The Effects of Suspension pH of Ceria Slurry on Chemical Mechanical Polishing for Shallow Trench Isolation (STI CMP용 세리아 슬러리의 Suspension pH가 CMP공정에 미치는 영향)
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- Proceedings of the Korean Ceranic Society Conference
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- 2003.04a
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- pp.78.2-78
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- 2003