전단력에 의해 역방향으로 바뀌게 됨을 확인하였다.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2007년도 동계학술발표대회 논문집
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• pp.600-605
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• 2007

In this study, the risk rates of different contamination sources of the Foreign material in a minienvironment were analyzed through CFD simulation. From the results, the ambient contamination sources mainly affect wafers in the FOUP, whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from Foreign materials transferred from the FFU. However, this system is unable to protect the wafers on the robot arm from internal Foreign materials and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.

• 한국입자에어로졸학회지
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• 제14권4호
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• pp.181-189
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• 2018

In this study, the risk rates of different contamination sources of the contaminant in a minienvironment were analyzed through Computational Fluid Dynamics (CFD) simulation. The airflow pattern characteristics can only predict the qualitative variation of contaminant concentration, but cannot evaluate the quantitative variations in the risk rate of sources. From the results, the ambient contamination sources mainly affect wafers in the Front Opening Unified Pod (FOUP), whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from contaminants transferred from the Fan Filter Unit (FFU). However, this system is unable to protect the wafers on the robot arm from internal contaminants and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2009년도 하계학술발표대회 논문집
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• pp.1507-1512
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• 2009

Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.