• Journal of the Microelectronics and Packaging Society
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• v.24 no.2
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• pp.43-48
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• 2017

Conductive $Sn_xO_y$ thin films were fabricated via RF reactive sputtering using SnO:Sn (80:20 mol%) composite target. The composite target was used to produce a chemically stable composition of $Sn_xO_y$ thin film while controlling structural defects by chemical reaction between tin and oxygen. During sputtering pressure, RF power, and substrate temperature were fixed, and oxygen partial pressure was varied from 0% to 12%. Annealing process was carried out at $300^{\circ}C$ for 1 hour in vacuum. Except $P_{O2}=0%$ sample, all samples showed the transmittance of 80~90% and amorphous phase before and after annealing. Electrically stable p-type $Sn_xO_y$ thin film with high transmittance was only obtained from the oxygen partial pressure at 12%. The carrier concentration and mobility for the $P_{O2}=12%$ were $6.36{\times}10^{18}cm^{-3}$ and $1.02cm^2V^{-1}s^{-1}$ respectively after annealing.

• Journal of the Korean Magnetics Society
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• v.5 no.5
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• pp.864-873
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• 1995

Amorphous $Fe_{73.5}Cu_{1}Nb_{3}Si_{16.5}B_{6}$ ribbons were annealed for different time at $500^{\circ}C$ and $552^{\circ}C$, just before and after the exothermic reaction in DSC curve. The development of nanocrystalline phase was investigated by means of $M\"{o}ssbsuer$ spectroscopy. The crystalline phase consists mainly of $DO_{3}Fe-Si$. Though slight in amount (5%), another ferromagnetic phase which could be presumed $t-Fe_{3}B$ was detected Si content of $DO_{3}Fe-Si$, Si/(Fe+Si), was 0.218 under the heat treatment at $500^{\circ}C$ for 60 min and 0.222 at $552^{\circ}C$ for 10 min. Since then both of those values decreased with time until 120 min and finally these two values remained constant at 0.210. The variation in Si content with annealing time results in the variation in the hyperfine field and the isomer shift. The increase in the mean hyperfine fields and the decrease in the mean isomer shifts of Fe-Si are caused by the increase in Si content. The volume fractions of residual amorphous phase rapidly decrease during the early stage of annealing and come nearer to saturation after 120 min both at $500^{\circ}C$ and $552^{\circ}C$. The decrease in the mean hyperfine field of residual amorphous. in spite of slight changes in the volume fractions of Fe-Si and of residual amorphous after 120 min. is caused by the increase in the content of Nb and B in residual amorphous phase. The saturated volume fraction of the crystalline phase was 81% for $500^{\circ}C$ (180 min) and 77% for $552^{\circ}C$ (960 min), different from expectation.

• Macromolecular Research
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• v.8 no.2
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• pp.66-72
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• 2000

Cis-Polybutadiene (cis-PBD) and the three polyethylenes (PE's) having different branch content were mixed to investigate crystallinity, thermodynamic interaction parameter(c), and diluents effect. Crys-tallinty of PE's decreased with increasing content of amorphous cis-PBD because of a decrease in both the degree of annealing and kinetics of diffusion of the crystallizable polymer content. The thermodynamic interaction parameter(c) for the three blend systems approximately equals to zero near the melting point. These systems were determined to be miscible on a molecular scale near or above the crystalline melting point of the crystalline PE's. From the measurement of T$\sub$m/ vs. T$\sub$c/ behavior, all the three blends showed a straight line for a plot of T$\sub$m/ vs. T$\sub$c/. This result means that the melting behavior of PE is mainly due to a diluent effect of cis-PBD component.

• Korean Journal of Materials Research
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• v.26 no.11
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• pp.598-603
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• 2016

The recent development of electro-optic devices and anticorrosion media has led to the necessity to investigate infrared optical systems with solid-solid interfaces of materials that often have the characteristic of amorphousness. One of the most promising classes of materials for those purposes seems to be the chalcogenide glasses. Chalcogenide glasses, based on the Ge-Sb-Se system, have drawn a great deal of attention because of their use in preparing optical lenses and transparent fibers in the range of 3~12 um. In this study, amorphous Ge-Sb-Se chalcogenide for application in an infrared optical product design and manufacture was prepared by a standard melt-quenching technique. The results of the structural, optical and surface roughness analysis of high purity Ge-Sb-Se chalcogenide glasses are reported after various annealing processes.

• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.9
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• pp.1060-1067
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• 1988

In this paper, we have investigated the effects of rapid thermal process on the electrical and structural properties of silicon films. It was shown that required times and temperature for the successful activation of dopants (Boron, Phosphorus:5E15atoms/cm\ulcorner were above 1000\ulcorner, 10sec, respectively. The typical resistivities of films deposited below 600\ulcorner were in the range of 1.0 E-3ohm-cm which was 20-30% lower than that of initially polycrystalline silicon depositd above 600\ulcorner. After rapid thermal process at high temperature above 1000\ulcorner, the films did not reveal any change in resistivity due to the dopant segregation, and better electrical conductivity could be obtained by increasing the process time. The grain growth by RTA treatment was more salient in the case of the doped amorphous than that of initially polycrystalline. The surface of the films also preserved the higher structural perfection and surface smoothness.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1239-1242
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• 1994

We have characterized XeCl excimer-laser-induced crystallization of thin amorphous silicon films deposited by PECVD (${\alpha}-Si:H$) and LPCVD(${\alpha}-Si$). The electrical and optical properties and surface roughness of crystallized thin films have been measured. The dc conductivities, crystallinity and surface roughness of the films increased as the laser energy density and shot density were increased. Also, we have investigated the effects of 2-step annealing employing SPC and ELA. The properties of 2-step annealed films were better than those of films annealed by ELA only.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.189-189
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• 2009

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.248-248
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• 2010

We have demonstrated new functionalities of Ag-doped chalcogenide glasses based on their capabilities as solid electrolytes. The influence of silver on the properties of the newly formed materials is regarded in terms of diffusion kinetics, and Ag saturation is related to the composition of the hosting material. Silver saturated in chalcogenide glass has been used in the formation of solid electrolyte, which is the active medium in the programmable metallization cell (PMC) device. In this paper, we investigated the optical properties of Ag-doped chalcogenide thin film by He-Ne laser beam exposure, which is concerned with the Ag-doping effect of PMCs before or after annealing. Chalcogenide bulk glass was fabricated by a conventional melt quenching technique. Amorphous chalcogenide and Ag thin films were prepared by e-beam evaporation at a deposition rate of about $4\;{\AA}/sec$. As a result of resistance change with laser beam exposure, the resistance abruptly dropped from the initial value of $1.4\;M{\Omega}$ to the saturated value of $400\;{\Omega}$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.198-199
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• 2006

$SrTa_2O_6$(STA) thin films were fabricated by sol-gel method. The films annealed below $700^{\circ}C$, showed amorphous phase and crystallization phase was observed after annealing over $800^{\circ}C$. From high frequency capacitance-voltage measurements, 24nm thick STA thin film annealed at $900^{\circ}C$, has an EOT of 5.7nm and a dielectric constant of 16. Leakage current characteristics were improved by the insertion of chemical oxide between STA and Si. Leakage current densities are around $3.5{\times}10^{-7}A/cm^2$ at 5V for the structure inserted chemical oxide but $1.4{\times}10^{-6}A/cm^2$ at 5V without chemical oxide.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2002.11a
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• pp.207-211
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• 2002

Anodizing film was prepared by anodic oxidation of pure aluminum(purity > 99.50) using DC power supply for constant current mode in an electrolytic solution of surface of sulfuric acid. Effects of pre-treatment process such as chemical polishing, acid cleaning, alkali etching before anodic oxidation, were studied to microstructures and surface morphologies. A roughness on surface of anodizing film had to be decreased for amorphous phase by anodic oxidation. A roughness on surface of anodizing film decrease as annealing temperature increased in chemical polishing.