• Title/Summary/Keyword: silicon sludge

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Removal of Fe, Si from Silicon Carbide Sludge Generated in the Silicon Wafer Cutting Process (실리콘 웨이퍼 절단공정(切斷工程)에서 발생(發生)하는 실리콘 카바이드 슬러지로부터 철(鐵), 실리콘 제거(除去))

  • Park, Hoey Kyung;Go, Bong Hwan;Park, Kyun Young;Kang, Tae Won;Jang, Hee Dong
    • Resources Recycling
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    • v.22 no.2
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    • pp.22-28
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    • 2013
  • In the present study, the possibility of recovering and recycling the silicon carbide(SiC) from a silicon sludge by removing Fe and Si impurities was investigated. Si and SiC were separated from the silicon sludge using centrifugation. The separated SiC concentrate consisted of Fe, Si and SiC, in which Fe and Si were removed to recover the pure SiC. Leaching with acid/alkali solution was compared with the vapor-phase chlorination. The Fe concentration removed in the SiC was 49 ppm, and it was separated by leaching with 1 M HCl solution at $80^{\circ}C$ for 1 h. The Si concentration removed in the SiC was 860 ppm, and it was separated by leaching with 1M NaOH solution at $50^{\circ}C$ for 1 h. The SiC concentrate was chlorinated in a tubular reactor, 2.4 cm in diameter and 32 cm in length. The boat filled with SiC concentrate was located at the midpoint of the alumina tube, then, the chlorine and nitrogen gas mixture was introduced. The Fe and Si concentration removed in the SiC were 48 ppm and 405 ppm, respectively, at $500^{\circ}C$ reactor temperature, 4 h reaction time, 300 cc/min gas flow rate, and 10% $Cl_2$ gas mole fraction.

Study on the Producing SiC Based Briquette for Raised Temperature of Molten Steel using Si Sludge Induced in the Process of Si Fabrication (실리콘 제조 공정에서 발생한 실리콘 슬러지를 활용한 용강 SiC계 승온제 제조 연구)

  • Lee, Chang-Hyun;Lee, Sang-Ro;Park, Man-Bok;Koo, Yeon-Soo;Lee, Man-Seung
    • Resources Recycling
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    • v.26 no.6
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    • pp.45-49
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    • 2017
  • Most Waste slurry is produced in the process of silicon manufacturing for semiconductor industry, containing silicon (Si) and silicon carbide (SiC). Waste slurry is simply stored with solidifying by cement or buried. On the other hand, it was suggested in this study that the waste slurry should be used for heating source as supplementary material in steel making process. The waste slurry was refined and pulverized, which was recycled into SiC-based sludge briquette. Chemical composition for SiC-based sludge briquette was analyzed and the feature of heating source was observed in accordance with the injection time and input amount. As a result, SiC-based sludge briquette in terms of low cost and high efficiency had an effect on increasing liquid steel temperature in steel making plants.

Synthesis of LiDAR-Detective Black Material via Recycling of Silicon Sludge Generated from Semiconductor Manufacturing Process and Its LiDAR Application (반도체 제조공정에서 발생하는 실리콘 슬러지를 재활용한 라이다 인지형 검은색 소재의 제조 및 응용)

  • Minki Sa;Jiwon Kim;Shin Hyuk Kim;Chang-Min Yoon
    • Journal of the Korea Organic Resources Recycling Association
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    • v.32 no.1
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    • pp.39-47
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    • 2024
  • In this study, LiDAR-detective black material is synthesized by recycling silicon sludge (SS) that is generated from semiconductor manufacturing process, and its recognition is confirmed using two types of LiDAR sensors (MEMS and Rotating LiDAR). In detail, metal impurities on the surface of SS is removed, followed by coating of titanium dioxide (TiO2) and subsequent chemical reduction to obtain SS-derived black TiO2 (SS/bTiO2) material. As-prepared SS/bTiO2 is mixed with transparent paint to prepare hydrophilic black paints and applied to a glass substrate using a spray gun. SS/bTiO2-based paint shows similar blackness (L*=15.7) compared to commercial carbon black-based paint, and remarkable NIR reflectance (26.5R%, 905nm). Furthermore, MEMS and Rotating LiDAR have successfully detected the SS/bTiO2-based paint. This is attributed to the occurrence of high reflection of light at the interface between the black TiO2 and the silicon sludge according to the Fresnel's reflection principle. Hence, the new application field to effectively recycle silicon sludge generated in the semiconductor manufacturing process has been presented.

Recycling of Cutting Oil from Silicon Waste Sludge of Solar Wafer (태양광용 웨이퍼 실리콘 폐슬러지로부터 절삭유의 재생)

  • Um, Myeong-Heon;Lee, Jong-Jib;Ha, Beom Yong
    • Clean Technology
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    • v.22 no.4
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    • pp.274-280
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    • 2016
  • In this study, it was to develop a chemical method that can recycle the cutting oil which accounts for about 25% of the cost of the process among containing materials of silicon waste sludge generated in the process for producing a solar cell wafer. The 7 types of reagents have been used, including acetone, HCl, NaOH, KOH, $Na_2CO_3$, HF, $CH_2Cl_2$, etc. for this experiment. And It was carried out at a speed of 3000 rpm for 60 minutes centrifugation after performing a reaction with a waste sludge at various concentrations. As a result, the best reagents and conditions for separating the solid such as a silicon powder and a metal powder and liquid cutting oil were identified as 0.3 N NaOH. It is found to be pH 6.05 in a post-processing recycled cutting oil with 0.3 N NaOH after reaction of waste sludge and 0.1 N HCl which is effective to remove metal powder in order to adjust the pH to suit the properties of the weak acid is a commercially available cutting oil and it showed excellent turbidity than when applied to sludge with 0.3 N NaOH alone. The results of FT-IR analysis which can compare the properties of the commercially available cutting oil shows it has a possibility of recycling oil. The cutting oil recovery rate obtained through the experiment was found to be 86.9%.

Briquetting of Waste Silicon Carbide Obtained from Silicon Wafer Sludges (실리콘 wafer sludge로부터 얻어진 SiC의 단광화 기술)

  • Koo, Seong Mo;Yoon, Su Jong;Kim, Hye Sung
    • Journal of Powder Materials
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    • v.23 no.1
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    • pp.43-48
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    • 2016
  • Waste SiC powders obtained from silicon wafer sludge have very low density and a narrow particle size distribution of $10-20{\mu}m$. A scarce yield of C and Si is expected when SiC powders are incorporated into the Fe melt without briquetting. Here, the briquetting variables of the SiC powders are studied as a function of the sintering temperature, pressure, and type and contents of the binders to improve the yield. It is experimentally confirmed that Si and C from the sintered briquette can be incorporated effectively into the Fe melt when the waste SiC powders milled for 30 min with 20 wt.% Fe binder are sintered at $1100^{\circ}C$ upon compaction using a pressure of 250 MPa. XRF-WDS analysis shows that an yield of about 90% is obtained when the SiC briquette is kept in the Fe melt at $1650^{\circ}C$ for more than 1 h.

Fabrication of TiO2 Coated Si Nano Particle using Silicon Sawing Sludge (실리콘 절삭 슬러지를 이용한 TiO2 코팅 나노 실리콘 입자의 제조)

  • Seo, Dong Hyeok;Yim, Hyeon Min;Na, Ho Yoon;Kim, Won Jin;Kim, Ryun Na;Kim, Woo-Byoung
    • Journal of Powder Materials
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    • v.28 no.5
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    • pp.423-428
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    • 2021
  • Here, we report the development of a new and low-cost core-shell structure for lithium-ion battery anodes using silicon waste sludge and the Ti-ion complex. X-ray diffraction (XRD) confirmed the raw waste silicon sludge powder to be pure silicon without other metal impurities and the particle size distribution is measured to be from 200 nm to 3 ㎛ by dynamic light scattering (DLS). As a result of pulverization by a planetary mill, the size of the single crystal according to the Scherrer formula is calculated to be 12.1 nm, but the average particle size of the agglomerate is measured to be 123.6 nm. A Si/TiO2 core-shell structure is formed using simple Ti complex ions, and the ratio of TiO2 peaks increased with an increase in the amount of Ti ions. Transmission electron microscopy (TEM) observations revealed that TiO2 coating on Si nanoparticles results in a Si-TiO2 core-shell structure. This result is expected to improve the stability and cycle of lithium-ion batteries as anodes.

SiC Synthesis by Using Sludged Si Power (폐슬러지 Si 분말을 이용한 SiC 제조)

  • 최미령;김영철;장영철
    • Journal of the Microelectronics and Packaging Society
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    • v.10 no.3
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    • pp.67-71
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    • 2003
  • Sawing silicon ingot with abrasive slurry generates sludge that includes abrasive powders, cutting oil, and silicon powders. The abrasive powders and cutting oil are being separated and reused. Mixing the remained stodged silicon powders with carbon powders and subsequent heat-treatment are conducted to produce silicon carbide. The size of SiC whiskers and powders was smaller than the conventionally grown silicon carbide whiskers that were synthesized by adding micron-size metal impurities. Impurity related mechanism is attributed to the formation of the silicon carbide whiskers, as metal impurities are contained in the stodged silicon powders.

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Fabrication of Nano Porous Silicon Particle with SiO2 Core Shell for Lithium Battery Anode (리튬 배터리 음극용 SiO2 코어 쉘을 갖춘 나노 다공성 실리콘 입자 제조)

  • Borim Shim;Eunha Kim;Hyeonmin Yim;Won Jin Kim;Woo-Byoung Kim
    • Korean Journal of Materials Research
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    • v.34 no.7
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    • pp.370-376
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    • 2024
  • In this study, we report significant improvements in lithium-ion battery anodes cost and performance, by fabricating nano porous silicon (Si) particles from Si wafer sludge using the metal-assisted chemical etching (MACE) process. To solve the problem of volume expansion of Si during alloying/de-alloying with lithium ions, a layer was formed through nitric acid treatment, and Ag particles were removed at the same time. This layer acts as a core-shell structure that suppresses Si volume expansion. Additionally, the specific surface area of Si increased by controlling the etching time, which corresponds to the volume expansion of Si, showing a synergistic effect with the core-shell. This development not only contributes to the development of high-capacity anode materials, but also highlights the possibility of reducing manufacturing costs by utilizing waste Si wafer sludge. In addition, this method enhances the capacity retention rate of lithium-ion batteries by up to 38 %, marking a significant step forward in performance improvements.

Preparation of Silica Nanoparticles via Recycling of Silicon Sludge from Semiconductor Dicing Process and Electro-responsive Smart Fluid Application (반도체 다이싱 공정에서 발생하는 실리콘 슬러지를 재활용한 실리카 나노입자의 제조 및 전기감응형 유체로의 응용)

  • Yeon-Ryong Chu;Suk Jekal;Jiwon Kim;Ha-Yeong Kim;Chan-Gyo Kim;Minki Sa;Hyung Sub Sim;Chang-Min Yoon
    • Journal of the Korea Organic Resources Recycling Association
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    • v.31 no.3
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    • pp.15-25
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    • 2023
  • In this study, silicon sludge from semiconductor dicing process is recycled to fabricate silica nanoparticles, which are applied as dispersing materials for electro-responsive (ER) smart fluid. In specific, metal impurities are removed from silicon sludge by acid washing to obtain the high-purity silicon powder. And then, silica nanoparticles are synthesized by facile hydrothermal method employing the silicon powder as reactant material. To control the size of silica nanoparticles, the reaction time of hydrothermal method is varied as 8, 15, 20, and 30 hours are applied to control the size of silica nanoparticles. Sizes of silica nanoparticles are increased proportionally to the reaction time owing to the increased numbers of hydrolysis and condensation reactions. As-synthesized silica nanoparticles are prepared as electro-responsive smart fluids by dispersing into silicon oil. Silica nanoparticles synthesized by 30 hours of hydrothermal reaction (SiO2-H30) exhibit the highest shear stress of 21.4 Pa under an applied electric field strength of 3.0kV mm-1. Such enhancement in ER performance of SiO2-H30 among various silica nanoparticles are attribute to the reinforcing effect originated from the mixed particle size, which allowing the formation of rigid chain-like structures. Accordingly, this study successfully propose a recycling method of silicon sludge to synthesize silica nanoparticles and their derived ER fluids, which may suggest new possibility to ESG management emphasizing the eco-friendliness.

A Comparative Study on Morphologies and Characteristics of Silica Nanoparticles Recycled from Silicon Sludge Waste of Semiconductor Process Based on Synthesis Methods (반도체 공정에서 발생하는 폐실리콘 슬러지의 재활용을 통한 실리카 나노입자의 제조 및 합성법에 따른 형상 및 특성 비교 연구)

  • Jiwon Kim;Minki Sa;Yeon-Ryong Chu;Suk Jekal;Ha-Yeong Kim;Chan-Gyo Kim;Hyung Sub Sim;Chang-Min Yoon
    • Journal of the Korea Organic Resources Recycling Association
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    • v.31 no.3
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    • pp.5-13
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    • 2023
  • In this study, a comparative study is conducted on the synthesis methods for silica nanoparticle employing the silicon sludge waste generated from the semiconductor manufacturing processes. Specifically, acid-washed silicon sludge wastes with no impurities are employed as the precursors of sol-gel and hydrothermal methods for silica nanoparticles preparation. The morphologies and properties of silica nanoparticles synthesized via two synthetic methods are examined by various analysis methods. As a result, silica nanoparticles from the sol-gel method are fabricated with high purity and uniform shape, while the hydrothermal method exhibits advantages in yield and ease of synthetic process. This comparative study offers detailed experimental results on the two synthetic methods for silica nanoparticle synthesis, which may contribute to the establishment of manufacturing high-value materials using the by-products generated in the semiconductor process.