• 한국CDE학회논문집
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• 제19권3호
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• pp.236-244
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• 2014

Presented in the paper is a reservation based dispatching rule to achieve the on-time delivery in system LSI (large scale integrated circuit) semiconductor fabrication (FAB) with urgent orders. Using the proposed reservation based dispatching rule, urgent lots can be processed without waiting in a queue. It is possible to achieve the on-time delivery of urgent orders by reserving a proper tool for the next step in advance while urgent lots are being processed at the previous step. It can cause, however, tardiness of normal lots, because the proposed rule assign urgent lots first. To solve this problem, the proposed rule tries to find the best tool for the reservation in the tool group, which can minimize idle time, and the reservation rule is applied at all tools except for photolithography tools (bottleneck). $MOZART^{(R)}$ which is developed by VMS solutions are used for simulation experiments. The experimentation results show that the reservation based dispatching rule can achieve the on-time delivery of normal lots as well as urgent lots.

• 대한물리치료과학회지
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• 제29권3호
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• pp.1-11
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• 2022

Background: The aim of this randomized controlled pilot study was to determine the effect of trunk training in wheelchair on fall efficacy, fall risk and activities of daily living in acute stroke patients. Design: Randomized controlled pilot trial. Methods: The study included 18 patients with acute stroke who were randomly allocated to an experimental group (EG) (n=9) and a control group (CG) (n=9). Patients in the EG group received general rehabilitation therapy combined with trunk training in wheelchair for 20min, whereas CG group received general rehabilitation therapy combined with bicycle training for 20min. Both groups performed the exercise 5 times a week for 3 weeks. Outcomes were assessed using Korean-Fall Efficacy Scale (K-FES), Fullerton Advanced Balance Scale (FAB) and Korean-Modified Barthel Index (K-MBI). Results: After 3 weeks of training, both groups showed significantly improved K-FES, FAB and K-MBI (p<.05 in both groups). However, the K-FES, FAB and K-MBI in the experimental group was significantly improving than in the control group (p<.05). Conclusion: These findings indicate that trunk training in wheelchair may be effective at decreasing fall risk and improving activities of daily living in acute stroke patients. Therefore, trunk training in wheelchair may be recommended as an intervention in reducing the incidence of fall risk in acute stroke patient.

• 한국식품영양학회지
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• 제22권4호
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• pp.577-586
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• 2009

Aging is associated with decreased energy expenditure, thermogenesis and energy requirements. Maintenance of physical fitness of the elderly has been reported to reduce the rate at which the basal metabolic rate, muscle strength, skeletal muscle mass and bone density deteriorate. Skeletal muscle disease is known to increase the risk of physical disability and psychological problems. This study was conducted to investigate changes in disability, emotional problems, body compositions, obesity indices and nutrient intake levels according to physical fitness with the elderly in rural areas. According to the results, physical fitness was negatively related with Activities of Daily Living(ADL, p<0.05), Instrumental Activities of Daily Living(IADL, p<0.001), Body Mass Index(BMI, p<0.001) and abdominal obesity(p<0.05), while it showed a positive correlation with the General Self Efficacy Scale(GSES)(p<0.001) and nutrient intake(p<0.05). When changes in these factors were compared according to the range of quartile of the Fullerton Advanced Balance Scale(FAB Scale), GSES(Q1=35.3, Q2=43.5, Q3=53.2, Q4=51.9, p<0.001), BMI(Q1=36.1%, Q2=34.7%, Q3=33.2%, Q4=28.6%, p<0.01), abdominal obesity(Q1=1.02, Q2=0.99, Q3=0.97, Q4=0.94, p<0.001) and nutrient intake(Q1=71.1%, Q2=75.4%, Q3=80.6%, Q4=80.2%, p<0.05) differed significantly. Taken together, these results suggested that better physical fitness would lead to a reduction in negative factors including physical disability and obesity indices, but to an increase in positive factors such as GSES and nutrient intake. The results of this study are expected to be used as basic data for the development of programs to promote the health of the elderly in a local society.

• 한국산학기술학회논문지
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• 제10권5호
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• pp.1074-1081
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• 2009

반도체 공정시스템의 레이아웃은 대규모 자본 투자의 필요성과 제조 공정의 복잡성의 증가와 함께 그 중요성이 점점 증가하고 있다. 오늘날 대부분의 반도체 공정시스템은 같은 유형의 장비가 동일한 bay에 배치되는 bay 타입의 레이아웃 형태를 취하고 있다. Bay 타입 레이아웃은 유연성의 장점을 가지고 있지만 물류 흐름의 제어 측면에서는 많은 단점을 가지고 있다. 본 논문에서는 이러한 bay 타입 레이아웃의 단점을 보완하고자 bay 타입의 유연성은 유지하되 conter spine이 없고 bay를 통합한 형태의 새로운 반도체 레이아웃 개념인 room 타입에 대해서 비교, 연구한다. 이를 위하여 본 논문에서는 새로운 room 타입 레이아웃의 형태를 제시하고 이를 기존의 레이아웃과 반송필요 횟수와 시간, foot-print, 경유 stocker, 그리고 물류흐름 시간 등의 성과척도를 비교하여 room 타입 레이아웃의 우수성을 보인다.

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.26-31
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• 2023

We investigated the impact of NF₃ / H₂O remote plasma dry cleaning conditions on the SiO₂ etching rate at different preparation states during the fabrication of ultra-large-scale integration (ULSI) devices. This included consideration of factors like Si crystal orientation prior to oxidation and three-dimensional structures. The dry cleaning process were carried out varying the parameters of pressure, NF₃ flow rate, and H₂O flow rate. We found that the pressure had an effective role in controlling anisotropic etching when a thin SiO₂ layer was situated between Si₃N₄ and Si layers in a multilayer trench structure. Based on these observations, we would like to provide further guidelines for implementing the dry cleaning process in the fabrication of semiconductor devices having 3D structures.

• 대한물리의학회지
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• 제12권4호
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• pp.139-146
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• 2017

PURPOSE: The purpose of this study was to systematically analyze the reliability and validity of the Korean-version of the balance assessment tools. METHODS: Two reviewers of this study independently evaluated the titles of articles and abstracts of studies published until December 2016 through electronic databases (RISS, NDSL, KISS, DBpia) using the keywords "Balance or posture or postural control or postural stability", "Test or assessment or measurement or outcome measure or assessment tool or measurement tool", "Korean version", "Reliability" and "Validity". Regarding the questions considered suitable for the purpose of this study, consensus was reached after reading the full text. Selecting journals suitable for the purpose of the study, they were analyzed as data. RESULTS: The reviewers selected nine papers suitable for the purpose of this study, and Korean-version of the balance assessment tools, included the Berg Balance Scale (BBS), Activities-specific Balance Confidence (ABC) scale, Postural Assessment Scale for Stroke (PASS), Motor Assessment Scale (MAS), Trunk Impairment Scale (TIS), Falls Efficacy Scale (FES), Tinetti-Balance scale, Fullerton Advanced Balance (FAB) scale, and Function In Sitting Test (FIST). Our study showed that the reliability and validity of the Korean-version of the balance assessment tools were high. CONCLUSION: The Korean-version of the balance assessment tools with high reliability and validity would enable physical therapists to make a more accurate evaluation of balance.

• 한국정밀공학회지
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• 제19권1호
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• pp.196-203
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• 2002

Generally, non-uniformity and removal rate are important factors on measurements of both wafer and die scale. In this study, we verify the effects of the pressure and relative velocity on the results of the chemical mechanical polishing and the effect of pattern density on inter layer dielectric chemical mechanical polishing of patterned wafer. We suggest an appropriate modeling equation, transformed from Preston\`s equations which was used in glass polishing, and simulate the removal rate of patterned wafer in chemical mechanical polishing. Results indicate that the pressure and relative velocity are dominant factors for the chemical mechanical polishing and pattern density effects on removal rate of pattern wafers in die scale. The modeling is well agreed to middle and low density structures of the die. Actually, the die used in Fab. was designed to have an appropriate density, therefore the modeling will be suitable for estimating the results of ILD CMP.

• 한국경영과학회:학술대회논문집
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• 한국경영과학회 2006년도 추계학술대회
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• pp.525-528
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• 2006

This paper considers the vehicle dispatching problem in the automated material handling system (AMHS) of a large scale semiconductor fabrication line, which consists of 18 bays, 468 equipments and uses more than 130 overhead hoist transporters (OHT). We propose an assignment problem based vehicle dispatching approach to take advantage of simultaneous vehicle reassignment based on up-to-date system status. The proposed approach compares fsvorably with the shortest travel distance first rule and with the reassignment based rule which was recently proposed by the authors, in the number of vehicles required and the average lead time.

• Metals and materials international
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• 제24권6호
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• pp.1285-1292
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• 2018

Microstructural properties of as-grown and annealed CoCrFeMnNi high entropy alloy (HEA) oxynitride thin films were investigated. The CoCrFeMnNi HEA oxynitride thin film was grown by magnetron sputtering method using an air gas, and annealed under the argon plus air flow for 5 h at $800^{\circ}C$. The as-grown film was homogeneous and uniform composed of nanometer-sized crystalline regions mixed with amorphous-like phase. The crystalline phase in the as-grown film was face centered cubic structure with the lattice constant of 0.4242 nm. Significant microstructural changes were observed after the annealing process. First, it was fully recrystallized and grain growth happened. Second, Ni-rich region was observed in nanometer-scale range. Third, phase change happened and it was determined to be $Fe_3O_4$ spinel structure with the lattice constant of 0.8326 nm. Hardness and Young's modulus of the as-grown film were 4.1 and 150.5 GPa, while those were 9.4 and 156.4 GPa for the annealed film, respectively.

• 수면정신생리
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• 제20권1호
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• pp.15-21
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• 2013

목 적: 하지불안증후군에서의 인지기능 저하는 흔히 동반되는 수면박탈, 불안, 우울 등에 의해 영향을 받는다. 본 연구의 목적은 투약 받지 않고 있는 한국 노인 인구에서 하지불안증후군과 인지기능 저하와의 관련성을 동반 증상의 영향을 배제하고 살펴보는 것이다. 방 법: 연구대상은 25명의 투약 받고 있지 않은 한국 노인 하지불안증후군 환자군과 나이, 성별, 교육연한에 따라 짝지은 50명의 대조군이다. 모든 연구대상에 대해 CERAD-K 신경심리평가, 중증인지감퇴평가 척도, 전두엽 기능 평가, 그리고 시계 그리기 검사(CLOX)를 포함한 광범위한 인지기능 평가를 시행하였다. 또한 수면의 질 평가를 위해 피츠버그 수면의 질 지수(Pittsburgh Sleep Quality Index, PSQI), 우울증의 평가를 위해 노인우울척도(Geriatric Depression Scale, GDS)를 사용하였다. 결 과: 환자군과 대조군 사이의 PSQI와 GDS 점수의 차이는 없었다. 구성 재인 검사에서 환자군이 대조군에 비해 더 낮은 점수를 보였으며(t=-2.384, p=0.02), 이를 제외한 모든 영역의 인지기능 평가에서 환자군과 대조군의 유의미한 차이는 관찰되지 않았다. 우울감이 있는 대상($GDS{\geq}10$)은 그렇지 않은 군에 비해 언어 유창성, 간이 정신상태 검사, 단어목록기억, 길 만들기 검사, 전두엽 기능 평가의 영역에서 유의한 인지기능 저하를 보였다. 수면의 질이 낮은 대상(PSQI>5)은 그렇지 않은 군에 비해 인지기능 평가의 전 영역에서 차이를 보이지 않았다. 결 론: 본 연구에서 하지불안증후군 환자군을 대조군과 비교한 결과 환자군은 불면과 우울의 영향을 배제하면 비교적 인지기능이 보존된 것으로 관찰되었다. 환자군에서 관찰되었던 시각 인지 영역의 저하는 하지불안증후군에서의 도파민 신경전달계의 장애와 연관하여 해석해 볼 수 있다.