Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2015.08a
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- Pages.178.2-178.2
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- 2015
Optoelectrical properties of IGZO/Cu bi-layered films deposited with DC and RF magnetron sputtering
- joo, Moon hyun (School of Materials Science and Engineering, University of Ulsan) ;
- hyun, Oh-jung (School of Materials Science and Engineering, University of Ulsan) ;
- Son, Dong-Il (Dongkook Ind. Co., Ltd.) ;
- Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
- Published : 2015.08.24
Abstract
In and Ga doped ZnO (IGZO) films were deposited on 5 nm thick Cu film buffered Polycarbonate (PC) substrates with RF magnetron sputtering and then the effect of Cu buffer layer on the optical and electrical properties of the films was investigated. While IGZO single layer films show the electrical resistivity of