• 제목/요약/키워드: trench gate

검색결과 128건 처리시간 0.023초

열 화학 기상 증착법을 이용한 삼극관 구조의 탄소 나노 튜브 전계 방출 소자의 제조 (Fabrication of Triode Type Field Emission Device Using Carbon Nanotubes Synthesized by Thermal Chemical Vapor Deposition)

  • 유완준;조유석;최규석;김도진
    • 한국재료학회지
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    • 제14권8호
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    • pp.542-546
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    • 2004
  • We report a new fabrication process for high performance triode type CNT field emitters and their superior electrical properties. The CNT-based triode-type field emitter structure was fabricated by the conventional semiconductor processes. The keys of the fabrication process are spin-on-glass coating and trim-and-leveling of the carbon nanotubes grown in trench structures by employing a chemical mechanical polishing process. They lead to strong adhesion and a uniform distance from the carbon nanotube tips to the electrode. The measured emission property of the arrays showed a remarkably uniform and high current density. The gate leakage current could be remarkably reduced by coating of thin $SiO_{2}$ insulating layer over the gate metal. The field enhancement factor(${\beta}$) and emission area(${\alpha}$) were calculated from the F-N plot. This process can be applicable to fabrication of high power CNT vacuum transistors with good electrical performance.

SOI 핸들 웨이퍼에 고정된 광다이오드를 가진 SOI CMOS 이미지 센서 (SOI CMOS image sensor with pinned photodiode on handle wafer)

  • 조용수;최시영
    • 센서학회지
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    • 제15권5호
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    • pp.341-346
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    • 2006
  • We have fabricated SOI CMOS active pixel image sensor with the pinned photodiode on handle wafer in order to reduce dark currents and improve spectral response. The structure of the active pixel image sensor is 4 transistors APS which consists of a reset and source follower transistor on seed wafer, and is comprised of the photodiode, transfer gate, and floating diffusion on handle wafer. The source of dark current caused by the interface traps located on the surface of a photodiode is able to be eliminated, as we apply the pinned photodiode. The source of dark currents between shallow trench isolation and the depletion region of a photodiode can be also eliminated by the planner process of the hybrid bulk/SOI structure. The photodiode could be optimized for better spectral response because the process of a photodiode on handle wafer is independent of that of transistors on seed wafer. The dark current was about 6 pA at 3.3 V of floating diffusion voltage in the case of transfer gate TX = 0 V and TX=3.3 V, respectively. The spectral response of the pinned photodiode was observed flat in the wavelength range from green to red.

Development of Induction Heater Hot Water System using New Active Clamping Quasi Resonant ZVS PWM Inverter

  • Kwon, Soon-Kurl;Mun, Sang-Pil
    • 조명전기설비학회논문지
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    • 제22권11호
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    • pp.23-29
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    • 2008
  • This paper presents a new conceptual electromagnetic induction eddy current based stainless steel plate spiral type heater for heat exchanger or dual packs heater in hot water system boiler steamer and super heated steamer, which is more suitable and acceptable for new generation consumer power applications. In addition, an active clamping quasi-resonant PWM high frequency inverter using trench gate IGBTs power module can operate under a principle of zero voltage soft commutation with PWM is developed and demonstrated for a high efficient induction heated hot water system and boiler in the consumer power applications. This consumer induction heater power appliance using active clamping soft switching PWM high frequency inverter is evaluated and discussed on the basis of experimental results.

PDM ZCS Resonant High Frequency Inverter for Induction Heated Roller

  • Kang, Shin-Chul
    • Journal of information and communication convergence engineering
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    • 제6권3호
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    • pp.301-304
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    • 2008
  • This paper presents a lossless inductor snubber-assisted series resonant high frequency inverter using the trench gate IGBTs for the electromagnetic induction eddy current-heated fixing roller in copy and printing machines in a new generation. This soft switching high-frequency inverter can completely achieve zero current soft switching (ZCS) commutation mode transitions and wide power regulation under its constant frequency pulse density modulation (PDM) scheme. Its transient and steady state operating principle is originally presented for a constant frequency PDM strategy under a ZCS operation, together with its output power regulation characteristics-based on the pulse density modulation. The effectiveness of this soft switching high-frequency inverter is confirmed for the fixing equipment with the induction-heated fixing roller.

The Electrical Characteristics of Power FET using Super Junction for Advance Power Modules

  • Kang, Ey Goo
    • 전기전자학회논문지
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    • 제17권3호
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    • pp.360-364
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    • 2013
  • The maximum breakdown voltage's characteristic within the Super Junction MOSFET structure comes from N-Drift and P-Pillar's charge balance. By developing P-Pillar from Planar MOSFET, it was confirmed that the breakdown voltage is improved through charge balance, and by setting the gate voltage at 10V, the characteristic comparisons of Planar MOSFET and Super Junction MOSFET are shown in picture 6. The results show that it had the same breakdown voltage as Planar MOSFET which increased temperature resistance by 87.4% at $.019{\Omega}cm^2$ which shows that by the temperature resistance increasing, the power module's power dissipation improved.

Development of Induction Heated Hot Water System using Soft Switching PWM High Frequency Inverter

  • Lee, Jong-Kurl;Mun, Sang-Pil;Park, Man-Kyu;Nakaoka, Mustsuo
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 2008년도 춘계학술대회 논문집
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    • pp.325-328
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    • 2008
  • This paper presents a new conceptual electromagnetic induction eddy current-based stainless steel plate spiral type heater for heat exchanger or dual packs Heater in hot water system boiler steamer and super heated steamer, which is more suitable and acceptable for new generation consumer power applications. In addition, an active clamped quasi resonant PWM high frequency inverter using trench gate IGBTs power module can operate under a principle of zero voltage soft commutation with PWM is developed and demonstrated fora high efficient induction heated hot water system and boiler in the consumer power applications This consumer induction heater power appliance using active clamp soft switching PWM high-frequency inverter is evaluated and discussed on the basis of the simulation and experimental results.

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수직형 트랜치 게이트 IGBT의 전기적 특성 향상을 위한 연구 (Improvement of Electrical Characteristics of Vertical Trench Gate IGBT)

  • 이종석;강이구;성만영
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.40-41
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    • 2006
  • 본 논문은 수직형 트랜치 IGBT 구조에서 에미터를 트랜치로 형성하여 그 전기적인 특성을 MEDICI를 이용하여 고찰하였다. 제안한 구조의 항복전압과 온-상태 전압, 래치업 전류 그리고 턴-오프 시간이 기존 트랜치 IGBT에 비하여 향상되었음을 알 수 있었다. 항복전압은 트랜치 에미터에 의해 트랜치 게이트에 집중되는 전계를 완화시켜 일반적인 트랜치 IGBT보다 19%정도 향상되었으며 온-상태 전압과 래치업 전류는 각각 25%, 16% 정도 향상되었다. 하지만 제안된 구조의 턴-오프 시간은 무시할 수 있을 정도로 약간 증가하였음을 알 수 있었다.

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트렌치 게이트를 이용하여 기생 사이리스터 래치-업을 억제한 새로운 수평형 IGBT (A New LIGBT Employing a Trench Gate for Improved Latch-up Capability)

  • 최영환;오재근;하민우;최연익;한민구
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.17-19
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    • 2004
  • 트렌치 게이트 구조를 통해 순방향 전압 강하 손실 없이 기생 사이리스터 래치-업을 억제시키는 새로운 수평형 절연 게이트 바이폴라 트랜지스터 (LIGBT)를 제안하였다. 제안된 소자의 베이스 션트 저항은 정공의 우회로 인하여 감소하였으며, 이에 따라 기생 사이리스터 래치-업이 억제되었다. 제안된 소자의 순방향 전압강하는 트렌치 구조에 의한 유효 채널 폭 증가로 감소하였다. 제안된 소자의 동작 원리 분석을 위해 ISE-TCAD를 이용한 3차원 시뮬레이션을 수행하였으며, 표준 CMOS 공정을 이용하여 소자를 제작 및 측정하였다. 제안된 소자의 순방향 전압 강하는 기존의 LIGBT에 비해 증가하지 않았으며, 래치-업 용량은 2배로 향상되었다. 제안된 소자의 포화 전류는 감소하였으며, 이로 인하여 소자의 강인성 (ruggedness)이 향상되었다.

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전력용 MOSFET의 기술동향 (The Technical Trends of Power MOSFET)

  • 배진용;김용;이은영;이규훈;이동현
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 춘계학술대회 논문집 에너지변화시스템부문
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    • pp.125-130
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    • 2009
  • This paper reviews the characteristics technical trends in Power MOSFET technology that are leading to improvements in power loss for power electronic system. The power electronic technology requires the marriage of power device technology with MOS-gated device and bipolar analog circuits. The technology challenges involved in combining power handling capability with finger gate, trench array, super junction structure, and SiC transistor are described, together with examples of solutions for telecommunications, motor control, and switch mode power supplies.

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고내압용 MOS 구동 사이리스터 소자의 설계 및 전기적 특성에 관한 연구 (Study on Design and Electric Characteristics of MOS Controlled Thyristor for High Breakdown Voltage)

  • 홍영성;정헌석;정은식;강이구
    • 한국전기전자재료학회논문지
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    • 제24권10호
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    • pp.794-798
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    • 2011
  • This paper was carried out design of 1,700 V Base Resistance Thyristor for fabrication. We decided conventional BRT (base resistance thyristor) device and Trench Gate type one for design. we carried out device and process simulation with T-CAD tools. and then, we have extracted optimal device and process parameters for fabrication. we have analysis electrical characteristics after simulations. As results, we obtained 2,000 V breakdown voltage and 3.0 V Vce,sat. At the same time, we carried out field ring simulation for obtaining high voltage.