• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.246-246
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• 2010

As the trench width in the interconnect technology decreases down to nano-scale below 50 nm, superconformal gap-filling process of Cu becomes very critical for Cu interconnect. Obtaining superconfomral gap-filling of Cu in the nano-scale trench or via hole using MOCVD is essential to control nucleation and growth of Cu. Therefore, nucleation of Cu must be suppressed near the entrance surface of the trench while Cu layer nucleates and grows at the bottom of the trench. In this study, suppression of Cu nucleation was achieved by treating the Ru barrier metal surface with capacitively coupled hydrogen plasma. Effect of hydrogen plasma pretreatment on Cu nucleation was investigated during MOCVD on atomic-layer deposited (ALD)-Ru barrier surface. It was found that the nucleation and growth of Cu was affected by hydrogen plasma treatment condition. In particular, as the plasma pretreatment time and electrode power increased, Cu nucleation was inhibited. Experimental data suggests that hydrogen atoms from the plasma was implanted onto the Ru surface, which resulted in suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. Due to the hydrogen plasma treatment of the trench on Ru barrier surface, the suppression of Cu nucleation near the entrance of the trenches was achieved and then led to the superconformal gap filling of the nano-scale trenches. In the case for without hydrogen plasma treatments, however, over-grown Cu covered the whole entrance of nano-scale trenches. Detailed mechanism of nucleation suppression and resulting in nano-scale superconformal gap-filling of Cu will be discussed in detail.

• Journal of Welding and Joining
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• v.28 no.5
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• pp.75-79
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• 2010

The Remote welding system(RWS) using $CO_2$ laser equipment has focusable distance of laser beam longer than 800 mm from workpiece and can deflect the laser beam by the scanner mirrors very rapidly. In the case of normal welding system based on robot, there is a limit to move the shortest path in short time and this causes interference between robot and workpiece. On the other hand, RWS is the optimized equipment to get big merits with advanced sequence of welding and short cycle time. However, there is still a pending task such as the control of plasma in the welding process of thick sheets therefore, it requires high power laser beam because of the absence of assist gas equipment in itself. In this study, high-tensile steel plates were overlap welded with $CO_2$ RWS for the production of car body and the influence of penetration depth according to the existence of assist gas was analyzed. Excellent tensile strength with enough width of molten zone independent to penetration depth was observed under welding condition with 3.6 kW laser power and 2.8 m/min welding speed without assist gas. Finally, the proto-type automotive parts were produced by applying the deduced optimal welding condition.

• The Journal of Korean Physical Therapy
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• v.19 no.1
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• pp.11-22
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• 2007

Purpose: The purpose of this study were to analysis the effect on change of spinal neuron excitability during gait training of hemiplegia patients by the functional electrical stimulation. Methods: Thirty six hemiplegia patients participated in this study. Stimulation conditions of FES were pulse rate 35pps, pulse width $250{\mu}s$, and on-time 0.3 second, treatment hour was 30 min. and treatment period was once a day for five days a week through six weeks. For functional evaluations before and after treatment, Modified Ashworth Scale (MAS), active range of motion (AROM), Hmax threshold, H/Mmax ratio were measured and the following conclusions were obtained. Results: Functional evaluation showed significant changes in experimental group as MAS(p<0.01), AROM(p<0.001), compared to control group. In spinal neuron excitability evaluation, change of Hmax threshold was significantly reduced in both non weight bearing (p<0.001) and bearing condition (p<0.05), H/Mmax ratio was significantly reduced in non weight bearing (p<0.05) and bearing condition (p<0.05). Conclusion: In conclusion, application of FES to hemiplegia patients in recovery stage during gait training improved mitigation of muscular spasticity, balance adjustment and moving ability and it was interpreted that it was caused by mitigation of muscular spasticity by the spinal neuron excitability.

• Journal of Wetlands Research
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• v.13 no.2
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• pp.363-375
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• 2011

Recently, Water quiality of urban river largely have gotten better by virtue of sewer pipe laying and sewage treatment plants construction. or the various contaminants which is flowed in into river have generated underwater ecosystem disturbance and red tide by lack of sewage and waste water disposal facilities. With tidal river, taehwa river of ulsan metropolitan city has large river width and gradual stream bed gradient at the dry and storage period. Moreover, the flow is paralyzed due to the bridge pier protection work, consist of the mat foundation which is about 1.2km from two bridge and the contaminant is accumulated. it is caused by of the red tide generated from the several years or it activates. In this study, When flow area is largest by changing independent footing of bridge pier of two bridges and using RMA2 model, we hydraulically analyzed a variable breadth of velocity and discharge. Consequently, flow rate increased the maximum 103%, discharge was exposed to increase the maximum 61%. Directly this cannot extinguish the red tide but suppresses the red tide occurrence or can reduce. And it is determined to prevent the depositioning of the contaminant and can control fundamentally the red tide occurrence cause.

• Applied Chemistry for Engineering
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• v.25 no.6
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• pp.564-569
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• 2014

Zirconia nanoparticles were synthesized by hydrothermal process, and experimental parameters such as reaction temperature, reaction time, kind and concentration of precipitator, kind of precursor were varied. Particle sizes and crystalline phases of each synthesized nanoparticles were analyzed with X-ray diffraction and FE-scanning electron microscope (SEM). The particle size and crystallization of zirconia increased with increasing concentration of precipitator. The growth rate of particle sizes when NaOH as a precipitator was used also increased more than that of KOH. Therefore, the use of KOH rather than NaOH was more effective in the control of particle sizes. An amorphous zirconia nanoparticle was found in 4 h of hydrothermal reaction, but the monoclinic zirconia nanoparticle was found in 8 h and over of hydrothermal reaction, and the width of nanoparticles was slightly slimmed and the length of nanoparticles was slightly extended with increasing reaction time. The smallest particle size was produced at the same synthesis condition when zirconium chloride among the precursors such as zirconium (IV) acetate, zirconium nitrate and zirconium chloride was used.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2004.04a
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• pp.189-195
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• 2004

Recently, bridge design and／or construction works on marine traffic route are undertaking in Korean waters. Naturally the ship-handling difficulty and hazardous to navigation should be increased when the bridge is constructed on the shipping route. Unfortunately, however, it is impossible or not desirable to secure wide enough bridge span width due to geographical condition or economic point of view. Therefore this study aims to propose the consideration factors during the bridge design process, and the traffic volume control, speed limit and other alternative measures to secure traffic safety using marine traffic flow simulation technique.

• The Journal of Engineering Geology
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• v.4 no.2
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• pp.169-186
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• 1994

A GIS technique was developed for aggregate resources management and transport route analysis. In the study, the management of aggregate resources deals with resources evaluation and control of aggregate supply. The computer system was specially designed for this analysis on the basis of relational database model, and it was named ARIS(Aggregate Resources Information System). A Vector database for this study area of Chungcheong - Do was established for analysis of ARIS. In network analysis, there are many essential elements such as road name, speed limit and width, turns and stops etc. Impedance was also measured for the resistance against transportation of aggregate resources. Actually, the impedances are attributes of arcs, turns and stops. Finally, the feasibility of ARIS was tested to use as a decision making tool of aggregate resources management.

• Journal of Biomedical Engineering Research
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• v.16 no.4
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• pp.555-561
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• 1995

In this paper, the O-Ring Measurement System (O-R MS) has been designed to supplement such subectivity and apply to the diagnosis by constitution. A single chip microprocessor of Intel MCS-51 family has been used to control the O-R MS and process data with real time, and the O-R MS could measure the minute muscular strength, expanded width between fingers, and time of the measurement. Therefore the objective constitutional diagnosis is possible by the O-R MS. As a clinical testing for estimating credibility of O-R MS, the acupuncture points representing the constitution has been stimulated using a semiconductor laser stimulator and measure the muscular strength by the O-R MS. The result of clinical testing has been shown that the constitutional diagnosis with the O-R MS is proved highly precision of 96% and it is expected that the O-R MS can be used practically for the objective constitutional diagnosis.

• Journal of Korean Academy of Oral and Maxillofacial Radiology
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• v.1 no.1
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• pp.29-37
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• 1971

Modern orthodontics implies not only occlusal excellence, but also the positioning of teeth to produce optimal facial harmony for the individual patients. Several methods have been used in the study of facial height, width and depth were made from living subjects. These methods, however, complicate to control the subjects, therefore many investigators have used profile cephalometric technics. Practically, cephalometric technics were used m orthodontic treatment, maxillo-facial surgery and anthropometric studies. Author was studied to investigate the normal standards of soft tissue profile in Korean adolescences. The subjects consisted of 53 males and 54 females from 17 to 22 years of age and with normal occlusion and acceptable profile. Aluminum filter was designed to obtain both hard and soft tissue structures on a single film. Eight profile landmarks were plotted and drawn on the tracings of all cephalograms and eighteen depth, height and angles were measured from each landmarks of the cephalograms. The following conclusIOns were obtained from this studies; 1. Total facial convexity was 170. 75 in males and females samples and lower facial and: labiomandibular convexity were each of 141.44, 171.05. 2. Maxillary and mandibular sulcus angulations were 137.61, 129.52 and upper and lower lip inclinations were each of 123.26 and 49.56 in male and females. 3. Soft tissue depth of several points were as follows; Subnasale 18.74㎜ in males and 16.65㎜ in females Pogonion 13.40㎜ in males and 13.07㎜ in females upper lip 14.06㎜ in males and 11.91㎜ in females . lower lip 15.46㎜, 13.63㎜ in males and females 4. The protrusion of nose were 16.28㎜ in males and 15.56㎜ in females 5. The vertical length of upper and lower lips were 25.67㎜, 52.96㎜ and the lip posture was indicated 93.43 per cent (closed state) in centric occlusions.

• Polymer(Korea)
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• v.30 no.5
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• pp.407-411
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• 2006

The SiC-based ceramic nanopatterns were prepared by placing polydimethylsiloxane (PDMS) mold from DVD master on the spincoated polyvinylsilaeane (PVS) or allylhydridopolycaybosilane (AHPCS) as ceramic precursors to fabricate line pattern via UV-nanoimprint lithography (UV-NIL), and subsequent pyrolysis at $800^{\circ}C$ in nitrogen atmosphere. As the dimensional change of polymeric and ceramic patterns was comparatively investigated by AFM and SEM, the shrinkage in height was 38.5% for PVS derived pattern and 24.1% for AHPCS derived pattern while the shrinkage in width was 18.8% for PVS and 16.7% for AHPCS. It indicates that higher ceramic yield of the ceramic precursor resulted in less shrinkage, and the strong adhesion between the substrate and the pattern caused anisotropic shrinkage. This preliminary work suggests that NIL is a promissing route for fabricating ceramic MEMS devices, with the development on the shrinkage control.