Precision position control of piezoelectric actuator

압전액추에이터 정밀 위치 제어

  • Published : 2005.06.01

Abstract

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that cost less and are faster than previous semiconductor processes have been developed for the production of electric paper and RFID. The system proposed in this study prints by spraying the molten metal, and consists of a nozzle, heating furnace, operating actuator, and an XYZ 3-axis stage, As an operating system, the piezoelectric(PZT) method has very valuable uses. However, the PZT actuator has a very big hysteresis characteristic due to the ferroelectric characteristics of the PZT element. This causes problems in the system position control characteristics and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. The study proposed a inverse hysteresis model, a mathematic modeling method that can express the geometric relationship between voltage and displacement, in order to reduce the hysteresis of the PZT actuator. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good precision position control performance.

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