Improvement of Negative Bias Temperature Instability by Decoupled Plasma Nitridation Process (Decoupled Plasma Nitridation 공정 적용을 통한 Negative Bias Temperature Instability 특성 개선)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.18 no.10
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- pp.883-890
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- 2005