• 공업화학
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• 제8권5호
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• pp.756-762
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• 1997

본 실험에서는 황산용액에서 전기화학적으로 금속 알루미늄판을 양극산화하여 원통형 세공구조를 갖고 있는 alumina막을 형성시켰다. 양극화에 사용된 알루미늄 시료는 전해연마, 화학연마 및 열산화와 같은 전처리 공정을 거쳐서 준비하였으며, 형성된 알루미나막의 세공분포와 두께 등을 SEM과 BET를 사용하여 조사하였다. 그 결과 산화피막이 Keller모델과 같은 기하 구조로 이루어져 있으며. 균일한 세공 분포를 지니고 있음을 볼 수 있었다. 그리고 산화막의 세공크기와 두께는 황산전해질의 농도, 반응온도 그리고 전류밀도와 같은 양극산화 공정변수에 의존함을 알수 있었다.

• 한국전기전자재료학회논문지
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• 제20권9호
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• pp.749-755
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• 2007

Recently, novel MEMS probe cards can support reliable wafer level chip test with high density probing capacity. However, manufacturing cost and process complexity are crucial weak points for low cost mass production. To overcome these limitations, we have developed micro spring structured MEMS probe card. For fabrication of micro spring module, a wire bonder and electrolytic polished gold wires are used. In this case, stringent tension force control is essential to guarantee the low level contact resistance of micro spring for reliable probing performance. For this, relation between tension force of fabricated probe card and contact resistance is characterized. Compare to conventional probe cards, developed MEMS probe card requires fewer fabrication steps and it can be manufactured with lower cost than other MEMS probe cards. Also, due to the small contact scratch patterns, we expect that it can be applied to bumping types chip test which require higher probing density.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 춘계학술대회 논문집 전기기기 및 에너지변환시스템부문
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• pp.52-56
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• 2006

Some of factors affecting photo-conversion efficiency of dye sensitized solar cells (DSCs) are discussed in terms of $TiO_2$ electrodes. The first topic is on the surface modification of $TiO_2$ nano-particles, which is associated with electron traps on the surface of $TiO_2$ nano-particles. The surface is modified with dye molecules under pressurized $CO_2$ atmosphere to increase the surface coverage of $TiO_2$ nano-particles with dye molecules. This increases Jsc because of an increase in the amount of dye molecules and a decrease in the amount of trapping sites on $TiO_2$ nano-particles. In addition, the decrease in the amount of trap sites increases Voc because decreases in Voc are brought about by the recombination of $I_2$ molecules with electrons trapped on the $TiO_2$ surfaces. Selective staining for tandem cells is proposed. The second topic is on the contact between a $SnO_2$/F transparent conductive layer (TCL) and nano-particles. Polishing the TCL surfaces with silica nano-particles increases the contact, resulting in Jsc increases. The third topic is the fabrication of ion-paths in $TiO_2$ layers. Electro-spray coating of $TiO_2$ nano-particles onto TCL is shown to be effective for fabricating ion-paths in $TiO_2$ layers, which increases Jsc.

• Applied Microscopy
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• 제47권1호
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• pp.55-62
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• 2017

This paper describes experiments aimed at characterizing the behavior of field electron emitters fabricated by coating carbon fibers with epoxylite resin. Polyacrylonitrile carbon fibers of type VPR-19, thermally treated at $2,800^{\circ}C$, were used. Each was initially prepared in a "uncoated" state, by standard electro polishing and cleaning techniques, and was then examined in a scanning electron microscope. The fiber was then baked overnight in a field electron microscope (FEM) vacuum chamber. Current-voltage characteristics and FEM images were recorded on the following day or later. The fiber was then removed from the FEM, coated with resin, "cured" by baking, and replaced in the FEM. After another overnight bake, the FEM characterization measurements were repeated. The coated fibers had significantly better performance than uncoated fibers. This confirms the results of earlier experiments, and is thought to be due in part to the formation of a conducting channel in the resin over layer. For the coated fiber, lower voltages were needed to obtain the same emission current. The coated fibers have current-voltage characteristics that show smoother trends, with greater stability and repeatability. No switch-on phenomena were observed. In addition, the emission images on the phosphor-coated FEM screen were more concentrated, and hence brighter.

• 대한화학회지
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• 제57권3호
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• pp.322-328
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• 2013

Copper iodide was employed as a modifier for preparation of a new carbon ceramic electrode. For the first time, the catalytic oxidation of amoxicillin (AMX) was demonstrated by cyclic voltammetry, chronoamperometry and amperometry methods at the surface of this modified carbon ceramic electrode. The copper iodide modified sol-gel derived carbon ceramic (CIM-SGD-CC) electrode has very high catalytic ability for electrooxidation of amoxicillin. The catalytic oxidation peak current was linearly dependent on the amoxicillin concentration and the linearity range obtained was 100 to 1000 ${\mu}mol\;L^{-1}$ with a detection limit of 0.53 ${\mu}mol\;L^{-1}$. The diffusion coefficient ($D=(1.67{\pm}0.102){\times}10^{-3}\;cm^2\;s^{-1}$), and the kinetic parameter such as the electron transfer coefficient (${\alpha}$) and exchange current density ($j_0$) for the modified electrode were calculated. The advantages of the modified CCE are its good stability and reproducibility of surface renewal by simple polishing, excellent catalytic activity and simplicity of preparation.

• Transactions on Electrical and Electronic Materials
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• 제7권4호
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• pp.157-162
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• 2006

Chemical-mechanical polishing (CMP), one of the dominant technology for ULSI planarization, is used to flatten the micro electro-mechanical systems (MEMS) structures. The objective of this paper is to achieve good planarization of the deposited film and to improve deposition efficiency of subsequent layer structures by using surface-micromachining process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages of CMP process for MEMS structures are observed respectively by using the test patterns with structures larger than 1 urn line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of silica slurries: $ILD1300^{TM}\;and\;Nalco2371^{TM}$. And then, the experiments were conducted based on the pretest. A selectivity and pH adjustment of slurry affected largely step heights of MEMS structures. These results would be anticipated as an important bridge stone to manufacture MEMS CMP slurry.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.573-574
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• 2006

The planarization technology of Chemical-mechanical polishing(CMP), used for the manufacturing of multi-layer various material interconnects for Large-scale Integrated Circuits (LSI), is also readily adaptable as an enabling technology in MicroElectroMechanical System (MEMS) fabrication, particularly polysilicon surface micromachining. However, general LSI device CMP has partly distinction aspects, the pattern scale and material sorts in comparison with MEMS CMP. This study performed preliminary CMP tests to identify slurry characteristic used in general IC device. The experiment result is possible to verify slurry characteristic in MEMS structure material.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.637-638
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• 2005

AAO templates were fabricated using a two-step anodization process with pretreatment such as electro polishing and annealing. To reduce process time and get well-aligned pore array, rapid thermal processor by an halogen lamp was employed in vacuum state at $500^{\circ}C$ for various time. The pore array of AAO template annealed at $500^{\circ}C$ for 2 h is comparable to a template annealed in conventional furnace at $500^{\circ}C$ for 30 h. The well-fabricated AAO template has the mean pore diameter of 70 nm, the barrierlayer thickness of 25 nm, and the pore depth of $9{\mu}m$. And the pore density can be as high as $2.0\times10^{10}cm^{-2}$.

• 대한금속재료학회지
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• 제50권1호
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• pp.59-63
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• 2012

Studying the long-range ordering of nanopores on the anodic aluminum oxide (AAO) membranes under a hard anodization (HA) approach is crucial in producing well-aligned nanopores on the AAO membranes. Electro-polishing in a mixture of ethanol and perchloric acid for 5 min removed marks formed by rolling and produced flat surfaces on aluminum substrates. The AAO was formed by the first HA process, providing seeds for the subsequent production of uniform AAO nanopores. The second HA process carried out on the seeds produced well-aligned, uniform AAO nanopores. The AAO nanopores, varying in size and shape, were observed with voltages applied for HA. This study provides a route for controlling the size and shape of AAO nanopores by changing the applied voltages.

• 소성∙가공
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• 제33권2호
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• pp.118-122
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• 2024

Micro-electromechanical systems (MEMS) based in-situ heating holders have been developed to enable high resolution imaging of heat treatment analysis. However, unlike the standard 3 mm metal disk specimens used in the furnace-based heating holder and general transmission electron microscopy holder, the MEMS-based in-situ heating holder requires thin specimens that can be penetrated by electrons to be transferred onto the MEMS chip. Previously, focused ion beam milling was used to transfer metal specimens, but it has the disadvantage of being expensive and the risk of specimen damage due to gallium ions. Therefore, in this study, we devised a method of transferring metallic materials by ultrasonic treatment using a transmission electron microscopy specimen made by electro jet polishing. A 3mm electropolished metal disk was placed in an appropriate solution, ultrasonicated, and then drop casted. The transfer of the specimen was successful, but it was confirmed that dislocations were formed inside the specimen due to ultrasonic treatment. This study provides a novel method for transferring metallic materials onto MEMS chips, which is cost-effective and less gallium ion damaging to the specimen. The results of this study can be used to improve the efficiency of heat treatment analysis using MEMS-based in-situ heating holders.