Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)

  • 2005.11a
  • /
  • Pages.231-235
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  • 2005
  • /
  • 1598-2548(pISSN)
The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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A Study on the Estimation of Composite Noise in Clean room

클린룸에서 FFU의 합성소음 예측에 관한 연구

  • Published : 2005.11.01
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Abstract

Recently, some semiconductor and LCD manufacturers require equipment suppliers to serve the data of composite noise for clean room. In this study, we evaluate the composite noise of clean room by numerically and experimentally. The value of experimental result is more higher than calculated one as much as 1$\sim$2dB(A).

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