• 제목/요약/키워드: polishing characteristics

검색결과 389건 처리시간 0.041초

TCAD 툴을 이용한 제안된 얕은 트랜치 격리의 시뮬레이션 (Simulations of Proposed Shallow Trench Isolation using TCAD Tool)

  • 이용재
    • 한국시뮬레이션학회논문지
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    • 제22권4호
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    • pp.93-98
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    • 2013
  • 본 논문에서는, 초고집적과 초고내압 MOSFET를 위한 높은 임계전압에서 제안한 구조의 얕은 트랜치 접합 격리 구조에 대한 시뮬레이션 하였다. 열전자 스트레스와 열 손상의 유전 강화 전계의 물리적 기본 모델들은 주위 온도와 스트레스 바이어스의 넓은 범위에 걸친 집적화된 소자들에 있어서 분석하는 전기적의 목표인 TCAD 툴을 이용하였다. 시뮬레이션 결과, 얕은 트랜치 접합 격리 구조가 수동적인 전기적 기능 일지라도, 소자의 크기가 감소됨에 따라서, 초대규모 집적회로 공정의 응용에서 제안된 얕은 트랜치 격리 구조가 전기적 특성에서 전위차, 전계와 포화 임계 전압이 높게 나타났다.

PZT/Ferrite 합성 세라믹의 특성에 관한 기초연구 (Electrical and Magnetical Characteristics for PZT/Ferrite Ceramics)

  • 김장용;이상현;이승봉;안형호;현충일;이명세;문병무
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권4호
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    • pp.153-158
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    • 2003
  • This thesis deal with ferroelectric and ferromagnetic materials. PZT/Ferrite ceramics were made by the making process using PZT powder and garnet ferrite powder. PZT and ferrite are mixed as much 90%-10%, 50%-50%, and so on. After making samples, we are polishing samples until thickness is 0.1~0.2mm. We measured all kinds of samples in room temperature and applied magnetic field from -4500 to 4500 Oersted and conducted test of magnetical and electrical measurement using VSM and lpC resolution electrometer calibrated with RT66A pulsed tester. From this measurement, we can calculate tunability of these samples using C value obtained from P-E loop. As a result, it was able to measure magnetic characteristic when two matter had each other component ratio, and it was compound. However, it confirmed the possibility that was able to have ferroelectric characteristic with you in PZT 90% and ferrite 10%. Therefore, If this thing comes for PZT 50% and ferrite 50% have ferroelectric characteristic as him in a compound sample ore, can use this in an oscillator, supersonic waves detector in addition to a piezoelectric element. It may contribute to multipurpose of an element and demands such as a miniaturization of equipment, efficiency, reduce of a price which can use a characteristic of two components.

복합공정을 이용한 스테인레스 박판 마이크로 노즐 어레이 제작 (Fabrication of the Micro Nozzle Arrays on a Stainless Steel Sheet Metal by Using Combined Micro Press and Surface Finishing Process)

  • 박성준;유영석;장현석;김영태;김순영;이상조
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1294-1298
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    • 2005
  • In this study, combined micro press and surface finishing process are proposed to fabricate the micro nozzle array on a stainless steel sheet metal. In micro hole punching process the burr occurs inevitably, but the burr must be minimized in order to improve the quality and accuracy of the product. For this reason, subsequent magnetic field-assisted finishing technique is applied to remove the burr which exists around the nozzles for ink-jet printer head and proved to be a feasible for deburring by experiment. The deburring characteristics of sheet metals were investigated changing with polishing time and magnetic abrasive size. After the deburring, the burr size has remarkably reduced and roundness of the hole also has improved.

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적외선 광학소자의 초정밀 절삭특성에 관한 연구 (The characteristics of Ultra Precision Machine of Optical crystals for Infrared Ray)

  • 김건희;양순철;김효식;신현수;원종호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.414-417
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    • 2005
  • Single point diamond turning technique for optical crystals is studied in this paper. The main factors which are influential the machined surface quality are discovered and regularities of machining process are drawn. Optical crystals have found more and more important applications in the field of modern optics. Optical crystals are mostly brittle materials of poor machinability. The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. The purpose of our research is to find the optimal machining conditions for ductile cutting of optical crystals and to apply the SPDT technique to the manufacturing of ultra precision optical components of brittle material(Ge). Many technical challenges are being tried for the large space infrared telescope, which is one of the major objectives of the National Strategic Technology Road Map (NSTRM).

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적외선용 광학소자의 초정밀 절삭특성 (The Characteristics of Ultra Precision Machining of Optical Crystals for Infrared Rays)

  • 원종호;박원규;김주환;김건희
    • 한국기계가공학회지
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    • 제2권1호
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    • pp.57-62
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    • 2003
  • Machining technique for optical crystals with single point diamond turning tool is reported in tills paper. The main factors influencing the machined surface quality are discovered and regularities of machining process are drawn. Optical crystals have found more and more important applications in the field of modern optics. Optical crystals are mostly brittle materials of poor machinability The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. SPDT has been widely used in manufacturing optical reflectors of non-ferrous metals such as aluminum and copper which are easy to be machined for their proper ductility. But optical crystals being discussed here are characterized by their high brittleness which makes it difficult to obtain high quality optical surfaces on them. The purpose of our research is to find the optimum machining conditions for ductile cutting of optical crystals and apply the SPDT technique to the manufacturing of ultra precision optical components of brittle materials. As a result, the cutting force is steady, the cutting force range is 0.05-0.08N. The surface roughness is good when spindle is above 1400rpm, and feed rate is small. The influence of depth of cut is very small.

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연마제 첨가량에 따른 Mixed Abrasive Slurry (MAS)의 CMP 특성 고찰 (Improvement of Mixed Abrasive Slurry (MAS) Characteristics According to the Abrasive Adding)

  • 이성일;이영균;박성우;이우선;서용진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.380-381
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    • 2006
  • Chemical mechanical polishing (CMP) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, the cost of ownership and cost of consumables are relatively high because of expensive slurry. In this paper, we studied the mixed abrasive slurry (MAS). In order to save the costs of slurry, the original silica slurry was diluted by de-ionized water (DIW). And then, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry. We have also investigate the possibility of mixed abrasive slurry for the oxide CMP application.

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Oxidizer modify에 의한 Metal CMP 특성 (Metal CMP Characteristics by Oxidizer Modification)

  • 박성우;김철복;김상용;이우선;장의구;서용진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.727-730
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    • 2004
  • In this paper, so as to investigate the influence of oxidizer for each metal film using the alumina-based slurry, we have peformed the W/Ti metal-CMP process by adding $H_2O_2$ as a representative oxidizer from 1 wt% to 9 wt%, respectively. As an experimental result, for the case of 5 wt% oxidizer added, the removal rates were improved and polishing selectivity of 1.4 : 1 was obtained. Also, we compared the effects of oxidizer or W-CMP process with three different kind of oxidizers with 5 wt% hydrogen peroxide such as $Fe(NO_3)_3$, $H_2O_2$, and $KIO_3$. Finally, atomic force microscope (AFM) measurements were carried out for the analysis of surface morphology and root mean square (RMS) roughness after CMP Process.

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Specialty Fiber Coupler: Fabrications and Applications

  • Lee, Byeong-Ha;Eom, Joo-Beom;Park, Kwan-Seob;Park, Seong-Jun;Ju, Myeong-Jin
    • Journal of the Optical Society of Korea
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    • 제14권4호
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    • pp.326-332
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    • 2010
  • We review the research on specialty fiber couplers with emphasis placed on the characteristics that make them attractive for biomedical imaging, optical communications, and sensing applications. The fabrication of fiber couplers has been carried out with, in addition to conventional single mode fiber, various specialty fibers such as photonic crystal fiber, double clad fiber, and hole-assisted fiber with a Ge-doped core. For the fiber coupler fabrication, the side polishing and the fused biconical tapered methods have been developed. These specialty fiber couplers have been applied to optical coherence tomography, fluorescence spectroscopy, fiber sensors, and optical communication systems. This review aims to provide a detailed statement on the recent progress and novel applications of specialty fiber couplers.

Si와 Ge의 초정밀 절삭특성 (The Characteristics of Ultra Precision Machining of Si and Ge)

  • 원종호;박상진;안병민;도철진;홍권희;김건희;유병주
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2000년도 춘계학술대회 논문집
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    • pp.775-778
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    • 2000
  • Single point diamond turning technique fur optical crystals is reported in this paper. The main factors influencing the machined surface quality are discovered and regularities of machining process are drawn. Optical crystals have found more and more important applications in the field of modern optics. Optical crystals are mostly brittle materials of poor machinability. The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. SPDT has been widely used in manufacturing optical reflectors of non-ferrous metals such as aluminum and copper which are easy to be machined for their proper ductility. But optical crystals being discussed here are characterized by their high brittleness which makes it difficult to obtain high quality optical surfaces on them. The purpose of cur research is to find the optimum machining conditions for ductile cutting of optical crystals and apply the SPDT technique to the manufacturing of ultra precision optical components of brittle materials. As a result, the cutting force is steady, the cutting force range is 0.05-0.08N. The surface roughness is good when spindle is above 1400rpm. and feed rate is small. The influence of depth of cut is very small.

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후기르네상스 궁정복식에 나타난 매너리즘 양식 (A Study on Mannerism Style Experessed In The Late Renaissance Court Dress)

  • 김민자
    • 복식
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    • 제42권
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    • pp.69-90
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    • 1999
  • Mannerism style evolved from the Renaissance style adopting the concept of grace as the ideal beauty, Having its ground on Neoplatonism the main goal of mannerism art was the realization of the invisible beauty over reality. Mannerism style in dress flourished in the sixteenth century court society, when courtly manners and courtly grace became the most important qualities in social relationship. Courtiers thought that courtly grace the ideal of beauty could be realized in the cultured and studied elegance. Mannerism style in dress evolved from the process of transforming and manipulating the Renaissance look for the abstract of beauty. The clothes of Mannerism style were against the natural movement of the human body. There was a tendency of refining and polishing the whole clothing and various technical skills were experim-ented on the mannerism style. The outstanding elements of this tendency can be found in the details like ruffs fathingale padding slashing puffing and etc. Mannerism intended to reconstruct the human body artificially to express courtly grace and novelty. During that process the new pose 'figura serpentinata' which is bizarre convoluted pose with full of flexibility was created. The expression of human body became more slender with elongated legs a torso with a long neck and a tiny head. This tendency of distorting the natural body forms were reflected in the formal characteristics of Mannerism dress style which is geometrical abstr-action unnatural elongation complex disposition and control with perfect ease.

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