Solid Phase Crystallization Behaviors and Microstructures of Amorphous Silicon Films Dependent on Deposition Conditions (증착 조건에 따른 비정질 실리콘 박막의 고상결정화 거동과 미세구조의 변화)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1997.10a
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- pp.87-87
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- 1997