• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.830-833
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• 2003

This paper describes the fabrication and characteristics of 3C-SiCOI sotctures by SDB and etch-back technology for high-temperature MEMS applications. In this work, insulator layers were formed on a heteroepitaxial 3C-SiC film grown on a Si(001) wafer by thermal wet oxidation and PECVD process, successively. The pre-bonding of two polished PECVD oxide layers made the surface activation in HF and bonded under applied pressure. The wafer bonding characteristics were evaluated by the effect of HF concentration used in the surface treatment on the roughness of the oxide and pre-bonding strength. Hydrophilic character of the oxidized 3C-SiC film surface was investigated by ATR-FTIR. The strength of the bond was measured by tensile strengthmeter. The bonded interface was also analyzed by SEM. The properties of fabricated 3C-SiCOI structures using etch-back technology in TMAH solution were analyzed by XRD and SEM. These results indicate that the 3C-SiCOI structure will offers significant advantages in the high-temperature MEMS applications.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 하계종합학술대회 논문집(2)
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• pp.53-56
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• 2001

With the ever increasing clock frequency and integration level of CMOS circuits, I/O(input/output) and interconnect issues are becoming a growing concern. In this thesis, we propose the 2.5Gbps high speed input driver This driver consists of four different blocks, which are the high speed serializer , PECL(pseudo emitter coupled logic) Line Driver, PLL(phase lock loop) and pre-emphasis signal generator. The proposed pre-emphasis block will compensate the high frequency components of the 2.5Gbps data signal. Using the pre-emphasis block, we can obtain 2.5Gbps data signal with differential peak to peak voltage about 900 m $V_{p.p}$ This driver structure is on fabrication in 2.5v/10.25um 1poly, 5metal CMOS process.

• 한국공작기계학회논문집
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• 제18권2호
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• pp.137-143
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• 2009

This paper presents the fabrication of inchworm motor for high precision actuator system of large displacement and high force. The inchworm motor consists of a extend actuator that provides displacement of tool guide and two clamping actuators which provide the holding force. In order to avoid the PZT fracture, design of pre-load housing was conducted by flexure hinge structure, because PZT actuator has low tensile and shear. To design the pre-load housing and optimize the clamping mechanism, the static and dynamic analysis were conducted by finite element method. From these results, a prototype of the inchworm motor was fabricated and dynamic characteristic with respect to the various frequency was tested. The maximum velocity of the inchworm motor was $41.1{\mu}m/s$ at 16Hz.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.458-461
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• 2005

In this paper, a new type of inchworm motion actuator is developed in fabrication of actuators for micro-press machine. This is consisted of three piezoelectric actuators, one is for moving the tool guide and the other are for clamping the guide. The inchworm motor provides both high load and large displacement in small size actuator. PZT has compressive strength and often fails under tensile stress and pulling. Thus, in order to prevent failure, we have designed pre-load housing and accomplished FEM analysis. The pre-load housing was used for determining the optimal design condition by comparing the von-mises stresses with the change of hinge stiffness. Also, in order to predict the performance of the motor under certain conditions, the system model was simulated using MATLAB. This is open loop control actuator and driven by the period of input voltage.

• Nano
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• 제13권10호
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• pp.1850120.1-1850120.9
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• 2018

Two-dimensional poly(dimethylsiloxane) (PDMS) films with wavy patterns were studied in order to investigate reversible and irreversible wetting effects. Pre-strained, surface oxidized layers of PDMS were used to form relieved wavy geometries, on which hydrophobic functionalization was carried out in order to produce irreversible wetting effects. Wavy-patterned PDMS films showed time-dependent reversible wetting effects. The degree of surface wettability could be tuned by the choice of wavy groove geometries. And the groove geometries were controlled via $O_2$ plasma treatment and mechanical pre-straining. The pre-strained, buckled PDMS films were applied to the fabrication of hydrophobic polystyrene nano-patterns using colloidal self-assembly, where the colloids were arrayed in two-dimensional way. The wavy polystyrene films were found to be more hydrophobic relative to flat polystyrene films. The grooving methodology used in this study could be applied to enhancing the hydrophobicity of other types of polymeric thin films, eliminating the need for chemical treatment.

• 접착 및 계면
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• 제21권4호
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• pp.143-155
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• 2020

Sol-Gel 공정을 통해서 제조되는 유-무기 하이브리드 화합물들은 방청 코팅, 방빙 코팅(Anticing), 자가 세정 코팅, 반사 방지 코팅 등과 같은 기능성 코팅 재료로 널리 사용되어져 왔다. 특히 소수성 코팅 표면을 제조하기 위해서는 코팅표면의 표면에너지가 낮고 코팅 표면의 조도를 제어가 요구된다. 표면에너지와 표면 조도를 조절하는 전형적인 공정은 in-situ fabrication 공정, 'Pre-fluorinating/Post-roughening', 'Pre-roughening/ Post-fluorinating이다. 본 연구에서는 in-situ fabrication 공정인 Particle-Binder 공정을 이용해서 소수성 코팅표면을 제조하였다. 3관능기 유기실란화합물과 불소 함유 유기실란 화합물과의 가수분해 및 축합반응을 통해 제조된 불소함유 유-무기 하이브리드를 바인더로 사용하여서 무기물 나노입자와 혼합하여 소수성 코팅액을 제조하고 유리 기재 위에 스핀코팅 후 열건조하여서 코팅막을 제조하였다. 바인더인 유-무기 하이브리드 화합물의 불소 함유 실란화합물의 첨가량, 첨가순서, 무기물 나노입자 첨가량에 따른 코팅막의 물성 변화를 조사하였다. 분석결과 불소 함량이 10 wt%인 유-무기 하이브리드 화합물(GPTi-HF10)을 바인더로 사용하여서 제조된 코팅막이 가장 소수성이 우수하였으며 수접촉각은 (107.52 ± 1.6°), 이 바인더와 무기물 나노입자의 무게비가 1:3인 경우(GPTi-HF10-MS 3.0)에 가장 높은 수접촉각(130.84±1.99°)을 나타내었다.

• 한국건축시공학회지
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• 제18권3호
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• pp.277-283
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• 2018

공기를 획기적으로 감소시킬 수 있는 모듈러건축으로 유사 모듈이 반복되는 공동주택을 건설하는 안에 대해 현행의 시공방법을 고찰한 결과 설비시스템에서 개선할 점을 발견하고, 그 방법으로 공장제작과 현장설치부분을 구분해서 살펴보고 현재 모듈러생산사 실무진의 의견과 종합건설사 기술담당자의 의견으로 그 가능성을 확인하고자 했으며 그 과정에서 제기된 문제에 대해 원천적인 관점에서 쉽게 풀어나갈 수 있는 방법으로 유리한 설계안을 제안하였고, 접속부위의 누수하자와 같은 고질적 문제점에 대한 대안을 기재하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.75-75
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• 2015

Strong interactions between electromagnetic radiation and electrons at metallic interfaces or in metallic nanostructures lead to resonant oscillations called surface plasmon resonance with fascinating properties: light confinement in subwavelength dimensions and enhancement of optical near fields, just to name a few [1,2]. By utilizing the properties enabled by geometry dependent localization of surface plasmons, metal photonics or plasmonics offers a promise of enabling novel photonic components and systems for integrated photonics or sensing applications [3-5]. The versatility of the nanoplasmonic platform is described in this talk on three folds: our findings on an enhanced ultracompact photodetector based on nanoridge plasmonics for photonic integrated circuit applications [3], a colorimetric sensing of miRNA based on a nanoplasmonic core-satellite assembly for label-free and on-chip sensing applications [4], and a controlled fabrication of plasmonic nanostructures on a flexible substrate based on a transfer printing process for ultra-sensitive and noise free flexible bio-sensing applications [5]. For integrated photonics, nanoplasmonics offers interesting opportunities providing the material and dimensional compatibility with ultra-small silicon electronics and the integrative functionality using hybrid photonic and electronic nanostructures. For sensing applications, remarkable changes in scattering colors stemming from a plasmonic coupling effect of gold nanoplasmonic particles have been utilized to demonstrate a detection of microRNAs at the femtomolar level with selectivity. As top-down or bottom-up fabrication of such nanoscale structures is limited to more conventional substrates, we have approached the controlled fabrication of highly ordered nanostructures using a transfer printing of pre-functionalized nanodisks on flexible substrates for more enabling applications of nanoplasmonics.

• 한국CDE학회논문집
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• 제11권3호
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• pp.223-233
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• 2006

Layered manufacturing(LM) is emerging as a new technology that enables the fabrication of three dimensional heterogeneous objects such as Multi-materials and Functionally Gradient Materials (FGMs). Among various types of heterogeneous objects, more attention has recently paid on the fabrication of FGMs because of their potentials in engineering applications. The necessary steps for LM fabrication of FGMs include representation and process planning of material information inside an FGM. This paper introduces a new process planning algorithm that takes into account the processing of material information. The detailed tasks are discretization (i.e., decomposition-based approximation of volume fraction), orientation (build direction selection), and adaptive slicing of heterogeneous objects. In particular, this paper focuses on the discretization process that converts all of the material information inside an FGM into material features like geometric features. It is thus possible to choose an optimal build direction among various pre-selected ones by approximately estimating build time. This is because total build time depends on the complexity of features. This discretization process also allows adaptive slicing of heterogeneous objects to minimize surface finish and material composition error. In addition, tool path planning can be simplified into fill pattern generation. Specific examples are shown to illustrate the overall procedure.

• 한국가시화정보학회지
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• 제9권2호
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• pp.34-39
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• 2011

This paper presents a novel direct fabrication method of the thin metal film RTD temperature sensor array on an arbitrary curved surface by using MEMS technology to measure a distributed temperature field up to $300^{\circ}C$ without disturbing a fluid flow. In order to overcome the difficulty in the three dimensional photography of sensor patterning, the UV pre-irradiated photosensitive dry film resist technology has been developed newly. This method was applied to the fabrication of the temperature sensor array on a glass tube, which is arranged parallel and transverse to a main flow. Gold was used as a temperature sensing material. The resistance change was measured in a thermally controlled oven by increasing the environmental temperature. The linear increase in resistance change and a constant slope were obtained. Also, the sensitivity of each RTD temperature sensor was evaluated.