• Title/Summary/Keyword: 복합공진

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Experimental Investigation of Characteristics Change by Kerf-Fill Material between Arrayed Elements of a Piezoelectric Transducer (압전 배열 트랜스듀서의 진동 요소간 kerf 충진 매질에 따른 특성변화의 실험적 고찰)

  • Kim, Jung-Soon;Kim, Moo-Joon;Ha, Kang-Lyeol
    • The Journal of the Acoustical Society of Korea
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    • v.27 no.5
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    • pp.215-220
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    • 2008
  • The kerfs between arrayed piezoelectric elements in a medical ultrasonic transducer or a piezoelectric composite transducer are generally filled by polymeric materials. The boundary condition of the elements for lateral mode vibration is changed according to the kerf-filling materials, so that the resonance frequency for longitudinal mode of the transducer is also varied. In this study, to investigate the resonance frequency variation for an arrayed transducer experimentally, the piezoelectric vibration elements of $14mm{\times}0.22mm{\times}0.44mm$ were fabricated and those were linearly arrayed. And, the resonance frequencies were measured for three cases of kerf-filling condition, non-filling and two different kinds of epoxy filling. Conclusively, it is confirmed that the resonant frequency variation shows the similar tendency with the theoretical one for the longitudinal mode.

Thickness Determination of Ultrathin Gate Oxide Grown by Wet Oxidation

  • 장효식;황현상;이확주;조현모;김현경;문대원
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.107-107
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    • 2000
  • 최근 반도체 소자의 고집적화 및 대용량화의 경향에 다라 MOSFET 소자 제작에 이동되는 게이트 산화막의 두께가 수 nm 정도까지 점점 얇아지는 추세이고 Giga-DRAM급 차세대 UNSI소자를 제작하기 위해 5nm이하의 게이트 절연막이 요구된다. 이런 절연막의 두께감소는 게이트 정전용량을 증가시켜 트랜지스터의 속도를 빠르게 하며, 동시에 저전압동작을 가능하게 하기 때문에 게이트 산화막의 두께는 MOS공정세대가 진행되어감에 따라 계속 감소할 것이다. 따라서 절연막 두께는 소자의 동작 특성을 결정하는 중요한 요소이므로 이에 대한 정확한 평가 방법의 확보는 공정 control 측면에서 필수적이다. 그러나, 절연막의 두께가 작아지면서 게이트 산화막과 crystalline siliconrksm이 계면효과가 박막의 두께에 심각한 영향을 주기 때문에 정확한 두께 계측이 어렵고 계측방법에 따라서 두께 계측의 차이가 난다. 따라서 차세대 반도체 소자의 개발 및 양산 체계를 확립하기 위해서는 산화막의 두께가 10nm보다 작은 1nm-5nm 수준의 박막 시료에 대한 두께 계측 방법이 확립이 되어야 한다. 따라서, 본 연구에서는 습식 산화 공정으로 제작된 3nm-7nm 의 게이트 절연막을 현재까지 알려진 다양한 두께 평가방법을 비교 연구하였다. 절연막을 MEIS (Medim Energy Ion Scattering), 0.015nm의 고감도를 가지는 SE (Spectroscopic Ellipsometry), XPS, 고분해능 전자현미경 (TEM)을 이용하여 측정 비교하였다. 또한 polysilicon gate를 가지는 MOS capacitor를 제작하여 소자의 Capacitance-Voltage 및 Current-Voltage를 측정하여 절연막 두께를 계산하여 가장 좋은 두께 계측 방법을 찾고자 한다.다. 마이크로스트립 링 공진기는 링의 원주길이가 전자기파 파장길이의 정수배가 되면 공진이 일어나는 구조이다. Fused quartz를 기판으로 하여 증착압력을 변수로 하여 TiO2 박막을 증착하였다. 그리고 그 위에 은 (silver)을 사용하여 링 패턴을 형성하였다. 이와 같이 공진기를 제작하여 network analyzer (HP 8510C)로 마이크로파 대역에서의 공진특서을 측정하였다. 공진특성으로부터 전체 품질계수와 유효유전율, 그리고 TiO2 박막의 품질계수를 얻어내었다. 측정결과 rutile에서 anatase로 박막의 상이 변할수록 유전율은 감소하고 유전손실은 증가하는 결과를 나타내었다.의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다

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Study on Thermal Residual stresses and Transmission Characteristics in Loop Type Frequency Selective Surface Embedded Composite Structures (루프 종류의 FSS가 결합된 복합재료 구조의 잔류응력과 전파 투과 특성)

  • Park, Kyoung-Mi;Hwang, In-Han;Chun, Heoung-Jae;Hong, Ic-Pyo;Park, Yong-Bae;Kim, Yoon-Jae
    • Composites Research
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    • v.26 no.5
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    • pp.279-288
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    • 2013
  • In this paper, the delamination and deformed FSS caused by residual stresses in the Loop type FSS embedded composites and the transmission characteristic changes due to deformation of FSS by residual stresses were studied. FSS may have different electromagnetic characteristics depending on the type of element, design variables, and array. Therefore, design variables of square loop FSS embedded composites structures were determined to obtain the transmission characteristic for X-band (8~12 GHz). Then the design variables of other types of loops (triangular loop and circular loop) were determined based on the dimensions of square loop. Thereafter, the residual stresses and transmission characteristics of FSS embedded composite structures with various single and double loop FSS's, and stacking sequence of composite laminates were compared.

An Aircraft CLAS Antenna Design using Composite Magneto-dielectric Material (복합자성유전체를 이용한 항공기 CLAS 안테나 개발)

  • Kim, Yo-Sik;Bae, Ki-Hyoung;Yu, Byung-Gil;Kim, Min-Sung;Park, Chan-Yik
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.41 no.10
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    • pp.820-826
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    • 2013
  • In this paper, a compact and wideband CLAS(Conformal Load bearing Antenna Structure) was studied using smart skin technique. In order to satisfy the electrical performance of the CLAS antenna, the proposed CLAS antenna is composed of conductive mesh, face-sheet, radiator, honeycomb, housing. Especially, radiator is composed of composite magneto-dielectric material and radiating element etched on the PCB (Printed Circuit Board). The radiating element is inserted into the composite magneto-dielectric material and has sloted Folded LP(Log Periodic) structure. By fabricated composite magneto-dielectric, the resonance frequency is decreased and the impedance matching characteristics is improved. We verified that the antenna has wideband characteristics and compact size using the antenna test results.

Design and Piezoelectric properties of 2-2 piezocomposite Ultrasonic Transducers by means of the Finite Element Methode (유한요소해석법을 이용한 2-2형 압전복합재료 초음파 트랜스듀서의 설계 및 압전특성)

  • Park, Jae-Sung;Lee, Sang-Wook
    • 전자공학회논문지 IE
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    • v.48 no.2
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    • pp.40-46
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    • 2011
  • In this study, PZT-5A green sheet were prepared by using tape casting technique, and the piezoelectric properties of PZT-5A by variation of sintering temperature was investigated. After, design and piezoelectric properties of 2-2 piezocomposite ultrasonic transducers by menas of the FEA. The acoustic impedance and piezoelectric charge constant of the 2-2 type piezocomposite transducer decreased proportionally due to the density decrease caused by the PZT volume fraction decrease. The piezocomposite acoustic impedance were 7~3 MRayl between 0.6 and 0.2 allowing it to be used for a ultrasonic transducer. The resonance characteristics and the electro-mechanical coupling factor were the best when the volume fraction PZT was 0.6. The PZT volume fraction shows the fixed value, 0.6~0.65, approximately within the range between 0.2 and 0.6 while it is increased to decreased over the range. The result of the experiment above confirmed that the 2-2 piezoelectric composites could be used as the ultrasonic transducers.

Experimental Evaluation of Fatigue Behavior and Interlaminar Phase in the Lightweight Piezoelectric Ceramic Composite Actuator Using the Ultrasonic C-scan Inspection (초음파 C-스캔 탐상을 이용한 경량 압전세라믹 복합재료 작동기의 피로거동과 계면변화의 관계 연구)

  • Kim Cheol-Woong;Nam In-Chang;Yoon Kwang-Joon
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1332-1336
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    • 2005
  • It could make the LIghtweight Piezoelectric Composite Actuator (LIPCA) damageable by the cyclic large deformation. If the progressive microvoid coalescence of LIPCA interlaminar took place, the decrease of the stiffness and the weakness of stress transmission and fiber bridging effect would make the fatigue characteristics worse suddenly. Therefore, it is required to study the variation of fatigue behavior and interlaminar condition in LIPCA under resonant frequencies. These studies such as the changeable fatigue phase and interlaminar behavior of LIPCA affected by the resonant frequencies should be carried out due to the strong anisotropy of CFRP layer. Hence, these studies are as follows. 1) The residual stresses distribution of interlaminar in LIPCA using the Classical Lamination Theory (CLT). 2) Comparative analysis of interlaminar behavior for the intact LIPCA versus LIPCA containing an artificial delamination during resonant frequency.

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Nondestructive Interfacial Evaluation and Cure Monitoring of Carbon Fiber/Epoxyacrylate Composite with UV and Thermal Curing Using Electro-Micromechanical Technique (Electro-Micromechanical 시험법을 이용한 탄소 섬유 강화 에폭시아크릴레이트 복합재료의 자외선과 열경화에 따른 경화 모니터링 및 비파괴적 계면 평가)

  • 박종만;공진우;김대식;이재락
    • Polymer(Korea)
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    • v.27 no.3
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    • pp.189-194
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    • 2003
  • Interfacial evaluation, damage sensing and cure monitoring of single carbon fiber/thermo setting composite with different curing processes were investigated using electro-micromechanical test. After curing, the residual stress was monitored by measurement of electrical resistance and then compared to various curing processes. In thermal curing case, matrix tensile strength, modulus and interfacial shear strength were higher than those of ultraviolet curing case. The shrinkage measured during thermal curing occurred significantly by matrix shrinkage and residual stress due to the difference in thermal expansion coefficient. The apparent modulus measured in the thermal curing indicated that mechanical and interfacial properties were highly improved. The reaching time to the same stress of thermal curing was faster than that of UV curing case.

Electrical Properties and Electromagnetic Shielding Effectiveness of Milled Carbon Fiber/Nylon Composites (분쇄형 탄소 섬유/나일론 복합재료의 전기적 성질과 전자파 차폐 효율)

  • 김창제;최형도;서광석;윤호규
    • Polymer(Korea)
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    • v.27 no.3
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    • pp.201-209
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    • 2003
  • DC and AC electrical conductivity and electromagnetic interference shielding effectiveness of milled carbon fiber/nylon composites were investigated with the kind of nylon matrix. Percolation transition at which the conductivity is sharply increased was observed at about 7 vol% of milled carbon fiber. Nylon 46 as a matrix was more effective to obtain high electrical conductivity than nylon 6, and the difference in conductivity was occurred by the treatment of coupling agent. Frequency dependence of AC conductivity could be explained by relaxation phenomenon at just below percolation and resonance phenomenon at 40 vol% of carbon fiber, respectively. Negative temperature coefficient phenomenon was found in all composites. Electromagnetic interference shielding effectiveness was increased with the concentration of carbon fiber. At a high conductivity region the return loss was more dominant to the total shielding effectiveness than the absorption loss.

A Study of Natural Frequency in Steel Wind Turbine Tower according to the RNA Model (강재 풍력 터빈 타워의 상부구조 모델링 방법에 따른 고유진동수 특성에 대한 고찰)

  • Lee, Yun-Woo;Choi, Jun-Ho;Kang, Sung-Yong;Kang, Young-Jong
    • Journal of the Korean Society for Advanced Composite Structures
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    • v.5 no.3
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    • pp.37-42
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    • 2014
  • Wind turbine tower has a very important role in wind turbine system as one of the renewable energy that has been attracting attention worldwide recently. Due to the growth of wind power market, advance and development of offshore wind system and getting huger capacity is inevitable. As a result, the vibration is generated at wind turbine tower by receiving constantly dynamic loads such as wind load and wave load. Among these dynamic loads, the mechanical load caused by the rotation of the blade is able to make relatively periodic load to the wind turbine tower. So natural frequency of the wind turbine tower should be designed to avoid the rotation frequency of the rotor according to the design criteria to avoid resonance. Currently research of the wind turbine tower, the precise research does not be carried out because of simplifying the structure of the other upper and lower. In this study, the effect of blade modeling differences are to be analyzed in natural frequency of wind turbine tower.

Influence of Applied Electric Fields and Drive Frequencies on The Actuating Displacement of a Plate-type Piezoelectric Composite Actuator (평판형 압전 복합재료 작동기의 작동 변위에 미치는 인가전압 및 구동주파수의 영향)

  • Goo Nam-Seo;Woo Sung-Choong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.30 no.5 s.248
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    • pp.576-584
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    • 2006
  • The actuating performance test of plate-type piezoelectric composite actuators having different lay-up sequences was experimentally carried out at simply supported and fixed-free boundary conditions. The actuating displacement of manufactured plate-type piezoelectric composite actuator (PCA) was measured using a non-contact laser displacement measurement system. Our results revealed that the actuating displacement with increasing applied electric field at a drive frequency of 1Hz increased non-linearly at the simply supported boundary condition whereas it almost linearly increased at the fixed-free boundary condition. On the other hand, the actuating displacement of piezoelectric composite actuator depended on the applied electric field in a drive frequency range from 1Hz to 10Hz, but its behavior was different in higher drive frequencies beyond 15Hz due to the occurrence of resonance. On the basis of the above experimental results, the bending characteristics of PCAs revealed different behavior depending on applied electric fields, drive frequencies as well as boundary conditions. Therefore, by investigating drive frequencies together with applied electric fields, actuating performance can be easily controlled and PCAs which were fabricated for this study will be sufficiently applied to pumping devices.