• Journal of the Korean institute of surface engineering
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• v.32 no.3
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• pp.239-243
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• 1999

At Present, 200mm wafer technology is being applied for commercial fabrications of 64, 128, and 256 M DRAM devices, and 300mm technology will be evolved for 1G DRAM devices in the early 21th century, recognizing limitations of several process technologies. In particular recognition has been realized in harmful effects of surface contamination of trace metals introduced during devicing processes. Such a guide line for surface metal contamination has been proposed as 1E9 and 1E10 atoms/$\textrm{cm}^2$ of individual metal contamination for wafering and devicing of 1G DRAM, respectively, and so its measurement limit should be at least 1E8 atoms/$\textrm{cm}^2$. The detection limit of present measurement systems is 2E9 atoms/$\textrm{cm}^2$ obtainable with TRXFA(Total Reflection X-Ray Fluorescence Analysis). TRXFA is nondestructive and the simplest in terms of operation, and it maps the whole wafer surfaces but needs detection improvement. X-Ray intensity produced with synchrotron accelerator is much higher than that of conventional X-ray sources by order of 4-5 magnitudes. Hence theoretically its reactivity with silicon surfaces is expected to be much higher than the conventional one, realizing improvement of detection limit. X-ray produced with synchrotron accelerator is illuminated at a very low angle with silicon wafer surfaces such as 0.1 degree and reflects totally. Hence informations only from surface can be collected and utilized without overlapping with bulk informations. This study shows the total reflection phenomenon and quantitative improvement of detection limit for metallic contamination. It is confirmed that synchrotron X-ray can be a very promising alternative for realizing improvement of detection limit for the next generation devices.

• The Journal of Advanced Prosthodontics
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• v.9 no.6
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• pp.432-438
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• 2017

PURPOSE. The purpose of this study was to evaluate the in vitro validity of quantitative light-induced fluorescence-digital (QLF-D) and laser fluorescence (DIAGNOdent) for assessing proximal caries in extracted premolars, using digital radiography as reference method. MATERIALS AND METHODS. A total of 102 extracted premolars with similar lengths and shapes were used. A single operator conducted all the examinations using three different detection methods (bitewing radiography, QLF-D, and DIAGNOdent). The bitewing x-ray scale, QLF-D fluorescence loss (${\Delta}F$), and DIAGNOdent peak readings were compared and statistically analyzed. RESULTS. Each method showed an excellent reliability. The correlation coefficient between bitewing radiography and QLF-D, DIAGNOdent were -0.644 and 0.448, respectively, while the value between QLF-D and DIAGNOdent was -0.382. The kappa statistics for bitewing radiography and QLF-D had a higher diagnosis consensus than those for bitewing radiography and DIAGNOdent. The QLF-D was moderately to highly accurate (AUC = 0.753 - 0.908), while DIAGNOdent was moderately to less accurate (AUC = 0.622 - 0.784). All detection methods showed statistically significant correlation and high correlation between the bitewing radiography and QLF-D. CONCLUSION. QLF-D was found to be a valid and reliable alternative diagnostic method to digital bitewing radiography for in vitro detection of proximal caries.

• Korean Journal of Food Science and Technology
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• v.44 no.4
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• pp.484-487
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• 2012

A discrimination technique for domestic and imported Scutellaria baicalensis was developed using an energy dispersive X-ray fluorescence spectrometer (ED-XRF). Mineral content ratios, of a total of 43 species, including P, S, Cl, K, Ca, Mn, Fe, Cu, and Zn, were measured among 204 samples. Macro element content ratios and trace element content ratios were determined using the standardless fundamental parameters (SLFP) analysis. Inorganic element ratios of P, S, K, Ca, Cl, Mn, and Fe were significantly different between domestic and imported samples. The result from the canonical discriminant analysis showed that the accuracy of geographical origin discrimination was 95.15%; the correlation coefficient was 0.888. It was concluded that this technique could be used as a useful method in discriminating the geographical origins between domestic and imported Scutellaria baicalensis.

• Journal of the Mineralogical Society of Korea
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• v.19 no.4 s.50
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• pp.363-381
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• 2006

Mineral compositions of granitic rocks from Geochang, Pocheon, Iksan, and China were obtained by the modal analysis, CIPW norm calculations, and Rietveld quantitative analysis for stone specification of the Geochang granitic rocks. The Geochang granitic rocks show grey to dark in color and medium grained porphyritic texture. They mainly consist of quartz, plagioclase, alkali feldspar, and biotite. Among three different method for determining the mineral compositions of granitic rocks, normative compositions using X-ray fluorescence data are not appropriate for representing real mineral composition. Rietveld quantitative analysis using X-ray powder diffraction data is proved better method to determine exact mineral compositions than modal analysis using microscopic observation. Q-A-P diagram shows that the Geochang granitic rocks are typical granodiorite, whereas the granitic rocks of Pocheon, Iksan, and China are monzogranite, monzogranite to granodiorite, and granodiorite, respectively. Compared to China ones, the Geochang granitic rocks are nearly close to each other in mineral composition.

• Journal of Environmental Science International
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• v.4 no.5
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• pp.535-542
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• 1995

Monitoring of lead concentration in the ambient alt was performed in Kyung Hee University-Suwon Campus over a period of 5 year from November 1989 to September 1994 using a cascade impactor having 9 size stages. Lead level was analyzed by x-ray fluorescence. The lead levels have been extensively examined to identify annual trends, seasonal variations, and size distribution of lead concentration. Even though consumption of leaded gasoline has been decreased, the levels have not significantly changed during the sampling period. Probably other sources like fossil fuel emission and refuse incinerator will be potential contributors. The seasonal variation showed that Pb concentration significantly increased in the winter season and decreased in the summer season. The size distributions of Pb were observed to be unimodal distribution of the 1.1~2.1 $mu extrm{m}$ sixte ranges in the winter and 0.65~1.1 ${\mu}{\textrm}{m}$ in the summer.

• Journal of Environmental Science International
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• v.4 no.5
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• pp.149-149
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• 1995

Monitoring of lead concentration in the ambient alt was performed in Kyung Hee University-Suwon Campus over a period of 5 year from November 1989 to September 1994 using a cascade impactor having 9 size stages. Lead level was analyzed by x-ray fluorescence. The lead levels have been extensively examined to identify annual trends, seasonal variations, and size distribution of lead concentration. Even though consumption of leaded gasoline has been decreased, the levels have not significantly changed during the sampling period. Probably other sources like fossil fuel emission and refuse incinerator will be potential contributors. The seasonal variation showed that Pb concentration significantly increased in the winter season and decreased in the summer season. The size distributions of Pb were observed to be unimodal distribution of the 1.1∼2.1 $mu extrm{m}$ sixte ranges in the winter and 0.65∼1.1 ㎛ in the summer.

• Journal of Environmental Science International
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• v.25 no.1
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• pp.11-21
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• 2016

The soil contamination by heavy metals in playgrounds of kindergartens in Vilnius city is analysed in this article. The aim of this research is to investigate and evaluate soil contamination by heavy metals in playgrounds of kindergartens in different territories of Vilnius city. Concentrations of heavy metals were measured using Thermo Fisher Scientific Niton$^{(R)}$ XL2 X-ray fluorescence spectrometer. Maximum allowable and background concentrations that are given in Lithuanian hygiene standard and Lithuania geochemical atlas are used to compare and evaluate concentrations of heavy metals. Concentrations of heavy metals and their spatial distribution were analysed in order to exclude the most contaminated areas relating with different functional areas of the city. Geo-statistical analysis and maps of spatial distribution were developed using IDW interpolator in ArcMap software. Detail soil surveys helps to assess the extent of anthropogenic impact in different parts of the city which can be harmful to the soil ecosystem and human health. Such researches can help to change or select different function for city areas in territorial planning process.

• Journal of Environmental Science International
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• v.25 no.1
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• pp.1-10
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• 2016

Bottom sediment pollution with heavy metals of the Sventoji River in Ukmerge, Lithuania using X-ray fluorescence spectrometry is analyzed in this article. During the research, qualitative and quantitative parameters of heavy metal concentrations and their distribution were investigated. This article presents obtained results of study, where bottom sediment samples were examined from both shores of the river of Sventoji. During this research, received data was treated using GIS software, which helped to interpolate the data of concentrations into the research polygon of the river. GIS software also helped to evaluate the urban runoff influence to the bottom sediment quality and exclude sources of pollution. The runoff dischargers which transport surface wastewater to the river were registered before sampling. At the mouth of streams, flowing into the river of Sventoji, additional samples were taken. After comprehensive river bottom sediment research there is a possibility to assess the extent of anthropogenic activity and its impact on the river ecosystem and human health.

• Journal of the Korean Geotechnical Society
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• v.33 no.12
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• pp.127-139
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• 2017

Site investigation including boring and various in-situ borehole test (Pressuremeter test, Borehole shear test, Downhole test, Suspension PS logging, Density logging) and X-ray fluorescence analysis for rock core sample were performed to estimate geotechnical properties and weathering degree of weathered granite rock in Goyang. Deformation modulus, shear strength parameter and shear wave velocity estimated through in-situ borehole test had a tendency to increase with depth. And several chemical weathering indices evaluated by X-ray fluorescence analysis had a general tendency of reducing weathering degree in accordance with depth. Also, relationship between VR determined as a representative weathering index and the geotechnical properties was analyzed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.2
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• pp.131-136
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• 2000

We have investigated the slurry induced metallic contaminations of undoped and doped silicate oxides surface on CMP cleaning process. The metallic contaminations by CMP slurry were evaluated in four different oxide films, such as plasma enhanced tetra-ethyl-orthyo-silicate glass(PE-TEOS), O3 boro-phos-pho-silicate glass(O3-BPSG), PE-BPSG, and phospho-silicate glass(PSG). All films were polished with KOH-based slurry prior to entering the post-CMP cleaner. The Total X-Ray fluorescence(TXRF) measurements showed that all oxide surfaces are heavily contaminated by potassium and calcium during polishing which is due to a CMP slurry. The polished O3-BPSG films presented higher potassium and calcium contaminations compared to PE-TEOS because of a mobile ions gettering ability of phosphorus. For PSG oxides, the slurry induced mobile ion contamination increased with an increase of phosphorus contents. In addition, the polishing removal rate of PSG oxides had a linear relationship as a function of phosphorus contents.