• Journal of the Korean Society for Precision Engineering
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• v.24 no.12
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• pp.88-94
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• 2007

A flexure hinge-based compliant stage driven by stack-type piezoelectric elements has high precision motion but small operational range due to the characteristics of the piezoelectric element. Since the common flexure hinges can be broken by excessive deflection when the displacement is amplified by a high amplification ratio, a flexure hinge mechanism for large deflection is required. A cartwheel-type flexure hinge has an advantage of larger deflection compared with the common flexure hinges. This study presents a rotation stage with cartwheel-type flexure hinges driven by a stack-type piezoelectric element. The characteristics and the performance of the rotation stage are described by the terms of principal resonance frequency, amplification ratio of rotational displacement, maximum rotational displacement and block moment, in which the terms are analyzed by geometric parameters of the rotation stage. The analyzed results will be used as the guideline of the design of the rotation stage.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.8
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• pp.798-803
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• 2009

This paper proposes a grating scanner which is driven by a stack-type piezoelectric element. The mechanism of the grating scanner is based on flexure hinges. Using some constraints, the compliant mechanism is designed and then verified by Finite Element Analysis. The designed compliant mechanism is manufactured by wire electro-discharge machining, and then integrated with a stack-type piezoelectric element for actuation and a capacitance displacement sensor for measuring ultra-precision displacement. Experiments demonstrates the characteristics and the performances of the grating scanner using the terms of working range, resonance frequency, bandwidth and resolution. The grating scanner is applicable to a Moire interferometry for measuring 3-dimensional microscopic surface.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.1023-1024
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.667-668
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• 2009

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.7 s.112
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• pp.739-745
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• 2006

This paper presents a novel type of hybrid dispensing head for IC fabrication and surface mount technology. The proposed mechanism consists of solenoid valve and piezoelectric stack as actuators, and provides positive-displacement and jet dispensing. The positive-displacement dispensing can produce desired adhesive amount without viscosity effect, while the jet dispensing can produce high precision adhesive amount. In order to determine the relationship between required voltage of the piezoelectric actuator and needle displacement, both static and dynamic analysis are undertaken, In addition, finite element analysis is performed in order to find optimal design parameters. Dispensing flow rate and pressure in the chamber are evaluated through fluid dynamic model.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.821-826
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• 2006

This paper presents a novel type of hybrid dispensing head for IC fabrication and surface mount technology. The proposed mechanism consists of solenoid valve and piezoelectric stack as actuators, and provides positive-displacement and jet dispensing. The positive-displacement dispensing can produce desired adhesive amount without viscosity effect, while the jet dispensing can produce high precision adhesive amount. In order to determine the relationship between required voltage of the piezo actuator and needle displacement, both static and dynamic analysis are undertaken, In addition, finite element analysis is performed in order to find optimal design parameters. Dispensing flow rate and pressure in the chamber are evaluated through fluid dynamic model.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.9
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.531-536
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• 2005

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that cost less and are faster than previous semiconductor processes have been developed for the production of electric paper and RFID. The system proposed in this study prints by spraying the molten metal, and consists of a nozzle, heating furnace, operating actuator, and an XYZ 3-axis stage, As an operating system, the piezoelectric(PZT) method has very valuable uses. However, the PZT actuator has a very big hysteresis characteristic due to the ferroelectric characteristics of the PZT element. This causes problems in the system position control characteristics and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. The study proposed a inverse hysteresis model, a mathematic modeling method that can express the geometric relationship between voltage and displacement, in order to reduce the hysteresis of the PZT actuator. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good precision position control performance.

• Journal of Power System Engineering
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• v.9 no.4
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• pp.162-167
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• 2005

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that are cost less and faster than previous semiconductor processes have been developed for the production of electric paper and RFID(Radio Frequency IDentification). The system proposed in this study prints by spraying the molten metal. And this system consist of a nozzle, heating furnace, operating actuator and an XYZ 3-axis stage. As an operating system, the piezoelectric(PZT) actuator is a very useful tool for position control of the metal printing system. However, the PZT actuator has a hysteresis nonlinearity due to the ferroelectric characteristics of the PZT element. This hysteresis causes problem position control characteristics in the system and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. In order to reduce the hysteresis nonlinearity of the PZT actuator, this proposed a inverse hysteresis model and a mathematic modeling method that can express the geometric relationship between voltage and displacement. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good tracking performance.