• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.167-167
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• 2011

Magnetic random access memory (MRAM) is one of the prospective semiconductor memories for next generation. It has the excellent features including nonvolatility, fast access time, unlimited read/write endurance, low operating voltage, and high storage density. MRAM consists of magnetic tunnel junction (MTJ) stack and complementary metal-oxide semiconductor (CMOS). The MTJ stack is composed of various magnetic materials, metals, and a tunneling barrier layer. For the successful realization of high density MRAM, the etching process of magnetic materials should be developed. Among various magnetic materials, FePt has been used for pinned layer of MTJ stack. The previous etch study of FePt magnetic thin films was carried out using $CH_4/O_2/NH_3$. It reported only the etch characteristics with respect to the variation of RF bias powers. In this study, the etch characteristics of FePt thin films have been investigated using an inductively coupled plasma reactive ion etcher in various etch chemistries containing $CH_4$/Ar and $CH_4/O_2/Ar$ gas mixes. TiN thin film was employed as a hard mask. FePt thin films are etched by varying the gas concentration. The etch characteristics have been investigated in terms of etch rate, etch selectivity and etch profile. Furthermore, x-ray photoelectron spectroscopy is applied to elucidate the etch mechanism of FePt thin films in $CH_4$/Ar and $CH_4/O_2/Ar$ chemistries.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.132-132
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• 2011

For the programming volume of PRAM, Ge2Sb2Te5(GST) thin films have been dominantly used and prepared by physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD). Among these methods, ALD is particularly considered as the most promising technique for the integration of PRAM because the ALD offers a superior conformality to PVD and CVD methods and a digital thickness control precisely to the atomic level since the film is deposited one atomic layer at a time. Meanwhile, although the IST has been already known as an optical data storage material, recently, it is known that the IST benefits multistate switching behavior, meaning that the IST-PRAM can be used for mutli-level coding, which is quite different and unique performance compared with the GST-PRAM. Therefore, it is necessary to investigate a possibility of the IST materials for the application of PRAM. So far there are many attempts to deposit the IST with MOCVD and PVD. However, it has not been reported that the IST can be deposited with the ALD method since the ALD reaction mechanism of metal organic precursors and the deposition parameters related with the ALD window are rarely known. Therefore, the main aim of this work is to demonstrate the ALD process for IST films with various precursors and the conformal filling of a nano size programming volume structure with the ALD?IST film for the integration. InSbTe (IST) thin films were deposited by ALD method with different precursors and deposition parameters and demonstrated conformal filling of the nano size programmable volume of cell structure for the integration of phase change random access memory (PRAM). The deposition rate and incubation time are 1.98 A/cycle and 25 cycle, respectively. The complete filling of nano size volume will be useful to fabricate the bottom contact type PRAM.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.408-408
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• 2012

It is well known that magnetic random access memory (MRAM) is nonvolatile memory devices using ferromagnetic materials. MRAM has the merits such as fast access time, unlimited read/write endurance and nonvolatility. Although DRAM has many advantages containing high storage density, fast access time and low power consumption, it becomes volatile when the power is turned off. Owing to the attractive advantages of MRAM, MRAM is being spotlighted as an alternative device in the future. MRAM consists of magnetic tunnel junction (MTJ) stack and complementary metal- oxide semiconductor (CMOS). MTJ stacks are composed of various magnetic materials. FePt thin films are used as a pinned layer of MTJ stack. Up to date, an inductively coupled plasma reactive ion etching (ICPRIE) method of MTJ stacks showed better results in terms of etch rate and etch profile than any other methods such as ion milling, chemical assisted ion etching (CAIE), reactive ion etching (RIE). In order to improve etch profiles without redepositon, a better etching process of MTJ stack needs to be developed by using different etch gases and etch parameters. In this research, influences of $O_2$ gas on the etching characteristics of FePt thin films were investigated. FePt thin films were etched using ICPRIE in $CH_4/O_2/Ar$ gas mix. The etch rate and the etch selectivity were investigated in various $O_2$ concentrations. The etch profiles were studied in varying etch parameters such as coil rf power, dc-bias voltage, and gas pressure. TiN was employed as a hard mask. For observation etch profiles, field emission scanning electron microscopy (FESEM) was used.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.34 no.1
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• pp.91-98
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• 2016

In order to apply Kriging methods for geostatistics of spatial data, an estimation of spatial coherency functions is required priorly based on the spatial distance between measurement points. In the study, the typical coherency functions, such as semi-variogram, homeogram, and covariance function, were estimated using the national geoid model. The test area consisting of 2°×2° and the Unified Control Points (UCPs) within the area were chosen as sampling measurements of the geoid. Based on the distance between the control points, a total of 100 sampling points were grouped into distinct pairs and assigned into a bin. Empirical values, which were calculated with each of the spatial coherency functions, resulted out as a wave model of a semi-variogram for the best quality of fit. Both of homeogram and covariance functions were better fitted into the exponential model. In the future, the methods of various Kriging and the functions of estimated spatial coherency need to be studied to verify the prediction accuracy and to calculate the Mean Squared Prediction Error (MSPE).

• Journal of Korean Society for Geospatial Information Science
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• v.22 no.3
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• pp.31-37
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• 2014

It is usual for the officially land price of agricultural field parcels to be determined by real estate appraisers's experienced knowledge and intuition without considering quantitatively physical factors that directly influence agricultural productivity. Solar radiation is the most important predictor of agricultural productivity. GIS based simulation techniques were used to evaluate correlation between the officially land price and solar radiation for agricultural field parcels. The results show that officially land price shows random distribution patterns in relation to solar radiation, which proves that officially land price for agricultural field does not reflect agricultural productivity. It is anticipated that this research output could be used as a valuable reference to support more scientific and objective decision-making in the official pricing process of agricultural field parcels.

• Journal of the Institute of Convergence Signal Processing
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• v.6 no.4
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• pp.206-211
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• 2005

We describe the design for a correlator and an access code generator in bluetooth system. These are used for a connection setting, a packet decision and a clock synchronization between Bluetooth units. The correlator consists of two blocks; carry save adder based on Wallace tree and threshold-value decision block. It determines on an useful packet and clock-synchronization for input signal of 1.0Mbps through the sliding-window correlating. The access-code generator also consists of two blocks; BCH(Bose-Chadhuri-Hocquenghem) cyclic encoder and control block. It generates the access-codes according to four steps' generation process based on Bluetooth standard. In order to solve synchronization problem, we make use of any memory as a pseudo random sequence. The proposed correlator and access-code generator were coded with VHDL. An FPGA Implementation of these modules and the simulation results are proved by Xilinx chip. The critical delay and correlative margin based on synthesis show the 4.689ns and the allowable correlation-error up to 7-bit.

• KSBB Journal
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• v.20 no.2 s.91
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• pp.88-92
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• 2005

Phosphorylation of amino acid residues in proteins, plays a major role in biological mechanism. Phosphorylation acts as a process regulating the protein activity in variable pathways such as metabolism, signal transduction and cell division. Therefore the development of ligands for phosphoamino acids are an important work for protein analysis and proteomics studies. In this study, RNA aptamers for o-phosphoserine, o-phosphotyrosine and o-phosphotyrosine which appears frequently in nature were developed by in vitro evolution method. We could obtain similar sequences from random RNAs of 40 mer by SELEX method through 10 cycles. As result, the aptamers for o-phosphoserine and o-phosphothreonine among phosphoamino acids aptamers showed high affinity of Kd=2.60 nM and 2.65 nM for their target molecules, respectively. In addition, these aptamers could be confirmed the high selectivity for their target.

• Survey Research
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• v.7 no.2
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• pp.71-95
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• 2006

This article presents strengths of Computer-Assisted Personal Interviewing(CAPI) in social surveys with complicated questionnaires, from examples of a pilot and the first year surveys of the Korean Longitudinal Study of Ageing(KLoSA). This study focuses on how to improve the quality of data by using CAPI and finds five strengths among others. First of all, CAPI can contribute to reducing response errors by structuring the logic and path of questionnaires, setting a response range, and maintaining response consistency. Second, CAPI enhances convenience of interviewing by allowing customized questions and automatic calculation and scoring. It also allows the 'help' function. Third, its random arrangement of questions prevents response order effect and/or questions order effect. Fourth, CAPI can raise the response rate by reducing item non-responses. Fifth, it makes it easy monitoring interviewing, thus helps supervising interviewers and modifying questionnaires when necessary. These merits of CAPI contribute to reducing possible errors in the process of interviewing, therefore improve the data quality.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.24 no.7A
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• pp.1028-1035
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• 1999

To increase the throughput of data transmission in burst-mode TDMA communication systems and also to get a good BER performance at the same time, it is essential to rapidly acquire the carrier while keeping the desirable tracking performance. To achieve this goal, in this paper, a new decision-directed carrier recovery algorithm is presented. The proposed scheme does not incorporate the PLL and suppress the Gaussian random process of input noise by the pre-stage low pass filter so as to get both the fast acquisition and a good performance. Through computer simulations, the performance of the scheme is analyzed with respect to the acquisition time and bit error rate. The cycle slip in the proposed scheme is seldom observed at very low SNR environment in contrast to the previous proposed one. Because of this merit, it is not required to do the differential encoding and decoding in the proposed scheme.

• Journal of Korea Society of Industrial Information Systems
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• v.23 no.2
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• pp.29-39
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• 2018

In this paper, we discuss a discrete-time queueing system with dyadic server control policy that combines workload control and multiple vacations. Customers arrive at the system with Bernoulli arrival process. If there is no customer to serve in the system, an idle single server spends a vacation of discrete random variable V and returns. The server repeats the vacation until the total service time of waiting customers exceeds the predetermined workload threshold D. In this paper, we derived the steady-state workload distribution of a discrete-time queueing system which is operating under a more realistic and flexible server control policy. Mean workload is also derived as a performance measure. The results are basis for the analysis of system performance measures such as queue lengths, waiting time, and sojourn time.