PR Coating for Electron Beam Lithography of Cylindrical Mold and Measuring Coating Thickness of It using Measuring Tip (원통금형의 전자빔 가공을 위한 PR 코팅 및 측정 팁을 이용한 두께측정)
-
- Journal of the Korean Society for Precision Engineering
- /
- v.29 no.10
- /
- pp.1144-1148
- /
- 2012