• Title/Summary/Keyword: surface uniformity

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The $Al_2O_3$ Passivation Mechanism for c-Si Surface Deposited by ALD Using $O_3$ Oxidant

  • 조영준;장효식
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.320.1-320.1
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    • 2013
  • We have investigated the effect of surface passivation for crystalline silicon solar cell using ozone-based atomic layer deposited (ALD) $Al_2O_3$. We examined passivation properties such as uniformity, carrier lifetime, thickness, negative fixed charge density at AlOx/Si interface, and reflectance. The influences of process temperature and heat treatment were investigated using microwave photoconductance decay (PCD). Ozone-based ALD $Al_2O_3$ film shows the best carrier lifetime at lower deposition temperature than $H_2O$-based ALD.

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구리 전착에서 젤라틴의 영향 (Effect of Gelatine on the Electrodeposition of Copper)

  • 장영철;손헌준
    • 한국표면공학회지
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    • 제26권4호
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    • pp.163-174
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    • 1993
  • The effect of gelatine on the electrodeposition of copper in cupric sulfate-sulfuric acid solution was investi-gated using an ac impedance technique. In the presence of gelatine, the charge transfer resistance was in-creased and the electrical double layer capacitance was decreased. A model was suggested to explain the im-pedance spectra and it fitted well the experimental data. Also the uniformity of deposit thickness was in-creased while the grain size was decreased by the addition of gelatine.

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Gas 주입구 위치 변화에 따른 ICP-CVD $SiO_2$의 두께 균일도 개선 모델링 (Numerical modeling for thickness uniformity improvement of ICP-CVD $SiO_2$ by optimization of gas inlet position)

  • 김영욱;양원균;고석일;주정훈
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2007년도 춘계학술발표회 초록집
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    • pp.97-98
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    • 2007
  • $SiH_4-Ar-O_2$ ICP-CVD에서 증착된 $SiO_2$막의 두께 균일도를 개선시키기 위해 반응가스 주입구의 위치가 두께 균일도에 영향을 주었을 것으로 예상하고, CFD-ACE를 이용하여 2차원 모델링을 하여 최적데이타를 도출하였다.

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Anode Layer Linear Ion Source for Roll-to-Roll Process

  • Kim, Do-Geun;Lee, Seunghun;Kim, Jong-Kuk
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2012년도 춘계학술발표회 논문집
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    • pp.128-128
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    • 2012
  • Korea institute of materials science (KIMS) has researched an anode layer linear ion source (ALIS) for various roll-to-roll treatment processes. The ALIS can be used to Ar ion beam (1~2 keV) treatment, and diamond-like carbon coating and so on. The treatment width of ALIS is 500 mm with a uniformity below 5 % (=(Max-min)/(Max+min)). We also demonstrate the status of development of ALIS in a roll-to-roll industry.

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반응표면모델(RSM)에 의한 평면연삭조건 최적화 및 평가 (Analysis and Optimization of Grinding Condition by Response Surface Model)

  • 김상오;곽재섭;구양;심성보;정영득;하만경
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1257-1260
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    • 2005
  • Grinding process has unique characteristics compared with other machining processes. The cutting edges of the grinding wheel don't have uniformity and act differently on the workpiece at each grinding. The response surface analysis is one of various methods for optimizing and evaluating the process parameters to achieve the desired output. In this study, the effect of the grinding parameters on outcomes of the surface grinding was analyzed experimently. To predict the grinding outcomes and to select the grinding conditions before grinding, the second-order response surface models for the grinding force and the surface roughness were developed.

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Unipolar pulse를 이용하여 형성된 Al6061 합금 표면의 MAO 코팅의 표면 구조에 대한 연구 (Surface Morphological Properties of Micro-arc Oxidation Coating on Al6061 Alloys using Unipolar Pulse)

  • 김남열;박승호;박기용;최진섭
    • 한국표면공학회지
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    • 제50권5호
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    • pp.421-426
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    • 2017
  • Herein, we investigated surface morphological characteristics of anodic films on Al6061 alloy prepared by unipolar pulsed Micro-arc oxidation (MAO) in a mixed solution of $Na_2SiO_3$ + KOH. The number and size of pores as well as craters on anodic alumina surface were studied as a function of different voltages, duty cycles and applied anodic current densities. The morphological characteristics of all samples were investigated by scanning electron microscopy, conforming that the most uniform surface morphology of MAO films on Al1050 alloy was obtained at high applied current density with low duty cycle.

SECFR 시스템의 차량적용을 위한 분무균일도향상에 관한 연구 (A Study for Improving Spray Uniformity of the SECFR System for Vehicle Applications)

  • 손정욱;우승철;김수겸;이기형
    • 한국분무공학회지
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    • 제20권2호
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    • pp.95-100
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    • 2015
  • Lower recirculated gas temperature at EGR system reduces NOx and PM emissions. However, EGR Cooler can be polluted by PM generated from recirculated EGR gas, and it reduces cooling efficiency and the amount of EGR gas simultaneously. The SECFR(Steam EGR Cooler Fouling Remover) system which uses the evaporated washer fluid steam caused by high temperature of EGR gas was manufactured for removing fouling generated on the cooler surface. Since an injection pressure of wind shield washer fluid in the vehicle is approximately 0.5 bar, it is not enough to atomize the injected washer fluid. Thus, it is necessary to apply a method to atomize the washer fluid. In this study, the impinging plate was used to promote the atomization of spray washer fluid for the purpose of apply SECFR system to vehicles and measured the DAR(Droplet Area Ratio) and DUI(Droplet Uniformity Index) through the spray visualization.

코팅 공정에서 공기를 고려한 코터형상 및 운전조건에 따른 코팅현상 해석 (Computer Simulation of Coating Behavior Including Air for Various Coater Geometries and Operational Conditions)

  • 김혜연;류민영;최종근
    • 소성∙가공
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    • 제18권2호
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    • pp.156-159
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    • 2009
  • Slot coating has been wide spread in photo-resist coating on the glass for liquid crystal display. Die in slot coater consists of manifold and land. Material comes in inlet of the die and flow into the manifold and then flow out through the land. The coating thickness variations along the die length depend upon inside of die design such as manifold and die land. However the coating thickness variations along the moving direction(coating direction) of the coater depend upon the operational conditions of coater as well as die lip design. The coating behaviors including atmospheric air have been investigated in this study. Die geometries considered in this study were nozzle gap and length of the die lip. Coating gap and coating speed were the variables fur coating operational conditions. When the nozzle gap and length of die lip increased climbing effect of PR on the downstream die lip was reduced. Subsequently uniformity of coating thickness improved. Uniformity of coating thickness also enhanced as coating gap and coater speed increased. The uniformity of coating gap was related to the velocity vector distributions on the coating surface.

진공상태에서의 전열현상에 대한 실험적 연구 (Experimental Study of Heat Transfer in Vacuum Furnace)

  • 양제복;김원배;동상근
    • 한국연소학회:학술대회논문집
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    • 대한연소학회 2003년도 제27회 KOSCO SYMPOSIUM 논문집
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    • pp.109-113
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    • 2003
  • Low pressure or vacuum carburizing(LPC) has undergone major further developments since 1980 and now it has achieved industrial maturity. The advantage of low pressure vacuum carburizing over gas carburizing is not only the creation of surface entirely free of oxide and environmentally friendly but also a reduction in batch times, lower gas and energy consumption and the prevention of soot. In this study the experiment was carried out to investigate the effects of vacuum atmosphere in the heating furnace. Heat transfer rate and uniformity of temperatures of test samples in the pressure range of a few 0.1torr was examined on a test charge of 100kg. It is found that the fuel saving rate due to decreasing heating time reach to 20% in the vacuum heating mode as compared with atmospheric heating mode. Also the uniformity of temperatures in the samples was improved significantly in the vacuum heating mode. Also the effects of the RC fan for stirring atmosphere inside furnace was examined. Results shows RC fan appears to provide a reasonable tool for improving uniformity of temperature in the atmospheric heating mode.

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대면적 엣지형 LED 디스플레이의 광특성 향상을 위한 도광판설계 (Design of Light Guide Plate to Improve Optical Characteristics for Large-Area Edge-lit LED Display)

  • 이재용;신민호;김종섭;김영주
    • 정보저장시스템학회논문집
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    • 제9권1호
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    • pp.10-16
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    • 2013
  • Through the rapid development of LED TV, a large-area edge-lit backlight unit is widely researched in the display industry for enhancing the optical efficiency, luminous uniformity and slim design. In addition, an edge-lit backlight unit includes many optical sheets such as reflection sheet, prism sheet and diffuser sheet. However the function can be replaced by the carefully patterned light guide plate (LGP). Micro patterns which located on the top and bottom surface of light guide plate was designed by ray-tracing optical simulation. The designed patterns improved the light characteristics of LGP, including optical extraction efficiency and intensity distribution uniformity. These results suggest that it is very effective method to design edge-lit LGP with micro-patterns on both sides for large-area display and to reduce the fabrication cost.