Control of Bowing in Free-standing GaN Substrate by Using Selective Etching of N-polar Face (N-polar면의 선택적 에칭 방법을 통한 Free-standing GaN 기판의 Bowing 제어)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.29 no.1
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- pp.30-34
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- 2016