• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.387-394
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• 2013

As the feature size of integrated circuits continues to decrease, the challenge of achieving an oxidation-free exposed layer after photoresist (PR) stripping is becoming a critical issue for semiconductor device fabrication. In this article, the hydrogen plasma characteristics in direct plasma and the PR stripping rate in remote plasma were studied using a $120{\Phi}$ cylindrical inductively coupled plasma source. E mode, H mode and E-H mode transitions were observed, which were defined by matching the $V_{rms}$ and total impedance. In addition, the dependence of the E-H mode transition on pressure was examined and the corresponding plasma instability regions were identified. The plasma density and electron temperature increased gradually under the same process conditions. In contrast, the PR stripping rate decreased with increasing proportion of $H_2$ gas in mixed $H_2/N_2$ plasma. The decrease in concentration of reactive radicals for the removal of PR with increasing $H_2$ gas flow rate suggests that NH radicals have a dominant effect as the main volatile product.

• 천문학논총
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• 제2권1호
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• pp.13-20
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• 1985

Magnetic reconnect ion is studied numerically by means of a two dimensional MHD code. The initial magnetic field configuration is the two-dimensional dipole field, and the simulation model involves magnetic reconnect ion driven by the magnetized plasma flow. Strong plasma jetting, plasmoid formation and its fast ejection are observed in the downstream region. The dependence of reconnection rate on the incoming energy flux is found to be very sensitive, while the magnitude of the resistivity does not influence much on the reconnection rate. The simulation results are discussed in the context of the geomagnetic substorm.

• E2M - 전기 전자와 첨단 소재
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• 제9권9호
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• pp.918-924
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• 1996

A downstream oxygen plasma is generated by capacitively coupled RF power and applied to photoresist stripping. Stripping rate (ashing rate) is measured in terms of RF power, chamber pressure, oxygen flow rate and temperature. Ashing reaction is thermally activated and depends on oxygen radical density. The ashing process is optimized to have the high ashing rate, good uniformity and minimal plasma damage using a statistical method.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.31.2-31
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• 2001

A real-time control strategy is presented for plasma control Rather than in-situ plasma variables, this is based on realtime measurements of two electrical positions that correspond to two match motors. Using the rf match monitor system, the positions were collected. The process of impedance matching was identified with variations in process factors, including rf power, pressure, and O$_2$ flow rate. A state-space model was obtained basing on autoregressive moving average model. For this model, a linear quadratic regulator was designed and applied. Simulation results revealed that match positions could accurately be regulated to follow certain positions arbitrarily chosen.

• 대한약학회:학술대회논문집
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• 대한약학회 2003년도 Proceedings of the Convention of the Pharmaceutical Society of Korea Vol.1
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• pp.283.2-283.2
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• 2003

This study established a highly sensitive novel quantification method for detecting felodipine in human plasma using LC-MS/MS. The mobile phase used after degassing was composed of 1 mM ammonium acetate and acetonitrile (20:80, pH 6.0), with flow rate of 200 uL/min. One mL plasma were pipetted into glass tubes and spiked with 0.1 mL of internal standard solution. (omitted)

• 대한약학회:학술대회논문집
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• 대한약학회 2003년도 Proceedings of the Convention of the Pharmaceutical Society of Korea Vol.1
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• pp.282.1-282.1
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• 2003

This study established a sensitive novel Quantification method for detecting glimepiride in human plasma using LC-MS/MS for pharmacokinetic studies. The mobile phase used after degassing was composed of 10 mM ammonium acetate and acetonitrile (20:80, pH 3.0), with flow rate of 200uL/min. One mL plasma were pipetted into glass tubes and spiked with 0.1 mL of internal standard solution. (omitted)

• 한국수소및신에너지학회논문집
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• 제25권6호
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• pp.586-593
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• 2014

Limited sources of fossil fuels and also global climate changes caused by $CO_2$ emissions are currently discussed around the world. As a renewable, carbon neutral and widely available energy source, biogas is regarded as a promising alternative to fossil fuels. In this study, a plasma dump reformer was proposed to produce $H_2$-rich synthesis gas by a model biogas. The three-phase gliding arc plasma and dump combustor were combined. Screening studies were carried out with the parameter of a dump injector flow rate, water feeding flow rate, air ratio, biogas component ratio and input power. As the results, methane conversion rate, carbon dioxide conversion rate, hydrogen selectivity, carbon monoxide yield at the optimum conditions were achieved to 98%, 69%, 42%, 24.7%, respectively.

• Journal of Welding and Joining
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• 제15권1호
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• pp.116-124
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• 1997

A scope of this study is to establish the optimum plasma spray conditions for fine ($5\mu\textrm{m}$) $Al_2O_3$ powder. However, the flowability of the $Al_2O_3$ powder is not so good because of irregular particle shape and fine particle size. Therefore, powder feeding system was modified by 1) change of powder feeding line material from polymer to copper 2) shorten the powder feeding tube length 3) heating the powder feeding system to $80^{\circ}C$4) vibrating the powder feeding line continuously, in order to feed the fine powder homogeneously. The homogeneous powder feeding conditions were obtained with the modified powder feeding system by controlling the powder carrier gas flow and the powder flow rate indicator. The best plasma spraying conditions for the fine $Al_2O_3$ powder were found out as 40kw gun power, 80 g/min. powder feed rate and 50 mm working distance after characterizing the microstructure, hardness and wear loss of the $Al_2O_3$ coating layer.

• 한국환경과학회지
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• 제21권6호
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• pp.695-704
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• 2012

The application of disinfection models on the plasma process was investigated. Nine empirical models were used to find an optimum model. The variation of parameters in model according to the operating conditions (first voltage, second voltage, air flow rate, pH) were investigated in order to explain the disinfection model. In this experiment, the DBD (dielectric barrier discharge) plasma reactor was used to inactivate Ralstonia Solanacearum which cause wilt in tomato plantation. Optimum disinfection models were chosen among the nine models by the application of statistical SSE (sum of squared error), RMSE (root mean sum of squared error), $r^2$ values on the experimental data using the GInaFiT software in Microsoft Excel. The optimum model was shown as Weibull+talil model followed by Log-linear+ Shoulder+Tail model. Two models were applied to the experimental data according to the variation of the operating conditions. In Weibull+talil model, Log10($N_o$), Log10($N_{res}$), ${\delta}$ and p values were examined. And in Log-linear+Shoulder+Tail model, the Log10($N_o$), Log10($N_{res}$), $k_{max}$, Sl values were calculated and examined.

• 한국환경과학회지
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• 제21권4호
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• pp.479-488
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• 2012

A Dielectric barrier discharge (DBD) plasma is shown in the present investigation to be effective of phenol degradation in the aqueous solutions in batch reactor with continuous air bubbling. Removal of phenol and effects of various parameters on the removal efficiency in the aqueous solution with high-voltage streamer discharge plasma are studied. The effect of 1st voltage (80 ~ 220 V), air flow rate (3 ~ 7 L/min), pH (3 ~ 11), electric conductivity of solution (4.16 ${\mu}S$/cm, deionized water) ~ 16.57 mS/cm (addition of NaCl 10 g/L) and initial phenol concentration (2.5 ~ 20.0 mg/L) were investigated. The observed results showed that phenol degradation was higher in the basic solution than that of the acidic. The optimum values on the 1st voltage and air flow rate for phenol degradation were 140 V and 6 L/min, respectively. It was considered that absorbance variation of $UV_{254}$ of phenol solution can be use as an indirect indicator of change of the non-biodegradable organic compounds within the treated phenol solution. Electric conductivity was not influenced the phenol degradation. To obtain the removal efficiency of phenol and COD of phenol over 97 % (initial phenol concentration, 10.0 mg/L), 80 min and 120 min were need, respectively. Phenol and COD degradation showed a pseudo-first order kinetics.