• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.10
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• pp.844-850
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• 2002

Linearly graded profiles on the field area oxide are frequently used in power integrated circuits to reduce the surface electric field when power devices are operated in forward or reverse blocking modes. It is shown here that tapered windows can be made using the difference of etch rates between the bottom and the top layer of TEOS film. Annealed TEOS films are etched at a lower rate than the TEOS film without annealing Process. The fast etching layer results in window walls having slopes in the range of 25$^{\circ}$∼ 80$^{\circ}$ with respect to the wafer surface. Taper etching technique by annealing the TEOS film applies to high voltage LDMOS, which is compatible with CMOS process, due to the minimum changes in both of design rules and thermal budget.

• 한국전산유체공학회:학술대회논문집
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• 2007.04a
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• pp.125-129
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• 2007

In this paper a method for the design optimization for helicopter rotor blade in hover is studied Numerical analysis of aerodynamic characteristics of the flow around a rotor blade is analysed by usign panel method and CFD code based on Navier-Stokes equation. The result is validated by comparing with existing experimental result. Optimization methods RSM(Response Surface Method) and DOE(Design of Experiments) are applied in combination. The object functions are power, twist angle, taper ratio, and thrust. The optimized result showed a decrease of 17% of the power required.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.202-205
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• 2002

The micro-extruding die is a die for manufacturing of fine-wire by extruding process. The fine-wire made from the micro-extruding can be effectively applied to fields of semiconductor parts and medical parts etc. It is predicted that the demand of fine-wire in industry is more and more increasing. In this study $\Phi$ 50${\mu}{\textrm}{m}$ micro-drill which is coated with diamond is used for drilling of super micro-hole sues. For the machining of taper parts of entrance and exit, drill having $\Phi$ 9mm inclination angle 20$^{\circ}$ is used. This is useful for anti tool-breakage in drilling process. After micro-drilling, the polishing process by abrasive is carried out for increasing surface roughness.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.245-249
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• 2002

Tungsten carbide microshaft is used as various micro-tools in MEMS because it has high hardness and good rigidity. In this study, experiments were performed to produce tungsten carbide microshaft using electrochemical machining. $H_2SO_4$solution was used as electrolyte because it can dissolve tungsten and cobalt simultaneously. Optimal electrolyte concentration and machining voltage satisfying uniform shape and large MRR of workpiece were found. For one-step machining, the immersion depth over 1 mm was selected for avoidance of concentration of electric charge at the tip of the microshaft. The limit diameter with good straightness was shown and an empirical formula for WC-microshaft machining was suggested. By controlling the various machining parameters, a straight microshaft with 30 $\mu\textrm{m}$ diameter, over 1 mm length and under 0.5$^{\circ}$ taper angle was obtained.

• Structural Engineering and Mechanics
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• v.9 no.6
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• pp.569-588
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• 2000

The plastic collapse loads and their locations are predicted for a class of tapered, initially curved, and transversely corrugated cantilevered beams subjected to static tip loading. Results of both closed form and finite element solutions for several rigid perfectly plastic and elastic perfectly plastic beam models are evaluated. The governing equations are cast in nondimensional form for efficient studies of collapse load as it varies with beam geometry and the angle of the tip load. Static experiments for laboratory-scale configurations whose taper flared toward the tip, complemented the theory in that collapse occurred at points about 40% of the beams length from the fixed end. Experiments for low speed impact loading of these configurations showed that collapse occurred further from the fixed end, between the 61% and 71% points. The results may be applied to the design of safer highway guardrail terminal systems that collapse by design under vehicle impact.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.7
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• pp.133-140
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• 2002

Ultrasonic Machining (USM) is widely used in cutting of non-conductive, brittle workpiece materials such as engineering ceramics. However, USM has a limitation in its application to micro machining because problems are occurred in attaching micro tools to the machine and maintaining high precision. Therefore Micro Ultrasonic Machining (MUSM) with WEDM is proposed in this research. The experiments are produced as the change of shaft diameter and abrasive size.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.172-178
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• 2004

Tungsten carbide microshaft can be used as various micro-tools for MEMS because it has high hardness and high rigidity. In this study, experiments are performed to produce tungsten carbide micro-shaft using electrochemical etching. H$_2$SO$_4$ solution is used as electrolyte because it can dissolve tungsten and cobalt simultaneously. Optimal electrolyte concentration and machining voltage satisfying uniform shape, good surface quality, and high MRR of workpiece are experimentally found. By controlling the various machining parameters, a straight micro-shaft with 5 ${\mu}{\textrm}{m}$ diameter, 3 mm length, and 0.2$^{\circ}$taper angle was obtained.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.9
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• pp.41-47
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• 2004

As mechanical structures are minimized, the demand on micro dies and molds has increased. Machining complex 3D shapes requires fabrication procedures for preparing the electrodes. Micro electrical discharge milling using a simple shape electrode can produce 3D micro structure. In this paper the machining characteristics of micro electrical discharge milling according to depth of cut and capacitance are investigated. The machining time is diminished when simple tool-paths and algorithms for changing the feedrate are applied. But a distorted bottom shape and a tapered wall shape are inevitable after machining. The distorted bottom shape and the taper angle of wall are reduced by finish machining.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.1254-1259
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• 2001

This paper deals with the free vibrations of circular arches with variable cross-section. The differential equations governing free, in-plane vibrations of tapered circular arches, including the effects of rotatory inertia, shear deformation and axial deformation, are derived and solved numerically to obtain frequencies and mode shapes. Numerical results are calculated for the quadratic arches with hinged-hinged and clamped-clamped end constraints. Three general taper types for a rectangular section are considered. The lowest four natural frequencies and mode shapes are presented over a range of non-dimensional system parameters： the subtended angle, the slenderness ratio and the section ratio.

• Laser Solutions
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• v.18 no.2
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• pp.11-13
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• 2015

Pressure-drop in a micro-channel is critical when a hole diameter is less then 100um with the high aspect ratio, more than 40. To minimize these pressure loss for micro-channel applications is important and there would be the best hole diameter, taper angle, and their combinations. In this work, the parametric study for laser drilling of anodized material is conducted to obtain the micro-channel hole with high aspect ratio.