Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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A Piezo-driven Fine Manipulation System Based on Flexure Hinges for Manipulating Micro Parts

미세 부품 조작을 위한 탄성힌지 기반 압전소자 구동형 초정밀 머니플레이션 시스템

  • 최기봉 (한국기계연구원 나노융합기계연구본부) ;
  • 이재종 (한국기계연구원 나노융합기계연구본부) ;
  • 김기홍 (한국기계연구원 나노융합기계연구본부) ;
  • 고국원 (선문대학교 정보통신공학과)
  • Published : 2009.09.01
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Abstract

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

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References

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