• 제목/요약/키워드: single buffer layer

검색결과 107건 처리시간 0.035초

전자빔 증착법으로 이축배향된 Ni-3%W 기판 위에 높은 증착률로 제조된 $CeO_2$ 완충층에 대한 연구 (A study on $CeO_2$ buffer layer on biaxially textured Ni-3%W substrate deposited by electron beam evaporation with high deposition rate)

  • 김혜진;이종범;김병주;홍석관;이현준;권병국;이희균;홍계원
    • 한국초전도ㆍ저온공학회논문지
    • /
    • 제13권1호
    • /
    • pp.1-5
    • /
    • 2011
  • [ $CeO_2$ ]has been widely used for single buffer layer of coated conductor because of superior chemical and structural compatibility with $ReBa_2Cu_3O_{7-{\delta}}$(Re=Y, Nd, Sm, Gd, Dy, Ho, etc.). But, the surface of $CeO_2$ layer showed cracks because of the large difference in thermal expansion coefficient between metal substrate and deposited $CeO_2$ layer, when thickness of $CeO_2$ layer exceeds 100 nm on the biaxially textured Ni-3%W substrate. The deposition rate has been limited to be less than 6 $\AA$/sec in order to get a good epitaxy. In this research, we deposited $CeO_2$ single buffer layers on biaxially textured Ni-3%W substrate with 2-step process such as thin nucleation layer(>10 nm) with low deposition rate(3 $\AA$/sec) and thick homo epitaxial layer(>240 nm) with high deposition rate(30 $\AA$/sec). Effect of deposition temperature on degree of texture development was tested. Thick homo epitaxial $CeO_2$ layer with good texture without crack was obtained at $600^{\circ}C$, which has ${\Delta}{\phi}$ value of $6.2^{\circ}$, ${\Delta}{\omega}$ value of $4.3^{\circ}$ and average surface roughness(Ra) of 7.2 nm within $10{\mu}m{\times}10{\mu}m$ area. This result shows the possibility of preparing advanced Ni substrate with simplified architecture of single $CeO_2$ layer for low cost coated conductor.

Effect of TiO2 buffer layer on the electrical and optical properties of IGZO/TiO2 bi-layered films

  • Gong, Tae-Kyung;joo, Moon hyun;Choi, Dong-Hyuk;Son, Dong-Il;Kim, Daeil
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
    • /
    • pp.178.1-178.1
    • /
    • 2015
  • In and Ga doped ZnO (IGZO) thin films were prepared by radio frequency magnetron sputtering without intentional substrate heating on glass substrate and TiO2-deposited glass substrates to consider the effect of a thin TiO2 buffer layer on the optical and electrical properties of the films. The thicknesses of the TiO2 buffer layer and IGZO films were kept constant at 5 and 100 nm, respectively. Since the IGZO/TiO2 bi-layered films show the higher FOM value than that of the IGZO single layer films, it is supposed that the IGZO/TiO2 bi-layered films will likely perform better in TCO applications than IGZO single layer films.

  • PDF

Optoelectrical properties of IGZO/Cu bi-layered films deposited with DC and RF magnetron sputtering

  • joo, Moon hyun;hyun, Oh-jung;Son, Dong-Il;Kim, Daeil
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
    • /
    • pp.178.2-178.2
    • /
    • 2015
  • In and Ga doped ZnO (IGZO) films were deposited on 5 nm thick Cu film buffered Polycarbonate (PC) substrates with RF magnetron sputtering and then the effect of Cu buffer layer on the optical and electrical properties of the films was investigated. While IGZO single layer films show the electrical resistivity of $1.2{\times}10-1{\Omega}cm$, IGZO/Cu bi-layered films show a lower resistivity of $1.6{\times}10-3{\Omega}cm$. Although the optical transmittance of the films in a visible wave length range is deteriorated by Cu buffer layer, IGZO films with 5 nm thick Cu buffer layer show the higher figure of merit of $2.6{\times}10-4{\Omega}-1$ than that of the IGZO single layer films due to the enhanced opto-electrical performance of the IGZO/Cu bi-layered films.

  • PDF

$CeO_{2}/BaTiO_{3}$ 이중완충막을 이용한 YBCO 박막 제작 (Fabrication of YBCO superconducting film with $CeO_{2}/BaTiO_{3}$double buffer layer)

  • 김성민;이상렬
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
    • /
    • pp.790-793
    • /
    • 2000
  • We have fabricated good quality superconducting YBa$_2$Cu$_3$$O_{7-x}$(YBCO) thin films on Hastelloy(Ni-Cr-Mo alloys) metallic substrates with CeO$_2$and BaTiO$_3$buffer layers in-situ by pulsed laser deposition in a multi-target processing chamber. YBCO film with CeO$_2$ single buffer layer shows T$_{c}$ of 71.64 K and the grain size less than 0.1 ${\mu}{\textrm}{m}$. When BaTiO$_3$is used as a single buffer layer, the grain size of YBCO is observed to be larger than that of YBCO/CeO$_2$by 200 times and the transition temperature of the film is enhanced to be about 84 K. CeO$_2$/BaTiO$_3$double buffer layer has been adopted to enhance the superconducting properties, which results in the enhancement of the critical temperature and the critical current density to be about 85 K and 8.4 $\times$ 10$^4$ A/cm$^2$ at 77 K, respectively mainly due to the enlargement of the grain size of YBCO film.ilm.

  • PDF

The growth of superlattice IGZO thin films using ZnO buffer layer grown by thermal atomic layer deposition

  • 조성운;조형균
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2013년도 춘계학술대회 논문집
    • /
    • pp.162-163
    • /
    • 2013
  • Single-crystal InGaZnO (IGZO) thin films were spontaneously formed as periodic layered structure along the c-axis by thermal treatment at high temperature. when the IGZO superlattice were synthesized by sol-gel method, the effects of preferred growth orientations and the flatness of ZnO buffer layer were investigated. $InGaO_3(ZnO)_2$ superlattice were favorably formed on ZnO buffer layer with single preferred orientation. Futhermore, it showed relatively high Seebeck coefficient and power factor.

  • PDF

Zno 버퍼층을 이용한 자발적 초격자구조를 갖는 IGZO 박막의 결정화 (Crystallization of IGZO thin film with spontaneously formed superlattice structure induced by Zno buffer layer)

  • 서동규;공보현;조형균
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
    • /
    • pp.4-4
    • /
    • 2010
  • Single-crystalline IGZO (Indium-Gallium-Zinc oxide) was fabricated on c-sapphire substrate. Single crystal ZnO was used as a buffer layer, and post-annealing was treated in $900^{\circ}C$ for crystallization of IGZO. Crystallized IGZO formed superlattice structure spontaneously induced to c-axis direction by ZnO butTer layer, the composition of IGZO was varied by amount of ZnO. Crystallinity and composition of IGZO was analyzed by X-ray Diffraction and Transmission Electron Microscopy.

  • PDF

나프록센이 각인된 생분해성 고분자 기반 다층 바이오소재의 제조 및 약물 방출 특성 (Preparation and Drug Release Properties of Naproxen Imprinted Biodegradable Polymers Based Multi-Layer Biomaterials)

  • 조은비;김한성;황민진;윤순도
    • 공업화학
    • /
    • 제34권2호
    • /
    • pp.161-169
    • /
    • 2023
  • 본 연구는 allbanggae starch (ABS), polyvinyl alcohol (PVA), alginic acid (SA)를 이용하여 naproxen (NP) 각인 starch 기반 다층 바이오소재를 제조하고, 물리화학적 특성과 약물 방출 제어 효과를 조사하였다. 또한, FE-SEM과 FT-IR 분석에 의해 제조한 다층 바이오소재의 특성을 조사하였다. 약물 방출 제어 효과와 경피 약물 전달 시스템의 적용 가능성을 확인하기 위해 NP 각인 다층 바이오소재로부터 NP 방출 특성을 사람의 체온인 36.5 ℃에서 다양한 pH buffer solution과 인공 피부를 이용하여 확인하였다. NP는 낮은 pH보다 높은 pH에서 1.3배 더 빠른 방출을 나타냈고, single-layer 바이오소재에서보다 multi-layer 바이오소재에서 약 4.0배 느린 방출이 일어남을 확인하였다. 인공 피부 방출에서도 동일하게 single-layer 바이오소재보다 multi-layer 바이오소재에서 약 4.0배 더 느린 약물 방출 결과를 나타내었다. 또한, double-layer와 triple-layer 바이오소재 모두 12시간 동안 지속적으로 NP가 방출되었음을 확인 하였다. NP 방출 mechanism을 규명하기 위해 수학적 모델링에 적용하여 비교했을 때, pH buffer solution에서의 방출은 Fickian diffusion mechanism, 인공 피부 방출은 empirical mechanism에 적합한 것을 확인하였다.

이축정렬된 Ni 금속모재에 RF 마그네트론 스퍼터링에 의해 증착된 $CeO_2$$Y_2O_3$ 완충층 박막 특성 (Epitaxial Growth of $CeO_2\;and\;Y_2O_3$ Buffer-Layer Films on Textured Ni metal substrate using RF Magnetron Sputtering)

  • 오용준;라정석;이의길;김찬중
    • Progress in Superconductivity
    • /
    • 제7권2호
    • /
    • pp.120-129
    • /
    • 2006
  • We comparatively studied the epitaxial growth conditions of $CeO_2$ and $Y_2O_3$ thin buffers on textured Ni tapes using rf magnetron sputtering and investigated the feasibility of getting a single mixture layer or sequential layers of $CeO_2$ and $Y_2O_3$ for more simplified buffer architecture. All the buffer layers were first deposited using the reducing gas of $Ar/4%H_2$ and subsequently the reactive gas mixture of Ar and $O_2$, The crystalline quality and biaxial alignment of the films were investigated using X-ray diffraction techniques (${\Theta}-2{\Theta},\;{\phi}\;and\;{\omega}\;scans$, pole figures). The $CeO_2$ single layer exhibited well developed (200) epitaxial growth at the condition of $10%\;O_2$ below an $450^{\circ}C$, but the epitaxial property was decreased with increasing the layer thickness. $Y_2O_3$ seldom showed optimum condition for (400) epitaxial growth. The sequential architecture of $CeO_2/Y_2O_3/CeO_2$ having good epitaxial property was achieved by sputtering at a temperature of $700^{\circ}C$ on the initial $CeO_2$ bottom layer sputtered at $400^{\circ}C$. Cracking of the sputtered buffer layers was seldom observed except the double layer structure of $CeO_2/Y_2O_3$.

  • PDF

TiCN 및 TiN/TiCN 박막의 구조와 피로거동 (Structure & Fatigue Behavior of TiCN and TiN/TiCN Thin Films)

  • 백창현;홍주화;위명용;강희재
    • 열처리공학회지
    • /
    • 제13권5호
    • /
    • pp.324-329
    • /
    • 2000
  • Microstructure, mechanical and fatigue behaviors of TiCN and TiN/TiCN thin films, deposited on quenched and tempered STD61 tool steel, were investigated by using XRD, XPS, hardness, adhesion and fatigue tests. The TiCN thin film is grown along the (100), (111) orientation, whereas the TiN/TiCN thin film is grown along the (111) orientation. The preferred orientation of TiN/TiCN thin film strongly depends on the TiN buffer layer whose orientation is (111), as is well-known. The TiN/TiCN thin film showed the higher adhesion compared with TiCN single layer because the TiN buffer layer, having good toughness, reduces the effects of the lower hardness of substrate. In the high cycle tension-tension fatigue test, the fatigue life of the TiCN and the TiN/TiCN coated steel increased approximately two to four times and five to nine times respectively compared with uncoated specimens. The TiN buffer layer in multilayer thin films plays an important role in reducing residual stress and fatigue crack initiation, and then in restraining the fatigue propagation.

  • PDF

PCI 익스프레스의 데이터 연결 계층에서 송신단 버퍼 관리를 위한 효과적인 방법 (An Effective Method to Manage the Transmitter's Buffer in the Data Link Layer of the PCI Express)

  • 현유진;성광수
    • 전자공학회논문지CI
    • /
    • 제41권5호
    • /
    • pp.9-16
    • /
    • 2004
  • PCI 익스프레스 디바이스의 데이터 연결 계층은 전송할 패킷을 저장하고 있는 송신 버퍼와 전송하였지만 아직 타겟 디바이스로부터 승인 받지 못한 패킷을 저장하고 있는 재전송 버퍼를 가지고 있어야 한다. 이렇게 전송 버퍼와 재전송 버퍼를 구분하여 구현할 경우 전송할 패킷이 전송 버퍼에 있다 하더라도 재전송 버퍼에 여유 공간이 없다면 더 이상 패킷을 전송 할 수 없다는 단점이 있다. 본 논문에서는 한 개의 버퍼로 전송 버퍼와 재전송 버퍼를 구현하는 방법을 제안한다. 제안된 버퍼 구조에서는 필요에 따라 버퍼의 공간을 유연하게 사용할 수 있기 때문에 버퍼 사용 및 데이터 전송 효율을 향상시킬 수 있다. 모의 실험 결과 버퍼의 전체 크기가 8K 바이트일 경우 제안된 방법이 버퍼를 분리하여 사용하는 방법에 비해 데이터 전송 효율이 평균 39% 향상되었다.