• Tribology and Lubricants
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• 제22권3호
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• pp.119-126
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• 2006

In this paper, the contact behavior characteristics of a primary sealing components such as a seal ring and a seal seat has been presented for a small hydro-power turbine. Using the non-linear FEM analysis, the maximum temperature, the axial displacement, radial differences between a seal ring and a seal seat, and maximum contact normal stress have been analyzed for three optimized sealing profiles in which are designed based on the FEM analysis and Taguchi's experimental method. The three primary sealing profiles between a seal ring and a seal seat are strongly related to a leakage of a water for a hydro-power turbine and wear of a primary sealing component. The computed results show that the contact rubbing area between a seal ring and a seal seat is very important for reducing a friction heating and wear in a sealing gap, and increasing a contact normal stress in primary sealing components. Based on the FEM computation, models II and III in which have a small rubbing surface of seal rings show low dilatation of primary sealing components, and high normal contact stress between a seal ring and a seal seat. Thus, the FEM computed results recommend a short contacting width of a primary sealing component for reducing a leakage and thermal distortions, and expanding a seal life. This means that a conventional primary sealing component may be switched to a reduced sealing face of seal rings.

• 한국진공학회지
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• 제10권2호
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• pp.219-224
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• 2001

N형 InGaAs에 대한 Pd/Ge/Ti/Pt 오믹 접촉 특성을 조사하였다. $450^{\circ}C$까지의 급속 열처리에 의해 우수한 오믹 특성을 나타내어 $400^{\circ}C$, 10초의 급속 열처리 조건에서 최저 $3.7\times10^{-6}\; \Omega\textrm{cm}^2$ 의 접촉 비저항을 나타내었다. 이는 열처리에 의해 생성된 Pd-Ge계 화합물의 형성 및 Ge의 InGaAs 표면으로의 확산과 관련이 있었다. 그러나 열처리 시간을 연장할 경우 접촉 비저항이 $low-10^5\; \Omega\textrm{cm}^2$로 약간 증가하였다. 고온 열처리 후에도 오믹 재료와 InGaAs의 평활한 계면을 유지하면서 우수한 오믹 특성을 나타내어, 화합물 반도체 소자의 오믹 접촉으로 충분히 응용 가능하다고 판단된다.

• Transactions on Electrical and Electronic Materials
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• 제14권1호
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• pp.32-35
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• 2013

In this paper, a manufacturing process was developed for fabricating high-quality AlGaN/GaN high electron mobility transistors (HEMTs) on silicon carbide (SiC) substrates. Various conditions and processing methods regarding the ohmic contact and pre-metal-deposition $BCl_3$ etching processes were evaluated in terms of the device performance. In order to obtain a good ohmic contact performance, we tested a Ti/Al/Ta/Au ohmic contact metallization scheme under different rapid thermal annealing (RTA) temperature and time. A $BCl_3$-based reactive-ion etching (RIE) method was performed before the ohmic metallization, since this approach was shown to produce a better ohmic contact compared to the as-fabricated HEMTs. A HEMT with a 0.5 ${\mu}m$ gate length was fabricated using this novel manufacturing process, which exhibits a maximum drain current density of 720 mA/mm and a peak transconductance of 235 mS/mm. The X-band output power density was 6.4 W/mm with a 53% power added efficiency (PAE).

• 한국진공학회지
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• 제11권1호
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• pp.43-49
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• 2002

N형 InGaAs에 대한 Pd/Ge/Pd/Ti/Au 오믹 접촉의 급속 열처리 조건에 따른 오믹 특성을 조사하였다. $450^{\circ}C$까지의 열처리에 의해 우수한 오믹 특성을 나타내어 $400^{\circ}C$/10초의 급속 열처리 후에 최저 $1.1\times10^{-6}\Omega\textrm{cm}^2$의 접촉 비저항을 나타내었다. $425^{\circ}C$ 이상의 열처리 후에 접촉 비저항이 점점 증가하여 $450^{\circ}C$에서는 오믹 재료와 InGaAs의 반응에 의해 오믹 특성의 열화가 나타났다. 그러나 high-$10^{-6}\Omega\textrm{cm}^2$ 정도의 비교적 우수한 오믹 특성을 유지하였고, 양호한 표면 및 계면이 얻어져 화합물 반도체 소자에의 응용 가능성이 충분한 것으로 판단된다.

• 한국전기전자재료학회논문지
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• 제20권3호
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• pp.234-239
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• 2007

This paper describes the TiW ohmic contact characteristics under the surface treatment of the polycrystalline 3C-SiC thin film grown on $SiO_2/Si(100)$ wafers by APCVD. The poly 3C-SiC surface was polished by using CMP(chemical mechanical polishing) process and then oxidized by wet-oxidation process, and finally removed SiC oxide layers. A TiW thin film as a metalization process was deposited on the surface treated poly 3C-SiC layer and was annealed through a RTA(rapid thermal annealing) process. TiW/poly 3C-SiC was investigated to get mechanical, physical, and electrical characteristics using SEM, XRD, XPS, AFM, optical microscope, I-V characteristic, and four-point probe, respectively. Contact resistivity of the surface treated 3C-SiC was measured as the lowest $1.2{\times}10^{-5}{\Omega}cm^2$ at $900^{\circ}C$ for 45 sec. Therefore, the surface treatments of poly 3C-SiC are necessary to get better contact resistance for extreme environment MEMS applications.

• 정보저장시스템학회논문집
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• 제10권2호
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• pp.32-38
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• 2014

Heat emission from the laser diode used in the optical disc drive and the defects from the increased temperature at the system have attracted attentions from the field of the information storage device. Thermoelectric refrigerator is one of the fine solutions to solve these thermal problems. The refrigeration performance of thermoelectric device is dependent on the thermoelectric material's figure-of-merit. Meanwhile, high electrical contact resistivity between metal electrode and p- and n-type thermoelectric materials in the device would lead increased total electrical resistance resulting in the degeneracy in performance. This paper represents the manufacturing process of the PbTe-based material which has one of the highest figure-of-merit at medium-high-temperature, ~ 600K to 900 K, and the nickel contact layer for reduced electrical contact resistance at once, and the results showing the decent contact structure and figure-of-merit even after the long-term operation environment.

• 한국전기전자재료학회논문지
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• 제15권5호
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• pp.449-454
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• 2002

The use of a thin film of indium between the ITO and the $n^+-lnP$ contact layers for InP/InGaAs HPTs was studied without degrading its excellent optical transmittance properties. $ITO/n^+-lnP$ ohmic contact was successfully achieved by the deposition of indium and annealing. The specific contact resistance of about $6.6{\times}10^{-4}\Omega\textrm{cm}^2$ was measured by use of the transmission line method (TLM). However, as the thermal annealing was just performed to $ITO/n^+-lnP$ contact without the deposition of indium between ITO and $n^+-lnP$, it exhibited Schottky characteristics. In the applications, the DC characteristics of InP/InGaAs HPTs with ITO emitter contacts was compared with those of InP/InGaAs HBTs with the opaque emitter contacts.

• 설비공학논문집
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• 제18권11호
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• pp.867-873
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• 2006

Vertical falling liquid film is extensively used in heat and mass transfer processes of many applications, such as evaporative coolers, cooling towers, and absorption chillers. In such cases, it is required that the falling film spreads widely in the surface forming thin liquid film to enlarge contact surface. An addition of surface active agent to a falling liquid film or hydrophilic surface treatment affects the fluid physical properties of the film. Surfactant addition not only decreases contact angle between the liquid and solid surface but also changes the surface from hydrophobicity to hydrophilicity. In this study, the effects of contact angle on falling film characteristics over a vertical surface have been investigated experimentally. The contact angle is varied either by an addition of surfactant to the liquid or by hydrophilic surface treatment. It is found that the wetted area is increased and film thickness is decreased by the hydrophilic treatment as compared with those of other surfaces. With this hydrophilic treatment, the falling liquid film spreads out widely in the surface. As surfactant concentration is increased, wetted area is also increased and the film thickness is substantially decreased.

• 설비공학논문집
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• 제12권1호
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• pp.95-101
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• 2000

The effect of surface contact angle on the behavior of frost formation in a fin-tube heat exchanger is investigated experimentally. It is shown that both heat exchangers with hydrophilic and hydrophobic surfaces appear to have a better thermal performance than bare aluminium heat exchanger, but the improvements are very small. There is a little increase in the amount of the frost deposited onto the heat exchanger with both hydrophilic and hydrophobic surface. However, the effect of contact angle on the frost density is observed ; the frost with high density forms on the heat exchanger with hydrophilic surface ; and the frost with low density is deposited onto the heat exchanger with hydrophobic surface when compared with the frost deposited onto the heat exchanger with bare aluminium surface. This may be attributed to the fact that the shape of water droplets which condense on the surface of heat exchanger at the early stage of frosting varies with contact angle, and thus makes a difference on the structure of frost formation. From the experiments with different relative humidity of inlet air, it is shown that the variations of operating parameter make no influence on the effect of surface contact angle on the frosting behavior in the heat exchanger.

• E2M - 전기 전자와 첨단 소재
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• 제8권5호
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• pp.619-625
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• 1995

Polycrystalline CdTe thin film has been studied for photovoltaic application due to the 1.45 eV band gap energy ideal for solar energy conversion and high absorption coefficient. The formation of low resistance contact to p-CdTe is difficult because of large work function(>5.5eV). Common methods for ohmic contact to p-CdTe are to form a p+ region under the contact by in-diffusion of contact material to reduce the barrier height and modify a p-CdTe surface layer using chemical treatment. In this study, the surface chemical treatment of p CdTe was carried out by H$\_$3/PO$\_$4/+HNO$\_$3/ or K$\_$2/Cr$\_$2/O$\_$7/+H$\_$2/SO$\_$4/ solution to provide a Te-rich surface. And various thin film contact materials such as Cu, Au, and Cu/Au were deposited by E-beam evaporation to form ohmic contact to p-CdTe. After the metallization, post annealing was performed by oven heat treatment at 150.deg. C or by RTA(Rapid Thermal Annealing) at 250-350.deg. C. Surface chemical treatments of p-CdTe thin film improved metal/p-CdTe interface properties and post heat treatment resulted in low contact resistivity to p-CdTe.Of the various contact metal, Cu/Au and Cu show low contact resistance after oven and RTA post-heat treatments, respectively.