Flow Analysis around the Roller Conveyor in a Clean Room

클린룸 내 롤러 컨베이어 운송장치 주위의 유동해석

  • Jeon, Hyun-Joo (AVACO CO., LTD) ;
  • Park, Chan-Woo (Department of Mechanical Design Engineering, Chonbuk National University) ;
  • Im, Ik-Tae (Department of Mechanical Design Engineering, Chonbuk National University)
  • 전현주 ((주)아바코기술연구소) ;
  • 박찬우 (전북대학교 기계설계공학부) ;
  • 임익태 (전북대학교 기계설계공학부)
  • Published : 2009.06.25

Abstract

Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.

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