• Title/Summary/Keyword: process measurement

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Measurement of Oxygen by FTIR in Silicon wafer process steps (실리콘 웨이퍼 공정스텝에서 FTIR에 의한 산소의 측정)

  • 김동수;정원채
    • Proceedings of the IEEK Conference
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    • 2000.06b
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    • pp.68-71
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    • 2000
  • In this paper, we have measured the oxygen contents by FTIR in silicon wafer various process technology(slicing, lapping, polishing). The measured data are also compared with the data of etching process(KOH, Bright etching). Also we have measured the surface morpology in backside silicon wafer after etching treatment and etch pit density due to OISF after 4 step high temperature annealing process with optical microscope.

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Design of fuzzy controller for activated sludge process in sewage water treatment system (하수처리 시스템에서의 활성오니공정 제어를 위한 퍼지제어기 설계)

  • 황희수;오성권;김현기;우광방
    • 제어로봇시스템학회:학술대회논문집
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    • 1990.10a
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    • pp.209-212
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    • 1990
  • The activated sludge process is a commonly used method for treating sewage and waste waters. The process is characterized by a lack of measurement instrumentations and control goals that are neither well defined nor well understood. In the present study the concept of fuzzy control is employed for such process in which a design method for fuzzy controller based on a multivariable fuzzy reasoning algorithms is investigated and then simulation results are presented.

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Development of Measurement and Evaluation Process for Risk-based Configuration Factors in Mixed Used Development in Urban Regeneration Projects (복합용도 도시재생사업에서의 리스크 기반 변화요인 측정 및 평가 프로세스 개발)

  • Son, Myung-Jin;Hyun, Chang-Taek
    • Korean Journal of Construction Engineering and Management
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    • v.13 no.6
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    • pp.94-106
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    • 2012
  • In recent years, the risks and uncertainties associated with mixed used development in urban regeneration projects which have actively been implemented at home and abroad have been on the rise due to the uncertainties of the initial business plan, difficulty of financing, increase in total cost and schedule delay. To cope with rapid social and economic changes and optimize benefits, a risk-based configuration management process that considers life cycle is required, along with accurate planning in the early stage of the business. In addition, it is necessary to prepare measures that can respond to the evaluation and measurement of the configuration factors in relation to the business process. However, the focus of previous studies on configuration management in the field of construction was mainly on humanities and the sociological aspects such as organization, leadership, ideology and similar concepts. There has been limited research on the process and measurement and evaluation methods for configuration factors required in decision-making on the risks and changes that can occur in the actual project implementation phase. Accordingly, in this study, we defined risk-based configuration factors and developed a process and MECA/3DAM/CII methodology to measure and evaluate these factors so as to carry out systematic configuration management of mixed used development in urban regeneration projects.

A Reliability Study of Tape and Photography Measurement Techniques for Scapular Position (줄자 및 사진촬영 측정을 이용한 어깨뼈 벌림 측정에 대한 신뢰도 연구)

  • Kim, Moon-Hwan;Yun, Sung-Joon;Ha, Sung-Min
    • Physical Therapy Korea
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    • v.20 no.3
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    • pp.74-80
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    • 2013
  • The purpose of this study was to determine the reliability of distance measurements from the medial border of the scapula to the spinous process of the thoracic vertebrae when obtained using tape and photography measurements. The study included 20 healthy subjects (10 males, 10 females); for a total of 40 scapula measurements. The distance measurements made using tape or photography methods were conducted with the subject in a standing position. Repeated tape and photography measurements were conducted in two sessions on different days by two examiners to assess the inter-rater and intra-rater reliability of the two methods. The reliability of scapular distance measured using tape and photography methods was tested using intraclass correlation coefficients (ICC(3,1)) and the standard error of measurement (SEM). The inter-rater reliability of the tape measurement method was excellent (ICC=.77) and the intra-rater reliability was fair to good (ICC=.74). The inter-rater and intra-rater reliabilities of the photography measurement method were excellent (ICC=.76 and .76 respectively). Our results suggest that photography measurement is an objective and qualitative measurement tool for scapular distance measurements.

A Review of Temperature Measurement of Fire Driven Flow Using Thermocouple - Measurement Bias (열전대에 의한 화재유동의 온도측정에 관한 검토 - 측정오차)

  • Kim, Sung-Chan
    • Fire Science and Engineering
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    • v.24 no.6
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    • pp.98-103
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    • 2010
  • A series of fire experiments have been performed to examine the measurement bias of the bare bead thermocouple widely used in fire testing and analyze the measurement bias of bare bead thermocouple comparing with the measured temperature using the aspirated thermocouple. The measured temperature of the bare bead thermocouple was lower than that of the aspirated thermocouple in the hot upper layer while it showed opposite trends in the upper layer. Also, the bare bead thermocouple showed higher measurement bias in the lower layer rather than upper layer in the compartment fire. The maximum relative percentage error of the bare bead thermocouple against the aspirated thermocouple reached 250% in the present study. The present study points out the need of correction process of the measured temperature by bare bead thermocouple for improving the reliability of the fire tests.

Manufacture and Measurement Uncertainty Analysis of a Venturi Pipe for Airflow Measurement in Altitude Engine Test (엔진 고공 시험에서 공기 유량 측정용 벤투리 파이프의 제작 및 측정 불확도 분석)

  • Yang, In-Young;Oh, Joong-Hwan
    • The KSFM Journal of Fluid Machinery
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    • v.13 no.6
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    • pp.36-41
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    • 2010
  • Design, manufacture and calibration procedures of a venturi pipe flowmeter for airflow measurement in altitude engine test were discussed. Altitude engine test using venturi pipe was given as an example. The venturi was designed per the ISO standard of ISO5167, and was intented to include the entire airflow range in the test envelope of the gas turbine engine. Measurement uncertainty analysis was performed in the design procedure to investigate the effect of venturi geometry and sensor specification upon the measurement uncertainty. Manufacturing process was designed to minimize the deviation from the geometry of design. Calibration was performed to get the relationship between the discharge coefficient and the pipe Reynolds number. Then the uncertainty was assessed again using real data acquired during engine test. Through these procedures, it was possible to maintain the uncertainty of airflow measurement under 1 % for most of the operating envelope of the gas turbine engine. The discharge coefficient of the venturi pipe showed agreement with the value suggested in the ISO standard ISO5167-4 within 0.6 %.

Study on the Establishment of Large Building Airtightness Measurement Standards (대규모 건물의 기밀성능 측정기준 수립에 관한 연구)

  • Lee, Dong-Seok;Ji, Kyung-Hwan;Jo, Jae-Hun
    • Journal of the Korean Solar Energy Society
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    • v.34 no.1
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    • pp.117-124
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    • 2014
  • Airtightness standards using fan pressurization method are normally used for measuring small buildings, detached houses, and apartment units. And, it is easy to conduct airtightness measurement through this fan pressurization method. However, it can be difficult to achieve accurate measurement results for the large buildings as the height and volume of the buildings have been increased. In this paper, we studied the principle of airtightness method by fan pressurization. And, we reviewed the measurement process described in ISO 9972, EN 13829, ASTM E779, ATTMA TS 1, CAN/CGSB 149.15, and JIS A 2201. Then, we categorized the methods' items according by air flow rate (Q) and pressure difference(${\Delta}P$). As a result, we made a comparison analysis on the measurement methods appeared in each standards. And, we achieved 5 test conditions about air flow rate and pressure difference to state requirements for large buildings airtightness measurement.

RADAR level measurement in Joule heated ceramic melter: A novel technique

  • Suneel, G.;Mahashabde, Mukesh;Borkotoky, Ritusmita;Sharma, Nitin Kumar;Pradeep, M.P.;Gayen, J.K.;Pimparkar, H.R.;Ravi, K.V.
    • Nuclear Engineering and Technology
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    • v.53 no.4
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    • pp.1176-1180
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    • 2021
  • The current study relates to RADAR (RAdio Detection and Ranging) application for level measurement of vitrified radioactive liquid nuclear waste. The vitrification of radioactive liquid waste is carried out in special equipment called 'Melters'. The study is directed towards the design and frequency modulation used in the level measurement of vitrified waste. More specifically, the RADAR design and frequency used for level measurement in a melter. This level measurement technique can also be used for dynamic vitrification process and can be used to measure the level variations without using any external medium/material and using only electromagnetic waves. Also, this technique is durable and accurate even under the high radioactive environment present inside the melter.

Fabrication and statistical characterization of Nb SQUID sensors for multichannel SQUID system

  • Kim, B.K.;Yu, K.K.;Kim, J.M.;Kwon, H.;Lee, S.K.;Lee, Y.H.
    • Progress in Superconductivity and Cryogenics
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    • v.22 no.4
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    • pp.62-66
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    • 2020
  • We fabricated superconducting quantum interference devices (SQUIDs) based on Nb Josephson junctions, and characterized the key parameters of the SQUIDs. The SQUIDs are double relaxation oscillation SQUIDs (DROSs) having larger flux-to-voltage transfer coefficient than the standard DC-SQUIDs. SQUID sensors were fabricated by using Nb junction technology consisted of a DC magnetron sputtering and a conventional photolithography process. In multichannel SQUID systems for whole-head magnetoencephalography measurement with a helmet-type SQUID array, we need about 336 SQUID sensors for each system. In this paper, we fabricated a few hundred SQUID sensors, measured the critical current, flux modulation voltage and decided if each tested SQUID can be used for the multichannel systems. As the criterion for the acceptance of the sensors, we chose the critical current and amplitude of the modulation voltage to be 8 ㎂ and 80 ㎶, respectively. The average critical current of the SQUIDs was 10.58 ㎂. The typical flux noise of the SQUIDs with input coil shorted was 2 μΦ0/√Hz at white region.