• 제목/요약/키워드: $Si_{3}N_{4}

검색결과 2,125건 처리시간 0.03초

시알론을 첨가한 탄화규소 세라믹스의 제조 (Preparation of Silicon Carbide with Sialon)

  • 이종국;박종곤;이은구;김환
    • 한국세라믹학회지
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    • 제37권3호
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    • pp.247-255
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    • 2000
  • Silicon carbide with sialon was prepared by hot pressing and transient liquid-phase sintering, and the effects of sintering atmosphere and starting phases on their microstructural characteristics were investigated. The sintered SiC with Sialon composition(Y2O3, AlN, Si3N4) in argon atmosphere had high sintered density and large aspect ratio. But sintered specimens in nitrogen atmosphere showed low aspect ratio and small grian size, becuase of the retardation of phase transformation and grain growth. Addition of Y-Sialon powder to SiC also retarded the phase transformation to ${\alpha}$-SiC from ${\beta}$-SiC and densification. The SiC specimen prepared from the starting ${\beta}$-SiC powder with Sialon composition(Y2O3, AlN, Si3N4) showed the highest fracture toughness about 6.0 MPa$.$m1/2.

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4H-SiC ${p^+}$접합의 해석적 항복 전압 (Analytical Breakdown Voltage for 4H-SiC ${p^+}$ Junction)

  • 정용성
    • 대한전자공학회논문지SD
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    • 제39권1호
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    • pp.12-17
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    • 2002
  • 본 논문에서는 전자와 정공의 이온화 계수로부터 4H-SiC를 위한 유효 이온화 계수를 cㆍE/sup m/의 형태로 추출하였고, 이 유효 이온화 계수를 이용하여 4H-SiC p/sup +/n 접합에서의 항복시 임계 전계와 항복 전압을 위한 해석적 표현식을 유도하였다. 해석적 항복 전압 및 항복 전계 결과는 10/sup 15/㎝/sup -3/∼10/sup 18/㎝/sup -3/의 농도 범위에서 실험 결과와 비교하여 오차 범위 10% 이내로 잘 일치하였다.

산처리에 의하여 알루미나 함량을 줄인 카올린의 질화거동 (Nitridation Behavior of Kaolin with Reduced Alumina Content Obtained by Acid Treatment)

  • 배원태;정원도;조철구
    • 한국세라믹학회지
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    • 제29권5호
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    • pp.347-356
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    • 1992
  • Various kaolin samples with different alumina content were prepared from calcined admixture of kaolin and ammonium sulfate by varying the treatment time in sulfuric acid. Samples were nitridated under N2 or N2-H2 atmosphere with changing the amount of added carbon, the reaction time and temperature. As the alumina content lowered, the size of kaolin particles decreased and the specific surface area increased. XRD analysis indicated that ${\alpha}$-quartz remained by decomposition of halloysite and meta-halloysite. Experimental results of nitridation behavior are summerized as follows; 1) Nitridation under N2 atmosphere. With the increase of C/SiO2 ratio and with the decrease of Al2O3 content, disappearance of XRD pattern peaks of mullite, ${\alpha}$-quartz and ${\alpha}$-Al2O3 were accelerated at 1300$^{\circ}C$. SiC was the main phase in the reaction product of acid-treated kaolin samples nitridated at 1300$^{\circ}C$ for 10 hours regardless of C/SiO2 ratio. But the XRD peak intensities of ${\beta}$-Si3N4, ${\beta}$-sialon and SiC did not show much difference when untreated raw kaolin was fired at the same condition. When the ratio of C/SiO2 was 3.5, ${\beta}$-sialon and ${\beta}$-Si3N4 existed in the reaction product of about 22% alumina containing kaolin sample fired at 1350$^{\circ}C$ for 7 hours. Only ${\beta}$-sialon existed in the same sample fired at 1400$^{\circ}C$ for 10 hours. ${\beta}$-sialon was obtained from all of the acid-treated kaolin samples fired at 1400$^{\circ}C$ for 40 hours, but AlN and SiC remained in the untreated kaolin sample. Z value of the ${\beta}$-sialon obtained from the 22% alumina containing kaolin sample fired at 1400$^{\circ}C$ for 40 hours was about 1.3(XRD) and 1.5(EDS). 2) Nitridation under 80N2+2OH2 mixed gas atmosphere with the C/SiO2 ratio of 1 Mullite was not found, but ${\alpha}$-Si3N4, and ${\beta}$-sialon were present in the reaction product of about 22% alumina containing kaolin sample fired at 1300$^{\circ}C$ for 10 hours. When untreated kaolin sample was nitridated at the same condition, mullite remained. AlN and SiC were not found in the reaction product of about 22% alumina containing kaolin sample fired at 1350$^{\circ}C$ for 5 hours. On the other hand, AlN and SiC remained in the product of untreated kaolin fired at the same condition.

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전기화학 공정을 이용한 질화규소 기판 상의 금속 전극 형성에 관한 연구 (Formation of Metal Electrode on Si3N4 Substrate by Electrochemical Technique)

  • 신성철;김지원;권세훈;임재홍
    • 한국표면공학회지
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    • 제49권6호
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    • pp.530-538
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    • 2016
  • There is a close relationship between the performance and the heat generation of the electronic device. Heat generation causes a significant degradation of the durability and/or efficiency of the device. It is necessary to have an effective method to release the generated heat. Based on demands of the printed circuit board (PCB) manufacturing, it is necessary to develop a robust and reliable plating technique for substrates with high thermal conductivity, such as alumina ($Al_2O_3$), aluminium nitride (AlN), and silicon nitride ($Si_3N_4$). In this study, the plating of metal layers on an insulating silicon nitride ($Si_3N_4$) ceramic substrate was developed. We formed a Pd-$TiO_2$ adhesion layer and used APTES(3-Aminopropyltriethoxysilane) to form OH groups on the surface and adhere the metal layer on the insulating $Si_3N_4$ substrate. We used an electroless Ni plating without sensitization/activation process, as Pd particles were nucleated on the $TiO_2$ layer. The electrical resistivity of Ni and Cu layers is $7.27{\times}10^{-5}$ and $1.32{\times}10^{-6}ohm-cm$ by 4 point prober, respectively. The adhesion strength is 2.506 N by scratch test.

광양만의 유기물 증가 환경에서 주요오염원과 오염원의 영향권

  • 이영식;강창근;최용규;이상용
    • 한국환경과학회:학술대회논문집
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    • 한국환경과학회 2006년도 학술발표회 발표논문집
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    • pp.269-272
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    • 2006
  • 유기물 증가에 미치는 환경인자를 중심으로 그 수평분포 특성, 원인, 주요오염원의 영향권에 대하여 검토하기 위해 표층 해수와 표층 퇴적물을 조사하였으며, 그 결과를 요약하면 다음과 같다. 유기물변동에 영향을 미치는 인자에 대한 주요 오염원은 크게 섬진강과 동천 등의 담수, 광양시 생활하수, 여수산업단지로 크게 나누어볼 수 있었다. 해수와 퇴적물의 환경인자에 대한 수평분포 특성과 해수의 흐름 등을 고려하여 이들 주요 오염원의 영향권을 구분한 결과, (I) 섬진강 담수의 영향을 많이 받는 해역, (II) 광양시와 동천의 영향이 큰 해역, (III) 여수 산업단지의 영향을 많이 받는 해역으로 나누어졌다. 그리고, 오염원의 영향권별 수질환경인자의 특성으로는 섬진강 담수의 영향을 많이 받는 해역은 낮은 염분, 높은 농도의 $NO_3$-N과 $SiO_2$-Si, 담수와 생활하수의 영향이 큰 해역은 낮은 염분, 높은 농도의 $NO_3$-N, $NH_4$-N, $SiO_2$-Si, 여수 산업단지의 영향을 많이 받는 해역은 표층해수의 경우 높은 수온, 높은 농도의 $NH_4$-N과 $PO_4$-P, 퇴적물의 경우 높은 농도의 $NH_4$-N, $PO_4$-P, $SiO_2$-Si로 특징지울 수 있을 것으로 보인다.

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Si3N4-코팅 유/무기 복합 분리막을 통한 리튬이온전지용 분리막의 제조 및 평가 (Fabrication and Evaluation of Si3N4-coated Organic/inorganic Hybrid Separators for Lithium-ion Batteries)

  • 여승훈;손화영;서명수;노태욱;김규철;김현일;이호춘
    • 전기화학회지
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    • 제15권1호
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    • pp.48-53
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    • 2012
  • 리튬 이차전지의 대표적인 분리막인 polyethylene(PE) 분리막은 열에 의한 수축 및 기계적 파열의 단점을 가지고 있다. 본 연구에서는 이러한 기존 PE 분리막을 개선하기 위해 $Si_3N_4$ 코팅 분리막 (SCS, Silicon-nitride Coated Separator)을 제작하였다. $Si_3N_4$ 코팅이 분리막의 열적/기계적 수치안정성, 이온전도도, 및 전지의 출력 특성에 미치는 영향을 알아보았다. $Si_3N_4$ 분말을 polyvinylidene fluoride(PVdF) 결착재를 이용하여 PE 분리막의 한 쪽 면에 10 ${\mu}m$ 두께로 코팅하여 SCS를 제작하였다. SCS는 PE 분리막보다 $100{\sim}150^{\circ}C$에서 우수한 열적안정성을 나타냈으며, 특히 $150^{\circ}C$에서의 수축률은 10~20% 감소를 보였다. 또한, SCS의 인장강도는 PE 분리막에 비해 증가를 보였다. SCS는 PE 분리막에 비해 다소 낮은 이온 전도도를 보였지만, $LiCoO_2$/Li 코인전지의 C-rate(0.2~3C) 특성 평가에서는 유사한 결과를 보였다.

SiC계 세라믹 절삭공구의 절삭특성 평가 Part 2 : SiC계 세라믹 절삭공구의 수명곡선과 절삭력 특성 (Cutting Characteristics of SiC-based Ceramic Cutting Tools Part 2 : Tool Life and Cutting Force Characteristics of SiC-based Ceramic Cutting Tools)

  • 박준석;김경재;권원태;김영욱
    • 한국정밀공학회지
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    • 제18권9호
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    • pp.89-95
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    • 2001
  • Ceramic tool has to equip with not only high toughness and strength but also low thermal expansion and good thermal conductivity which leads to the high thermal shock resistance. These characteristics make it have longer tool life under thermal stress condition. In this study, commercial Si$_3$N$_4$ceramic cutting tool and home-made SiC based ceramic cutting tools which have different sintering time and chemical composition are tested under various cutting speed and the feed rate increase, the cutting force and the flank wear growth ratio increase, too. The performance of home-made SiC based ceramic cutting tool shows the possibility to be a new ceramic tool.

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하동카올린으로부터 $\beta$-Sialon의 합성 (Synthsis of $\beta$-Sialon from Hadong Pink Kaolin)

  • 이홍림;이형직
    • 한국세라믹학회지
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    • 제21권1호
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    • pp.11-18
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    • 1984
  • $eta$-Sialon synthesis was investigated via the simultaneous reduction and nitridation of Hadong Pink Kaolin using the graphite as a reducing agent at 135$0^{\circ}C$ under 80% $N_2-20%H_2$ atmosphere. When Hadong Pink Kaolin-graphite-silicon nitride seed(molar ratio ; $SiO_2:C:Si_3N_4$=1;3.5:0.05) mixture was heated at 135$0^{\circ}C$ for as long as 20h in 80%$N_2-20%H_2$ atmosphere a homogeneous $eta$-Sialon$(Si_{3.5}Al_{2.5}O_{2.5}N_{2.5})$ was mainly formed together with a small amount of $\alpha$-$Si_3N_4$.

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4H-SiC 표면에서 AFM의 산화 패턴 제작 (AFM fabrication of oxide patterns on 4H-SiC surface)

  • 조영득;방욱;김상철;김남균;구상모
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.64-64
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    • 2009
  • Atomic force microscopy (AFM) fabrication of oxide patterns is an attractive technique for nanoscale patterns and related device structures, SiC exhibits good performance in high-power, high-frequency, and high-temperature conditions that is comparable to the performance of Si. The AFM fabrication of oxide patterns on SiC is important for electronic applications. However, there has not been much reported investigations on oxidation of SiC using AFM. We achieved the local oxidation of 4H-SiC using the high loading force of ~100 nN, although the oxidation of SiC is generally difficult mainly due to the physical hardness and chemical inactivity. All the experiments were performed using atomic force microscopy (S.I.S. GmbH, Germany) with a Pt/Ir-coated Si tip at ~40% humidity and room temperature. The spring constant and resonance frequency of the tip were around ~3 N/m and ~70 kHz. We fabricated oxide patterns on n-type 4H-SiC ($\sim10^{19}/cm^3$) and n-type Si ($\sim1.9\times10^{16}/cm^3$). In summary, we demonstrated that the oxide patterns can be obtained over the electric field of ${\sim}\times10^7 V/cm$ and the high loading force using the tip as a cathode. The electric field transports the oxyanions (OH-) to the positively biased surface.

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$Al_2O_3$/SiC Hybrid-Composite의 제조 (Fabrication of $Al_2O_3$/SiC Hybrid-Composite)

  • 이수영;임경호;전병세
    • 연구논문집
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    • 통권26호
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    • pp.103-112
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    • 1996
  • $Al_2O_3/SiC$ Hybrid-Composite이 일반적인 분말공정에 의하여 제조되었다. 소결시 $\gamma-Al_2O_3에서 $\alpha-Al_2O_3$로의 전이에 seed역할을 하는 $\alpha-Al_2O_3의 첨가는 균일한 미세구조를 발달시켜 강도의 증진을 가져왔다. nano size의 SiC의 첨가는 $Al_2O_3$의 소결성과 입성장에 영향을 미쳐 파괴강도의 증진을 가져왔다. $Al_2O_3/SiC$ nano-Composite에 SiC plates의 첨가는 파괴강도의 감소를 가져왔지만, 상대적으로 파괴인성은 증진되었다. SiC plates에 nitride (BN, $Si_3N_4$ 코팅을 할 경우 crack deflection을 더욱 유발하여 파괴인성이 증진되었다.

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