• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.162-162
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• 2012

Sub 100 nm의 Complementary Metal-Oxide-Semiconductor (CMOS) 소자를 구동하기 위해서는 2.0 nm 이하의 $SiO_2$ oxide에 해당하는 전기적 특성이 요구된다. 그러나 2.0 nm 이하의 $SiO_2$에서는 누설 전류가 너무 크기 때문에 이를 대체하기 위해서 유전 상수 (dielectric permittivity)가 높은 $HfO_2$ (${\varepsilon}=25$), $Al_2O_3$, $HfO_2/Al_2O_3$ laminate 등의 high-k dielectric 물질들이 연구되고 있다[1]. High-k dielectric 물질의 전기적 특성은 박막 조성, 두께 및 전극과의 계면에 생성되는 계면 층이나 불순물(Impurity) 거동에 크게 의존하므로 High-k dielectric/전극(Metal or Si) 구조에서 조성 및 불순물의 거동에 대한 정확한 평가가 주요 쟁점으로 부각되고 있다. 이를 평가하기 위해 일반적으로 $Ar^+$ ion에 의한 depth profiling 분석이 진행되나 Oxygen 원자의 선택적 식각에 기인된 분석 깊이 분해능(Depth Resolution) 왜곡으로 계면 층의 형성이나 불순물의 거동을 정확하게 평가할 수 없다. 이러한 예로는 $Ta_2O_5$ 및 $SrBi_2Ta_2O_9$와 같은 다 성분 계 산화막에 $Ar^+$ ion 주사 시 발생하는 선택적인 식각(Preferential Sputtering) 때문에 박막의 실제 조성 및 거동을 평가하는 것은 어렵다고 보고된 바 있다[2,3]. 본 연구에서는 $90{\AA}$인 적층 $Hf_xO_y/Al_xO_y/Hf_xO_y$ 구조에서의 불순물 거동 분석 능력 확보 상 주요 인자인 깊이 분해능 개선을 Secondary Ion Mass Spectroscopy(SIMS)의 primary ion 종, impact energy 및 주사 각도를 변화시켜 ~1 nm 수준까지 구현하였다. 이러한 분석 깊이 분해능의 개선은 Low Impact Energy, 입사 이온의 glancing angle 및 Cluster ion 적용에 의존하며 이들 요인의 효과에 대해 비교/고찰하고자 한다.

• Analytical Science and Technology
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• v.17 no.3
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• pp.230-239
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• 2004

Using our PM2.5 and PM10 concentration data obtained from Seoul and Busan during winter 2002, we conducted comparative analysis on the role of inorganic ions in constituting airborne particles in two distinctive urban areas. Whereas the mass concentration of fine particle was more significant in Seoul, no such pattern was found in Busan. In addition, when the major components were compared between different particle fractions and between different sites, clear pattern was apparent between those. Although the major components of fine particles were generally compatible each other ($NH{_4}^+$, $NO{_3}^-$, and NSSS), those of coarse fractions were clearly distinguished. Although anthropogenic signatures were still important in Seoul, the influence of oceanic sources was clear in coarse fraction of Busan ($Cl^-$ and $Na^+$). Detailed statistical analysis of our data consistently supports the importance of different source processes between particle modes and source processes.

• Food Science and Preservation
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• v.17 no.3
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• pp.328-333
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• 2010

The effects of green tea on the physicochemical properties of eggs were investigated. One-hundred-and-fifty Isa Brown hens (27 weeks of age) were studied over 10 weeks. Green tea was added to the diet at levels of 4% and 8% w/w. The contents of Ca, K, P, Fe and Mg in eggs increased upon dietary supplementation with green tea powder, and were higher in the yolk than in the white, with the exception of Mg. The increase was greatest for Ca, from 41.0 mg% to 119.8 mg%, in egg white. For Fe, an increase from 3.7 mg% to 12.6 mg% was apparent in egg yolk. When hens consumed the green tea-supplemented diets, average egg weight decreased from 68.8 g to 64.4 g, but the total cholesterol content of egg yolk did not significantly change (control value: 1,899.1 mg% test value: 2,011.3 mg%). In sensory evaluation tests, egg white was similar in terms of astringency and grayness regardless of diet, and egg yolk was yellow-to-orange in color, and rated as fishy or slightly fishy, when green tea diets were administered. Such diets reduced pH values in all of the white, yolk, and white/yolk combination groups. The major fatty acids of egg yolk, constituting more than 90% of total fatty acids, were palmitic, stearic, oleic, and linoleic acid. Green tea diets reduced the saturated fatty acid level from 32.0% to 27.4% of total fatty acids, and unsaturated fatty acid levels increased from 68.0% to 72.6% in egg yolk.

• Journal of the Korean GEO-environmental Society
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• v.7 no.4
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• pp.35-41
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• 2006

This paper analyzed elution and ingredients of soil components which consist of soil and rocks in 6 regions in Yeongyang and Cheongsong to identify substantial matters that cause muddy water in Imha reservoir. We identified that more than 80% of major ingredients in collected soil and rocks are vermiculite(V), illite(I), kaolinite(Ka), quartz(Q), feldspar(F). Sodium and calcium are eluted in large quantities from soil of Sanseong and Cheongki. When calcium is in contact with water, much ions are eluted rapidly. We confirmed these ions are alkali minerals rising pH. We consider clay components distributed in Yeongyang as major cause of muddy water and rising pH of Imha reservoir because its ingredient calcite easily is dissolved in rainwater and splits other mineral particles into ${\mu}m$ sized particles.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2012.10a
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• pp.285-287
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• 2012

염해는 철근 콘크리트 구조물의 주요 열화원인으로서 특히 수해양 부유식 건축물의 상부구조는 비래염분에 의한 피해에 노출되어 있고, 해수에 접하고 있는 함체는 다공질 콘크리트의 모세관으로 염수이온이 침투하므로 상당히 높은 수위의 열화 환경에 노출되어 있다고 분류할 수 있다. 본 연구는 해양에서 유입되는 비래염분량을 정량화하여 철근 콘크리트 구조물 뿐만아니라 강재 건자재의 장수명화를 꾀하는 기초자료를 구축하고자 하였다. 1년간에 걸쳐 측정된 비래염분유입 지역은 기존연구에서 조사된 1km 범위을 상당히 초과하고 있으며 그 량도 강재 발청농도를 탁월하게 상회하는 것으로 분석되었다.

• Proceedings of the KIPE Conference
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• 2019.07a
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• pp.445-446
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• 2019

전기적 등가회로의 모델의 정확도 향상을 위하여 정확한 내부 저항과 OCV의 반영은 필수적이며, 이를 위한 OCV 실험에서 SOC 구간을 작게 작을수록 OCV의 정확도는 향상되지만 실험시간은 증가한다. 따라서 실험 시간을 고려한 적당한 SOC(5%, 10%) 구간으로 실험을 진행하며, 측정 되지 않은 영역의 내부 파라미터는 선형보간법으로 등가회로 모델에 반영한다. 이러한 문제로, 본 연구는 SOC 추정에의 주요 인자인 OCV의 추정 기법으로 뉴럴 네트워크(Neural Network)를 사용하였다. 추정 방법은 뉴럴 네트워크로 기존 OCV 실험 데이터를 학습하여 모델을 구축한다. 학습 모델의 입력값으로 용량 실험 데이터의 전압, 전류를 적용하였고 결과로 얻은 SOC-OCV 곡선을 비교 분석하였다.

• Journal of Korean Society of Environmental Engineers
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• v.27 no.8
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• pp.829-836
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• 2005

In this study, the characteristics of atrazine decompositon with photo-chemical oxidation process was investigated by the oxidation products analysis. The main products of the process were OIET(2-hydroxy-4-ethylamino-6-isopropylamino s-triazine), OIAT(2-hydroxy-4-amino-6-isopropylamino s-triazine) and OAAT(2-hydroxy-4,6-diamino-s-triazine), resulting i n dechlorination or hydroxylation as the main mechanism of the photo-chemical oxidation process. Through the material balance analysis of TOC and chloride ion in the aqueous solution, it was concluded that mineralization of the atrazine was not occurred but the dechlorination of atrazine had been completed.

• Clean Technology
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• v.29 no.4
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• pp.255-261
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• 2023

Power semiconductors are semiconductors used for power conversion, transformation, distribution, and control. Recently, the global demand for high-voltage power semiconductors is increasing across various industrial fields, and optimization research on high-voltage IGBT components is urgently needed in these industries. For high-voltage IGBT development, setting the resistance value of the wafer and optimizing key unit processes are major variables in the electrical characteristics of the finished chip. Furthermore, the securing process and optimization of the technology to support high breakdown voltage is also important. Etching is a process of transferring the pattern of the mask circuit in the photolithography process to the wafer and removing unnecessary parts at the bottom of the photoresist film. Ion implantation is a process of injecting impurities along with thermal diffusion technology into the wafer substrate during the semiconductor manufacturing process. This process helps achieve a certain conductivity. In this study, dry etching and wet etching were controlled during field ring etching, which is an important process for forming a ring structure that supports the 3.3 kV breakdown voltage of IGBT, in order to analyze four conditions and form a stable body junction depth to secure the breakdown voltage. The field ring ion implantation process was optimized based on the TEG design by dividing it into four conditions. The wet etching 1-step method was advantageous in terms of process and work efficiency, and the ring pattern ion implantation conditions showed a doping concentration of 9.0E13 and an energy of 120 keV. The p-ion implantation conditions were optimized at a doping concentration of 6.5E13 and an energy of 80 keV, and the p+ ion implantation conditions were optimized at a doping concentration of 3.0E15 and an energy of 160 keV.

• Proceedings of the Korea Water Resources Association Conference
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• 2020.06a
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• pp.30-30
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• 2020

본 연구에서는 여름철에 농업용수(벼농사용)로서 집중적으로 지하수를 사용하는 지역에서 시기별 지하수 사용에 따른 지하수 수질변화를 평가하기 위해 수행되었다. 연구지역은 충남 홍성군 양곡리와 신곡리 일부를 포함하는 면적 2.83 ㎢(283.3 ha)에 해당하는 지역이다. 연구지역 지하수 수질의 공간적 분포 및 시간적 변화 특성 평가를 위하여 2019년 2회(7월, 10월)에 걸쳐 지하수 관정(21개소)에 대하여 조사 및 분석을 수행하였다. 지하수 샘플은 현장에서 온도(T), pH, 용존산소(DO) 및 전기전도도(EC), 산화환원전위(Eh) 등을 측정하였고, 실험실에서 주요 양이온 및 미량원소(Ca, Mg, Na, K, Si, Sr), 음이온(F, Cl, Br, NO₂, NO₃, PO₄, SO₄), 알칼리도, 용존 유기탄소(DOC)와 용존 유기물(DOM) 등을 분석하였다. 지하수 수질조사 결과, 전체의 14~15개소(67~71%)가 Ca-HCO₃ 유형으로 분류되었으며, 다음으로는 Ca-Cl 유형이 4~5개소(19~24%)가 관찰되었다. 얕은 심도의 관정에서 상대적으로 심도가 깊은 관정보다 대부분 성분(TDS, Ca, Mg, Na, K, Cl, SO₄, HCO₃, DOC)에서 높은 농도를 나타내었다. 지하수의 수질자료를 이용하여 다변량통계분석법인 주성분분석(PCA: Principal Components Analysis)과 계층적 군집분석(HCA: Hierachical Cluster Anlaysis)를 수행한 결과, 초기 3개 주요 고유성분(eigenvalue)는 PC1 54.0%, PC2 14.2%, PC3 12.3%로 전체 분산의 88.3%를 설명할 수 있었다. PC1은 Ca, Mg, Na, K, Cl, SO₄, DOC가 주요한 영향 인자였으며 PC2는 HCO₃, NO₃, DO에 영향 받음을 확인하였다. 계층적 군집분석 결과, 연구지역 지하수는 Na-Cl 유형의 C-3 관정을 제외하고는 크게 두 그룹으로 구분되어 졌다. 다변량통계분석의 결과에서도 수리지화학, 동위원소, 용존유기물 등의 특성에서 나타나는 것과 유사한 연구지역의 수질특성을 확인할 수 있었다. 연구지역은 차시기 동안 수질변화는 일부 관정을 제외하고는 유의할 만한 수준으로 관찰되지는 않았고, 지하수 사용에 따른 지하수위 회복도 빠르게 진행되고 있는 것으로 나타났다.

• Analytical Science and Technology
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• v.29 no.1
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• pp.19-28
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• 2016

The objective of this study was to determine the acidification of precipitation in the Jeju area. Precipitation samples were collected from the Jeju area from 2009-2014, and the major ionic species were analyzed. In the regression analysis, through a comparison of ion balance, electric conductivity, and acid fraction, the correlation coefficients showed a good linear relationship within the range of 0.927~0.983. The volume-weighted means of the pH and electric conductivity were 4.9 and 22.7 µS/cm, respectively. The ionic strength of precipitation was 0.27±0.38 mM, indicating about 35.9 % of total precipitation within the pure precipitation criteria. The volume-weighted mean concentrations (ìeq/L) of the ionic species in the precipitation were in the order of Na⁺ > Cl⁻ > nss-SO₄²⁻ > NO₃⁻ > NH₄⁺ > Mg²⁺ > H⁺ > nss-Ca²⁺ > PO₄³⁻ > K⁺ > HCOO⁻ > CH₃COO⁻ > NO₂⁻ > F⁻ > HCO₃⁻ > CH₃SO₃⁻ . The acidification contributions by sulfuric and nitric acids were 54.5 % and 36.5 %, respectively. Meanwhile the acidification contributions by formic and acetic acids were 4.8 % and 4.2 %, respectively. Thus, it was found that the acidification of the precipitation in the Jeju area was mainly due to the inorganic acids. The neutralization factors by NH₃ and CaCO₃ were also 33 % and 20 %, respectively.