• 제목/요약/키워드: wax removal

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Removal of Organic Wax and Particles on Final Polished Wafer by Ozonated DI Water

  • Yi, Jae-Hwan;Lee, Seung-Ho;Kim, Tae-Gon;Lee, Gun-Ho;Choi, Eun-Suck;Park, Jin-Goo
    • 한국재료학회지
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    • 제18권6호
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    • pp.307-312
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    • 2008
  • In this study, a new cleaning process with a low cost of ownership (CoO) was developed with ozonated DI water ($DIO_3$). An ozone concentration of 40 ppm at room temperature was used to remove organic wax film and particles. Wax residues thicker than $200\;{\AA}$ remained after only a commercial dewaxer treatment. A $DIO_3$ treatment in place of a dewaxer showed a low removal rate on a thick wax layer of $8000\;{\AA}$ due to the diffusion-limited reaction of ozone. A dewaxer was combined with a $DIO_3$ rinse to reduce the wax removal time and remove wax residue completely. Replacing DI rinse with the $DIO_3$ rinse resulted in a surface with a contact angle of less than $5^{\circ}$, which indicates no further cleaning steps would be required. The particle removal efficiency (PRE) was further improved by combining a SC-1 cleaning step with the $DIO_3$ rinsing process. A reduction in the process time was obtained by introducing $DIO_3$ cleaning with a dewaxing process.

세라믹 사출성형체로부터 초임계이산화탄소를 이용한 파라핀왁스의 제거 (Removal of Paraffin Wax from Ceramic Injection Mold Using Supercritical Carbon Dioxide)

  • 김동현;홍승태;유기풍;임종성
    • 청정기술
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    • 제14권1호
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    • pp.1-6
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    • 2008
  • 초임계이산화탄소를 이용하여 세라믹 사출성형체로부터 파라핀왁스를 제거하였다. 파라핀왁스는 세라믹사출성형 공정에서 바인더로 사용되는 물질이다. 파라핀왁스 제거의 최적조건을 찾기 위해 온도, 압력, 이산화탄소의 유량에 대한 영향을 조사하였다. 온도는 328.15 - 348.15 K, 압력은 15 - 30 MPa 범위에서 조절하였으며, 이산화탄소의 유속을 변화시켜가면서 파라핀왁스의 제거율을 측정하였다. 파라핀왁스의 제거율은 압력의 증가에 비례하였다. 온도는 파라핀왁스의 녹는점인 329.15K 이상일 때 파라핀왁스의 제거가 효과적이었고, 더 높은 온도에서는 더 이상의 효과가 없었다. 이산화탄소의 유량 증가에 따라 파라핀 제거율이 향상되었지만 어느 양 이상이 되면 더 이상 효과가 없었다. 파라핀왁스를 보다 더 효과적으로 제거하기 위해 프로판을 공용매로 사용하였다. 초임계이산화탄소에 프로판을 첨가했을 경우 제거율이 향상되었으며, 사출성형체의 구조나 모양에 어떠한 변화도 없이 파라핀왁스를 완전하게 제거할 수 있었다.

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오존수를 이용한 실리콘 웨이퍼 연마 후 지용성 왁스 및 오염입자 제거의 영향 (Effect of Organic wax residues and particles removal by DIO3 (ozonated DI water) after Silicon Wafer batch Polishing Process)

  • 이재환;이승호;김태곤;박진구;이건호;배소익
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.558-559
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    • 2007
  • A commercially de-waxer which kinds of solvent after was used to remove a thick organic wax film after polishing process and several steps of SC-1 cleanings were followed for the removal of organic wax residues and particles which requires long process time and high cost of ownership (COO). DIO3 was used to remove organic wax residues too achieve low COO. In this study, 0103 rinsing could use instead of 01 water rinsing. The process time and chemical consumption were reduced by using DIO3.

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The Impact of the Morphological Characteristics of Leaves on Particulate Matter Removal Efficiency of Plants

  • Son, Deokjoo;Kim, Kwang Jin;Jeong, Na Ra;Yun, Hyung Gewon;Han, Seung Won;Kim, Jeongho;Do, Gyung-Ran;Lee, Seon Hwa;Shagol, Charlotte C.
    • 인간식물환경학회지
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    • 제22권6호
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    • pp.551-561
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    • 2019
  • This study was conducted to find out differences in the removal efficiency of particulate matter (PM) depending on the type of plants and the morphological characteristics of leaves. A total of 12 plants were used, with three plants selected for each type of leaves (big leaf, small leaf, compound leaf, needle leaf). We measured the removed amount of PM10 and PM2.5, the structure of the abaxial leaf surface, and the weight of the wax layer of each plant. Plants with the high removal efficiency of PM included Pachira aquatica Aubl., Ardisia crenata, and Dieffenbachia 'Marianne', and plants with the low removal efficiency included Nandina domestica Thunb, Schefflera arboricola, and Quercus dentata. The abaxial leaf surface having a high removal efficiency of PM had many large wrinkles, and the abaxial leaf surface having a medium removal efficiency was flat and smooth. On the other hand, there were many fine hairs on the abaxial leaf surface with a low removal efficiency. According to the plant leaf type, the PM10 removal efficiency of plants with needle leaves was about three times higher than that of other plants. In particular, the wax layer of conifers weighed 6-24 times higher than those of other plants. The stomata of conifers were evenly distributed on the adaxial and abaxial leaf surfaces; however, the stomata of Sciadopitys verticillata appeared in the form of papillae unlike general stomata. Therefore, the removal efficiency of PM varied depending on the macro-, and micro-morphological characteristics of plant leaves such as the structure of the abaxial leaf surface, and the weight of the wax layer. Based on this research, selecting plants that are effective in reducing PM in consideration of the plant type and leaf characteristics will improve indoor air quality and decrease exposure of PM to human body.

Development of the ultra/nano filtration system for textile industry wastewater treatment

  • Rashidi, Hamidreza;Sulaiman, Nik Meriam Nik;Hashim, Nur Awanis;Bradford, Lori;Asgharnejad, Hashem;Larijani, Maryam Madani
    • Membrane and Water Treatment
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    • 제11권5호
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    • pp.333-344
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    • 2020
  • Advances in industrial development and waste management over several decades have reduced many of the impacts that previously affected ecosystems, however, there are still processes which discharge hazardous materials into environments. Among industries that produce industrial wastewaters, textile manufacturing processes play a noticeable role. This study was conducted to test a novel continuous combined commercial membrane treatment using polyvinylidene fluoride (PVDF), ultrafiltration (UF), and polyamide (PA) nanofiltration (NF) membranes for textile wastewater treatment. The synthetic textile wastewater used in this study contained sodium silicate, wax, and five various reactive dyes. The results indicate that the removal efficiency for physical particles (wax and resin) was 95% through the UF membrane under optimum conditions. Applying UF and NF hybrid treatment resulted in total effective removal of dye from all synthetic samples. The efficiency of sodium silicate removal was measured to be between 2.5 to 4.5% and 13 to 16% for UF and NF, respectively. The chemical oxygen demand in all samples was reduced by more than 85% after treatment by NF.

WC-Co계 분말사출성형에서 초임계$CO_2$에 의한 결합제 제거 (Binder Removal by Supercritical $CO_2$ in Powder Injection Molded WC-Co)

  • 김용호;임종성;이윤우;김소나;박종구
    • 한국분말재료학회지
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    • 제8권2호
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    • pp.91-97
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    • 2001
  • The conventional debinding process in metal injection molding is very long time-consuming and unfriendly environmental method. Especially, in such a case of injection molded parts from hard and fine metal powder, such as WC-Co, an extremely long period of time is necessary in the conventional slow binder removal process. On the other hand, supercritical debinding is thought to be the effective method which is appropriate to eliminate the aforementioned inconvenience in the prior art. The supercritical fluid has high diffusivity and density, it can penetrate quickly into the inside of the green metal bodies, and extract the binder. In this paper, super-critical debinding is compared with wicking debinding process. Wax-based binder system is used in this study. The binder removal rate in supercritical $CO_2$ have been measured at $65^{\circ}C$, 75$^{\circ}C$ in the pressure range from 20 MPa to 28 MPa. Pores and cracks in silver bodies after sintering were observed using SEM When the super-critical $CO_2$ debinding was carried out at 75$^{\circ}C$, almost all the wax (about 70 wt% of binder) was removed in 2 hours under 28 MPa and 2.5 hours under 25 MPa.

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분말사출성형으로 제조된 다극 이방성 Sr-페라이트 소결자석 (Multi-pole anisotropic Sr-ferrite sintered magnets fabricated by powder injection molding)

  • 조태식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.284-287
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    • 2001
  • Multi-pole anisotropic Sr-ferrite sintered magnets has been studied by powder injection molding under applied magnetic field. The orientation of anisotropic Sr-ferrite powders higher than 80% during injection molding is achieved at the following conditions; apparent viscosity lower then 2500 poise in 1000 $sec^{-1}$ shear rate and applied magnetic field higher then 4 kOe. For the high fluidity and strength of injection molded compact, and the effective binder removal without defects during solvent extraction and thermal debinding, the optimum multi-binder composition is paraffin wax(PW)/carnauba wax(CW)/HDPE = 50/25/25 wt%. The rate of binder removal is proportional to the mean particle size of Sr-ferrite powders whereas it is inversely proportional to the content of Sr-ferrite powders and the sample thickness. The high magnetic properties of Sr-ferrite sintered magnets are; 3.8 kG of remanent flux density, 3.4 kOe of intrinsic coercivity, and 1.2 kG of surface flux density (l-mm-thick) in the direction of applied magnetic field.

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분말사출성형으로 제조된 다극 이방성 SF-폐라이트 소결자석 (Mu7i-pole anisotropic Sr-ferrite sintered magnets fabricated by powder injection molding)

  • 조태식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.284-287
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    • 2001
  • Multi-pole anisotropic Sr-fertile sintered magnets has been studied by powder injection molding under applied magnetic field. The orientation of anisotropic Sr-ferrite powders higher than 80% during injection molding is achieved at the following conditions; apparent viscosity lower then 2500 poise in 1000 sec$\^$-1/ shear rate and applied magnetic field higher then 4 kOe. For the high fluidity and strength of injection molded compact, and the effective binder removal without defects during solvent extraction and thermal debinding, the optimum multi-binder composition is paraffin wax(PW)/carnauba wax(CW)/HDPE = 50/25/25 wt%. The rate of binder removal is proportional to the mean particle size of Sr-ferrite powders whereas it is inversely proportional to the content of Sr-ferrite powders and the sample thickness. The high magnetic properties of Sr-ferrite sintered magnets are; 3.8 kG of remanent flux density, 3.4 kOe of intrinsic coercivity, and 1.2 kG of surface flux density (1-mm-thick) in the direction of applied magnetic field.

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단순접번 교합기의 모형부착 방법에 관한 연구 (A Study of Simple Hinge Articulator Mounting Method)

  • 조홍규
    • 대한치과기공학회지
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    • 제25권1호
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    • pp.95-102
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    • 2003
  • The purpose of this study was to show occlusion on the simple hinge articulator optionally mounted. Modelling of upper-lower jaw and simple hinge articulator were developed. This modelling of upper-lower jaw inserting wax bite was mounted imaginary on the modelling of simple hinge articulator by use of the computer simulation. From changes of THA(transverse horizontal axis)-incisor distance, Balkwill angle and THA deviation, eight types were mounted respectively. After removal of wax bite, upper-lower jaw position changing were compared with centric jaw relation. The results were as follows: 1. The change of THA-incisor distance had influence on mostly a vertical shift of upper jaw. 2. The change of Balkwill angle had influence on mostly a horizontal shift of upper jaw. 3. Inferior type in the THA deviations was the least shift of upper jaw. The above results suggest that the simple hinge articulator optionally mounted effect a shift of upper jaw.

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연꽃식물 조직의 표피 특성과 연잎효과 (Epidermal Features of the Nelumbo nucifera Tissues and Lotus Effect)

  • 김인선
    • Applied Microscopy
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    • 제42권2호
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    • pp.95-103
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    • 2012
  • 연잎효과는 연꽃의 잎에서 규명된 현상으로 표피세포에서 기원하는 미세구조에 의해 물방울이 잎 표면이나 내부조직에 침투하지 않고 경사면으로 흘러내리며 표면 위 먼지나 이물질을 함께 떨어지게 한다. 잎 표면을 항상 깨끗한 상태로 유지하는 자기정화 능력인 연잎효과에 대해서는 여러 영역에서 연구되고 다방면으로 응용되고 있으나 구조적인 측면에서 연잎을 생장단계별 또는 표피조직 부위별로 비교 조사한 연구는 거의 없는 실정이다. 이에 본 연구에서는 연잎과 줄기를 대상으로 생장단계별, 부위별 표피조직의 미세 표면구조를 연구하여 연잎효과 표면 특성을 조사하였다. 본 연구에서 조사된 연잎효과는 미세돌기와 왁스결정체가 발달한 잎의 상피조직에서만 나타나고, 왁스결정체만 발달한 하피 및 줄기의 표피조직에서는 확인되지 않았다. 이는 미세돌기의 발달이 연잎효과를 나타내는데 가장 중요한 요인이고, 왁스결정체가 돌기표면 위에 축적되면 연잎효과는 더 증가하는 것으로 밝혀졌다.