• Proceedings of the Korean Vacuum Society Conference
• /
• 2000.02a
• /
• pp.124-124
• /
• 2000

다이아몬드에 버금가는 높은 경도뿐만 아니라 높은 화학적 안정성 및 열전도성 등 우수한 물리화학적 특성을 가진 입방정 질화붕소(cubic boron nitride)는 마찰.마모, 전자, 광학 등의 여러 분야에서의 산업적 응용이 크게 기대되는 재료이다. 특히 탄화물형성원소에 대해 안정하여 철계금속의 가공을 위한 공구재료로의 응용 또한 크게 기대된다. 이 때문에 각종의 PVD, CVD 공정을 이용하여 c-BN 박막의 합성에 대한 연구가 광범위하게 진행되어 많은 성공사례들이 보고되고 있다. 그러나 c-BN 박막의 유용성에도 불구하고 아직 실제적인 응용이 이루어지지 못한 것은 c-BN 박막의 증착직후 급격한 박리현상 때문이다. 본 연구에서는 평행자기장을 부가한 ME-ARE(Magnetically Enhanced Activated Reactive Evaporation)법을 이용한 c-BN 박막의 합성에서 적용한 증착공정 인자들의 변화에 따른 박리특성 고찰과 함께 다층박막화 및 제 3원소 혼입 방법을 적용하여 박리특성 향상 정도를 조사하였다. BN 박막합성은 전자총에 의해 증발된 보론과 (질소+아르곤) 플라즈마의 활성화반응증착(Activated Reactive Evaporation)에 의해 이루어졌다. 기존의 ARE 장치와 달리 열음극(got cathode)과 양극(anode) 사이에 평행자기장을 부가하여 플라즈마의 증대시켜 반응효율을 높였다. 합성실험용 모재로는 p-type으로 도핑된 (100) Si웨이퍼를 30$\times$40mmzmrl로 절단 후, 10%로 희석된 완충불산용액에 10분간 침적하여 표면의 산화층을 제거한 후 사용하였다. 박막실험실에서의 주요공정변수는 기판바이어스 전압, discharge 전류, Ar/N2가스유량비이었다. 합성된 박막의 결정성 분석을 FTIR을 이용하였으며, BN 박막의상 및 미세구조관찰을 위해 투과전자현미경(TEM;Philips EM400T) 분석을 병행하였고, 박막의 기계적 물성 평가를 위해 미소경도를 측정하였다. 박리특성의 고찰은 대기중에서의 자발적 박리가 일어나 90%이상의 박리가 진행된 시점까지의 시간을 측정하였고, 증착직후 박막의 잔류응력 변화와 연관하여 고찰해 보았다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.309.2-309.2
• /
• 2013

Cu(In,Ga)Se2 (CIGS) 박막 태양전지는 일반적으로 Na을 함유하고 있는 소다회유리를 기판으로 사용하여 제작되며, 높은 광전 변환 효율로 인해 많은 연구가 이루어지고 있다. 특히 제조 비용 절감과 양산성 향상을 위해 현재 유연 기판 CIGS 박막 태양전지에 대한 연구가 활발히 이루어지고 있으며, 폴리이미드 기판에서 20.4%의 최고 효율이 보고되었다. 유연 기판은 유리 기판 대비 무게가 가볍기 때문에 유리 기판 태양전지보다 활용도가 높으며, 우주용으로 사용할 경우 단위 무게 당 발생되는 전력이 높은 장점이 있다. 본 연구에서는 폴리이미드 기판을 이용하여 유연 CIGS 박막 태양전지를 제작하였다. 후면 전극 Mo은 DC sputtering으로 증착하였으며, Mo의 증착 압력에 따라 폴리이미드 기판의 잔류 응력과 전기적 특성을 분석하여 증착 압력을 결정하였다. 광흡수층인 CIGS는 다단계 동시 증발 법으로 증착하였으며, 2nd stage 공정온도는 유리 기판 대비 저온인 $475^{\circ}C$로 공정을 진행하였다. 저온공정인 $475^{\circ}C$ 공정에서는 Ga의 함량이 높아질수록 성능이 감소하였으며, Na 공급을 통해 Voc와 FF가 향상되어 성능이 향상됨을 알 수 있었다. 버퍼층 CdS는 습식 공정인 CBD법으로 증착하였으며, 공정변수인 thiourea의 농도와 CdS 박막의 두께 변화를 통해 폴리이미드 기판 CIGS 박막 태양전지에서 CdS 버퍼층의 최적의 조건을 도출하였다. 최종적으로 제작된 폴리이미드 기판 유연 CIGS 박막 태양전지는 반사 방지막 없이 개방전압 0.511V, 단락전류밀도 32.31mA/cm2, 충실도 64.50%, 변환효율 10.65%를 나타내었다.

• Korean Journal of Materials Research
• /
• v.7 no.6
• /
• pp.505-509
• /
• 1997

FRAM(Ferroelectric Random Access memory)에의 응용을 위해 rf magnetron sputtering법을 이용하여 SrB $i_{2}$T $a_{2}$ $O_{9}$(SBT)박막을 증착하였다. 사용된 기판은 Pt/Ti/Si $o_{2}$Si이었으며 50$0^{\circ}C$에서 증착한 후 80$0^{\circ}C$의 산소 분위기 하에서 1시간 동안 열처리하였다. 증착시 증착 압력을 변화시켜 가면서 이에 따른 특성의 변화를 고찰하였다. 박막내의 Bi와 Sr의 부족을 보상하기 위해 20mole%의 Bi $O_{2}$와 30mole%의 SrC $O_{3}$를 과잉으로 넣어 타겟을 제조후 사용하였고 박막들의 두께는 300nm의 두께를 가지며 증착압력에 따라 다른 미세 구조르 보였다. 10mtorr에서 증착한 박막의 조성은 S $r_{0.6}$B $i_{3.8}$Ta/ sub 2.0/ $O_{9.0}$이었다. 이 SBT 박막의 잔류 분극(2 $P_{r}$)과 보전계(2 $E_{c}$)값은 각각 인가 전압 5V에서 18.5 $\mu%C/$\textrm{cm}^2$과 150kV/cm이었고, signal/noise비는 3V에서 4.6을 나타내었다. 5V의 bipolar pulse하에서 $10^{10}$cycle까지 피로 현상이 나타나지 않았으며, 누설 전류 밀도는 133kV/cm에서 약 1x$10^{-7A}$$\textrm{cm}^2$의 값을 보였다.을 보였다.

• Journal of Food Hygiene and Safety
• /
• v.32 no.6
• /
• pp.447-454
• /
• 2017

A new amperometric biosensor has been developed for the detection of hydrogen peroxide ($H_2O_2$). The sensor was fabricated through the one-step deposition of a biocomposite layer onto a glassy carbon electrode at neutral pH. The biocomposite, as a $H_2O_2$ sensing element, was prepared by the electrochemical deposition of a homogeneous mixture of graphene oxide, aniline, and horseradish peroxidase. The experimental results clearly demonstrated of that the sensor possessed high electrocatalytic activity and responded to $H_2O_2$ with a stable and rapid manners. Scanning electron microscopy, cyclic voltammetry, and amperometry were performed to optimize the characteristics of the sensor and to evaluate its sensing chemistry. The sensor exhibited a linear response to $H_2O_2$ in the range of 10 to $500{\mu}M$ concentrations, and its detection limit was calculated to be $1.3{\mu}M$. The proposed sensing-chemistry strategy and the sensor format were simple, cost-effective, and feasible for analysis of "food-grade $H_2O_2$" in food samples.

• Journal of the Microelectronics and Packaging Society
• /
• v.25 no.4
• /
• pp.83-88
• /
• 2018

The electromigration (EM) tests were performed at $150^{\circ}C$ with $1.5{\times}10^5A/cm^2$ conditions in order to investigate the effect of non-conductive film (NCF) trap on the electrical reliability of Cu/Ni/Sn-Ag microbumps. The EM failure time of Cu/Ni/Sn-Ag microbump with NCF trap was around 8 times shorter than Cu/Ni/Sn-Ag microbump without NCF trap. From systematic analysis on the electrical resistance and failed interfaces, the trapped NCF-induced voids at the Sn-Ag/Ni-Sn intermetallic compound interface lead to faster EM void growth and earlier open failure.

• KSCE Journal of Civil and Environmental Engineering Research
• /
• v.26 no.1C
• /
• pp.9-17
• /
• 2006

The numerical analysis to predicting the electrokinetic remediation behavior on unsaturated soil is carried out by aiding HERO, Hanyang Unversity Electrokinetic Remediation program, developed from the finite difference method and in the VISUAL FORTRAN environment. The analysis for the pure kaolinite under saturated conditions is performed on the results of the previous study of Acar (1997). Also the predictions to the characteristics of electrokinetic remediation on unsaturated conditions are performed and the conclusions summarized as follows. First, pH of the electrolyte in the reservoirs is not different with the degree of saturation resulted from the changes in electrical efficiency. But the advance of acid front is increased dependent on the degree of saturation in contrary to the transportation of base front. Second, below the degree of saturation of 83%, which is equivalent to the optimum water content, the removal effect increased with the decreasing of degree of saturation. But it have no effect on the efficiency of removal over the degree of saturation of 83%.

• Journal of the Korean Ceramic Society
• /
• v.40 no.2
• /
• pp.206-211
• /
• 2003

Effects of substrates and buffer layer upon the formation of crystalline phases and ferroelectricity of $YMnO_3$ thin films were investigated. The hexagonal $YMnO_3$ was easily formed on Si(100) while the mixed phases, hexagonal and orthorhombic $YMnO_3$, on $Pt(111)/TiO_2/SiO_2/Si$ substrate. When the $Y_2O_3$ buffer layer of 70 nm thick was inserted between the substrates and the $YMnO_3,$ the c-axis oriented hexagonal single phase formed on both substrates, Si(100) and $Pt(111)/TiO_2/SiO_2/Si$. The leakage current density of the hexagonal $YMnO_3$ thin films was lower than that consisting of mixed phases, hexagonal and orthorhombic. Furthermore the hexagonal $YMnO_3$ with c-axis preferred orientation showed the lowest leakage current density. The remnant polarization from a P-E hysteresis curve for the $YMnO_3$ formed on Si(100) was 0.14 without buffer layer and $0.24_{mu}C/cm^2$ for that with buffer layer. For the $Pt(111)/TiO_3/SiO_3/Si$ substrates, the specimen without $Y_2O_3$buffer layer did not show the hysteresis curve, while the buffer-layered has the remnant polarization of $1.14_{mu}C/cm^2$. It was concluded that the leakage current density and the ferroelectricity for the $YMnO_3$ thin films could be controlled by varying crystalline phases and their preferred orientation which depend on the kind of substrates and whether the $Y_2O_3$buffer layer exist or not.

• Journal of Food Hygiene and Safety
• /
• v.22 no.3
• /
• pp.173-178
• /
• 2007

Children may respond differently to the caffeine from adults because they have different physiologic makeup and are functionally immature in terms of hepatic and renal function; this leads to the slower clearance of caffeine in early life. Therefore, children are often assumed to be more susceptible to caffeine effects. Alarge number of food supplements may interfere with these processes, and therefore caffeine exposure may have more serious consequences for children than for adults, irrespective of sensitivity. However, there has never been a national dietary survey on caffeine intakes in children. The purpose of our study was to identify caffeine intakes and beverage sources of caffeine in a representative sample of children in Busan, Korea. Caffeine intakes were based only on beverages included in the Continuing Surveys of Food Intakes by individuals. The caffeine content of the beverages ranged from 2.8 to 65.2mg/100ml for cola, soft drinks, and teas. Caffeine was not completely absent from caffeine-free colas, juice, and milk. In this study, cola-type beverages were an important dietary source of caffeine in the children. Daily caffeine intake for children was estimated to range from 12.5 to 250 mg/day. In general, the acceptable daily intake (ADI) of caffeine should cover the entire population including children. Therefore, special considerations should be needed regarding the consumption of soft drinks containing caffeine to children below the 12 years of age.

• Journal of Korea Water Resources Association
• /
• v.40 no.9
• /
• pp.697-707
• /
• 2007

In this study, we estimated the PMP(Probable Maximum Precipitation) and its transition in case of the typhoon Rusa which happened the biggest damage of all typhoons in the Korea. Specially, we analysed the moisture maximizing rate under the consideration of meteorological condition based on the orographic property when it hits in Gangneung region. The PMP is calculated by the rate of the maximum persisting 12 hours 1000 hPa dew points and representative persisting 12 hours 1000 hPa dew point. The former is influenced by the moisture inflow regions. These regions are determined by the surface wind direction, 850 hPa moisture flux and streamline, which are the critically different aspects compared to that of previous study. The latter is calculated using statistics program (FARD2002) provided by NIDP(National Institute for Disaster Prevention). In this program, the dew point is calculated by reappearance period 50-year frequency analysis from 5% of the level of significant when probability distribution type is applied extreme type I (Gumbel distribution) and parameter estimation method is used the Moment method. So this study indicated for small basin$(3.76km^2)$ the difference the PMP through new method and through existing result of established storm transposition and DAD(Depth-Area-Duration). Consequently, the moisture maximizing rate is calculated in the moisture inflow regions determined by meteorological fields is higher $0.20{\sim}0.40$ range than that of previous study. And the precipitation is increased $16{\sim}31%$ when this rate is applied for calculation.

• Journal of the Korean Vacuum Society
• /
• v.18 no.2
• /
• pp.141-146
• /
• 2009

PLZT ferroelectric thin films were deposited on Pt/Ti/$SiO_2$/Si substrate with $TiO_2$ buffer layer in between by rf magnetron sputtering method. In order to investigate the effect of Ar/$O_2$ partial pressure ratio on the ferroelectric properties of PLZT thin films, PLZT thin films were deposited at various Ar/$O_2$ partial pressure ratio ; 27/1.5 seem, 23/5.5 seem, 21/7.5 seem and 19/9.5 seem. The crystallinities of PLZT thin films were analyzed by XRD. The surface morphology was observed using FE-SEM. The P-E hysteresis loops, the remanent polarization characteristics and the leakage current characteristics were obtained using a Precision LC. The crystallinity and elaborateness of PLZT thin films were decreased as increasing the oxygen partial pressure ratio. And preferred orientation of PLZT thin films changed from (110) plane to (111) plane. The oxygen partial pressure ratio affects the thin film surface morphology and the ferroelectric properties.