대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2004년도 춘계학술대회
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- Pages.792-797
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- 2004
편심형 MEMS 자이로스코프의 동적 모델링 및 해석
Dynamic Modeling and Analysis of an Eccentric MEMS Gyroscope
- 발행 : 2004.04.28
초록
Dynamic modeling of an eccentric MEMS gyroscope is presented and the dynamic characteristics of the gyroscope are investigated with the modeling method. It is found that the eccentricity of the MEMS gyroscope affects the dynamic characteristics significantly. Different from conventional MEMS gyroscopes, the zero-rate output is significantly reduced in this gyroscope. To obtain general guidelines of the gyroscope design, dimensionless parameters are first identified and the effects of the parameters on the gyroscope performance measures are investigated.
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