• 한국재료학회지
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• 제12권3호
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• pp.200-204
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• 2002

We fabricated TMR devices which have double oxidized tunnel barrier using plasma oxidation method to form homogeneously oxidized AlO tunnel barrier. We sputtered 10 $\AA$-bottom Al layer and oxidized it by varying oxidation time for 5, 10, 20 sec. Subsequent sputtering of 13 $\AA$ - Al was performed and the matallic layer was oxidized for 120 sec. The electrical resistance changed from 700$\Omega$ to 2700$\Omega$ with increase of oxidation time, while variation of MR ratio was little spreading 27~31% which is larger than that of TMR device of ordinary single tunnel barrier. We calculated effective barrier height and width by measuring I-V curves, from which we found the barrier height was 1.3~1.5 eV, sufficient for tunnel barrier, and the barrier width(<16.2 $\AA$) was smaller than that of directly measured value by the tunneling electron microscopy. Our results may be caused by insufficient oxidation of Al precursor into $Al_2O_3$. However, double oxidized tunnel barriers were superior to conventional single tunnel barrier in uniformity and density. We found that the external magnetic field to switch spin direction of ferromagnetic layer of pinned layer breaking ferro-antiferro exchange coupling was increased as bottom layer oxidation time increased. Our results imply that we were able to improve MR ratio and tune switching field by employing double oxidized tunnel barrier process.

• 한국재료학회지
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• 제12권9호
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• pp.718-723
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• 2002

$Ti_{1-x}$ $Al_{ x}$N thin films as barrier layer for memory devices application were deposited by reactive magnetron sputtering. The crystallinity, micro-structure, oxidation resistance and oxidation mechanism of films were investigated as a function of Al content. Lattice parameter and grain size of thin films were decreased with increasing the Al content Oxidation of the film with higher Al content is slow and then, total oxide thickness is thinner than that of lower Al content film. Oxide layer formed on the surface is AlTiNO layer. Oxidation of $Ti_{1-x}$ /$Al_{x}$ N barrier layer is diffusion limited process and thickness of oxide layer with oxidation time increased with a parabolic law. The activation energy of oxygen diffusion, Ea and diffusion coefficient, D of $Ti_{0.74}$ /X$0.74_{0.26}$N film is 2.1eV and $10^{-16}$ ~$10^{-15}$ $\textrm{cm}^2$/s, respectively. $_Ti{1-x}$ /$Al_{x}$ XN barrier layer showed good oxidation resistance.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2005년도 제24회 춘계학술대회논문집
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• pp.106-111
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• 2005

Failure mechanisms were investigated for the two layer thermal barrier coatings consisting of NiCrAlY bond coat and $ZrO_2-8wt.\% Y_{2}O_3$ ceramic coating during cyclic oxidation. $Al_{2}O_3$ developed at the ceramic coating/bond coat interface first, followed by the Cr/Ni rich oxides such as $NiCr_{2}O_4 and Ni(Al,Cr)_{2}O_4$ during cyclic oxidation It was observed that the spalling of ceramic coatings took place primarily within the NiCrAlY bond coat oxidation products or at the interface between the bond coat oxidation products and zirconia based ceramic coating or the bond coat. It was also observed that the fracture within these oxidation products occurred with the formation of $Ni(Cr,Al)_{2}O_4$ spinel or Cr/Ni rich oxides. It was therefore concluded that the formation of these oxides was a life-limiting event for the thermal barrier coatings.

• The Korean Journal of Ceramics
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• 제4권4호
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• pp.340-344
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• 1998

Failure mechanisms were investigated for the two layer thermal barrier coatings consisting of NiCrAlY bond coat and $ZrO_2$-8wt.% $Y_2O_3$ ceramic coating during cyclic oxidation. $Al_2O_3$ developed at the ceramic coating/bond coat interface first, followed by the Cr/Ni rich oxides such as $NiCr_2O_4$ and $Ni(Al, Cr)_2O_4$ during cyclic oxidation. It was observed that the spalling of ceramic coatings took place primarily within the NiCrAlY bond coat oxidation products or at the interface between the bond coat oxidation products and zirconia based ceramic coating or the bond coat. It was also observed that the fracture within these oxidation products occurred with the formation of $Ni(Cr, Al)_2O_4$ spinel or Cr/Ni rich oxides. It was therefore concluded that the formation of these oxides was a life-limiting event for the thermal barrier coatings.

• 한국자기학회지
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• 제12권3호
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• pp.99-102
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• 2002

기존 절연막보다 균일한 AlO 절연막을 형성하기 위해 플라즈마 산화법을 이용하여 이중 연속 절연막을 형성한 TMR소자를 제작하였다. 10 $\AA$의 Al 하부 절연막의 산화시간을 10sec로 우선 완성하고 그 위에 13 $\AA$의 Al을 성막하고 50, 80, 120sec간 산화시켜 완성한 절연막의 특성을 알아본 결과 산화시간이 증가할수록 전기저항은 500 $\Omega$에서 2000 $\Omega$까지 크게 변화하며 80sec 에서 가장 작았고, MR비는 27~31 %로 큰 변화가 없었으나, 단일산화 절연막을 가진 시편(24%)보다는 모두 높은 자기저항비를 보였다. I-V측정을 통해 간접적으로 유효 장벽 높이와 장벽 폭을 계산한 결과 장벽 높이는 1.3~1.8eV로 터널링 장벽으로서 충분한 크기를 보였으며 장벽 폭의 경우에는 15.0 $\AA$ 이하로 실제 물리적으로 측정한 값보다 작음을 알 수 있었다. 이는 Al금속이 완전히 안정한 A1$_2$O$_3$로 산화되지 않았기 때문으로 생각되었으며, 그럼에도 불구하고 단일 AlO 절연막 시편보다는 균일하고 치밀한 절연막을 형성하였음을 확인하였다. 이러한 결과는 이중절연층 산화공정이 기존 공정보다 절연장벽을 우수하게 하여 MR비를 향상시키고 기준저항을 조절하는데 유리한 공정임을 의미하였다.

• 한국표면공학회지
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• 제27권2호
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• pp.91-98
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• 1994

For the plasma sprayed as well as the EB-PVD thermal barrier coatings, the fracture paths within the oxidation products developed at the interface between the partially stabilized zirconia ceramic coating and NiCoCrAlY bond coat during cyclic thermal oxidation has been investigated. It was observed that the fracture in the oxidation products primarily took place within the oxide such as $Ni_{1-x}Co_3(Al_,Cr)_2O_4$ or at the interface between the oxide and $Al_2O_3$. It was found that Al2O3 developed first, followed by the Ni/Co/Cr rich oxides such as ,,$Ni_{1-x}Co_x(Al_,Cr)_2O_4$ $Cr_2O_3$and NiO at the interface between the ceramic coating and the bond coat in a cyclic high temperature environment. It was therfore concluded that the formation of the oxide containing Ni, Cr and Co was a life-limiting event for thermal barrier coatings during cyclic thermal oxidation.

• 한국표면공학회지
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• 제39권4호
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• pp.147-152
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• 2006

Failure mechanisms of electron beam physical vapor deposited thermal barrier coatings(EB-PVD TBCs) that occur during thermal cyclic oxidation were investigated. The investigations include microstructural degradation of NiCrAIY bond coat, thermally grown oxides(TGOs) along the ceramic top coat-substrate interface and fracture path within TBCs. The microstructural degradation of the bond coat during cyclic oxidation created Al depleted zones, resulting in reduction of NiAl and ${\gamma}$-Ni solid solution phase. It was observed that the fracture took placed primarily within the TGOs or at the interfaces between TGOs and bond coat.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.725-726
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• 2009

• Korean Chemical Engineering Research
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• 제45권2호
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• pp.183-189
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• 2007

대표적인 수은 발생원인 도시폐기물 소각로와 화력 발전소 등지에서 배출되는 원소수은($Hg^0$)은 산화수은($Hg^{2+}$) 및 입자상 수은($Hg^p$)과 달리 기존의 대기오염 방지시설로 제거하기 난해한 편이다. 그로 인해 원소수은의 효율적 제거에 대한 많은 연구가 진행중이며, 이 연구에서는 저온 플라즈마(non-thermal plasma)의 하나인 유전체 장벽 방전(dielectric barrier discharge: DBD) 공정을 이용하여 원소수은 산화에 관한 실험을 수행하였다. 실험 결과, 공기 상의 DBD 공정에서는 생성되는 산소 원자와 오존에 의해서 원소수은이 산화수은으로 전환됨을 알 수 있었으며, 원소수은의 산화율을 결정하는 주된 변수는 반응기에 주입되는 에너지 밀도임을 확인할 수 있었다.

• 한국포장학회지
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• 제24권1호
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• pp.13-16
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• 2018

Powdered infant formula is susceptible to oxidation in the presence of oxygen. Even though the product is usually packaged in nitrogen atmosphere, the oxygen ingress through the package layer may occur in case of flexible pouches and affects the oxidation of the product. $O_2$ barrier of the package is thus important variable to protect the product from oxidative deterioration. $O_2$ barrier property was investigated for aluminum-laminated small pillow packs of $3.5{\times}17.5cm$. Storage temperature and combination of primary and secondary packages were evaluated as variables affecting the barrier for conditions of empty pouch flushed with nitrogen. Apparent oxygen transmission rate of the primary package exposed to air was $2.32{\times}10^{-3}mL\;(STP)\;atm^{-1}\;d^{-1}$ at $30^{\circ}C$ and its temperature dependence could be explained by activation energy of $28.5kJ\;mol^{-1}$ in Arrhenius relationship. The additional secondary package of nylon/PE film containing 20 primary packages was ineffective in modulating package $O_2$ transmission and was only marginally helpful when combined with oxygen scavenger. The same was true in suppressing the product oxidation when the primary package was filled with 14 g of the formula.